 <h5>U</h5>
UHV environment 638
UHV-AVM 635
ultrahigh vacuum (UHV) 391, 418,
461, 607, 635
ultrasonic
– bonding 1119
– lubrication 513
– transducer 663
ultrasound triggering 299
ultrathin DLC coatings 795
umklapp processes 125
unbinding
– force 476, 481
– force distribution 485
– pathway 488
uncapped MEMS wafer 1097, 1098
uncoated monolithic cantilever 611
uncommon failure mode 1102
unconstrained binding 477
unidirectional electron transfer 28
unimolecular level 22
universality 752
unlubricated sample 879
unlubricated surfaces see dry
surfaces
upward cantilever deflection 746
UV-LIGA lithography 267