S
sacrificial film layers 1040 sales volume 1093 SAM (self-assembled monolayer) 165, 176, 178, 622, 1088 – coating 1075 – melting point of 853 – modified surface 620 sample holder 416 sandwich immunoassays 270 sandwiched molecules 26 saturated calomel electrode 24 saturated hydrocarbons 835 scale-dependent surface tension 614 scaling factor 975 scan – area 335 – direction 345 – frequency 335 – head 417 – range 359, 360 – rate 329 – size 337 – speed 360 scanner, piezo 436 scanning – acoustic microscopy (SAM) 663, 692 – capacitance microscopy (SCM) 326 – chemical potential microscopy (SCPM) 326 – electrochemical microscopy (SEcM) 326 – electron microscope (SEM) 110, 373, 521 – electrostatic force microscopy (SEFM) 326 – head 328 – ion conductance microscopy (SICM) 326 – Kelvin probe microscopy (SKPM) 326 – lateral range 929 – local-acceleration microscopy (SLAM) 663 – magnetic microscopy (SMM) 326 – nanoindentation (SN) 674 – nanoindenter 662 – near field optical microscopy (SNOM) 326 – polarization force microscopy (SPFM) 615 – speed 335 – system 359 – thermal microscopy (SThM) 114, 326 – tunneling microscope (STM) 385, 396, 450, 498, 922 – tunneling microscopy (STM) 114, 325, 371, 382, 397, 899 – tunneling probe 114 – velocity 519 scanning force – acoustic microscopy (SFAM) 326 – microscopy (SFM) 326, 433, 663, 884 – spectroscopy (SFS) 433 scanning probe – lithography 186 – methods 606 – microscope (SPM) 326 – microscopy (SPM) 371, 385, 612, 663, 899 schematic diagram of T-SLAM 663 Schottky diode 132 scission 622 scope of therapeutic nanodevices 285 scratch – critical load 824 – damage mechanism 818, 819 – depth 771, 773, 1000 – depth profile 773 – drive actuator 1031 – profile 519 – resistance 765, 771, 853, 1001 – test 520, 814 scratch-induced damage 813 scratching measurement 325 SCREAM 161 screen printing 193 sealing 1112 second anodization 100 secondary signaling drug delivery 301 Seebeck coefficient 123, 133 seek – control 976 – time 901 selected area electron diffraction (SAED) 111 selective electrodeposition 108 self-actuation voltage 1062 self-aligning optical system 236 self-assembled – growth 420 – microscopic vesicles 834 – monolayers (SAMs) 27, 165, 176, 187, 476, 536, 606, 618, 703, 833, 839, 861, 1003, 1004 – nanoparticles 312 – nanotube bunches 58 – structures 291, 310 self-assembled monolayer (SAM) – patterned 188 self-assembly 131, 147, 170, 173, 176, 178, 179, 288 – in biological systems 740 – of nanostructures 289 – of organic layers 23 self-enhancing instability 458 self-excitation – modes 461 – scheme 464 self-lubrication 652, 653 self-regulation of a therapeutic device 302 self-replicating nanobot 1146 self-tuning control 974, 976 semibiological nanodevices 281 semiconductor 103, 391 – economics 1086 – quantum dots 428 – surface 392 – SWNT 74, 85 semimetallic nanowire 118 semimetal–semiconductor transition 118, 123 sensing – channel 303 – element 227 – modalities of therapeutic nanotechnology 302 sensing devices – biological 137 – chemical 137 sensitivity 356, 357, 390, 467, 479, 633, 972 sensitizer 30 sensor 233 – and effector communication 283 – applications 117 – noise 975 – systems 302 – transducer interface 304 sequential logic circuits 20 sequential microfluidic manipulation 268 servo – demodulation 945 – field 943 – loop 943 – self-writing 945 servo control design 968 sessile-drop 832 SFA (surface forces apparatus) 884, 894, 1011 – measurement 613 SFM (scanning force microscope) 884, 888, 890, 894 – shear force experiments 893 shallow indentation measurement 679 shape memory alloys (SMA) 260 sharpened metal wire tip 382 shear – energy 887 – force see kinetic friction, static friction – melting 570, 586 – modulus 633, 933 – rate 866 – strength 646 – stress 850, 887 – thinning 581, 583, 584, 589 shear flow – damping 1073 – detachment (SFD) 479 shear stress – critical 571, 572, 577, 585, 586 – effective 648 shearing force 848 shearing interface 721 shear-melting transitions 734 SH-group 476 short-cut carbon nanotubes 428 short-range – chemical force 437, 464 – chemical interaction 402 – contribution 386 – electrostatic attraction 399 – electrostatic interaction 398 – energy dissipation 468 – interatomic force 455 – magnetic interaction 397, 402, 403 shot noise 355 Shubnikov–de Haas quantum oscillatory effect 122 shuttle – displacement 957 – finger 956 Si 373, 375, 619 – adatom 393 – cantilever 373, 458, 465 – MEMS 247, 985 – nanobeam 773, 781, 785 – stamp 190 – tip 374, 392 – trimer 395 – wafer 373, 459, 619 Si(001)2?1 394 Si(001)2?1-H surface 394 Si(100) 515, 520, 614, 818, 820, 862, 867–869, 875, 877, 878, 995, 1012 – wafer 863 Si(100)2?1:H monohydride 393 Si(111) 519, 527, 848, 850, 999 Si(111) surface 404 Si(111)v3?v3-Ag 395, 396 Si(111)(7?7) 434, 468, 640 Si(111)(7?7) surface 389, 397, 462, 639 Si(OH)4 film 1013 Si3N4 375, 501, 619 – based tip 619 – cantilever 373 – layer 373 – tip 341, 374, 531, 841, 848, 866, 871, 880 Si-Ag covalent bond 397 Si-based devices 764 SiC 995 – bulk properties 995 – film 770 signal – distribution 1112 – transduction 20 silane (SiH4) 206 silica – thermally grown 840 silicon 332, 356, 388, 610, 693, 705, 1111 – AFM tip 478 – cantilever 387, 633 – chemistry 478 – crystalline 254 – dioxide (SiO2) 254 – dioxide layer 31, 33 – FET 303 – fractures 777 – fusion 1118 – grain 1035 – membrane 263 – MEMS 1095 – micromachining 227 – micromotor 866 – oxide 106, 477 – surface 477 – tip 392, 434, 463, 635 – wafer 25, 27, 186, 189, 228, 286, 453, 614, 930 silicon nitride (Si3N4) 254, 332, 477, 610, 615, 913, 964, 968 – cantilever 372 – layer 1117 – tip 375, 635 silicon-based MEMS sensor 229 silicon-based mold masters 255 silicon-on-insulator (SOI) 205, 241, 964 – substrates 247 silicon-only wafer 965 silicon-on-silicon contact 1012 silicon-silicon bonding 1096 silicon-terminated tip 435 silicon-to-glass fusion bonding 1120 siloxane 833 simultaneous imaging 397 – of a TiO2(110) surface 401 single asperity 646 – AFM tip 868 – contact 517, 1012 – size of 722 single bond 622 single crystal – aluminum (100) 522 – nanowires 104 – Si(100) 770, 862 – silicon 504, 964, 995, 1024 – silicon cantilever 341, 611 – wafers 204 single crystalline iron 675 single domain magnetic 138 single magnetic flux quantum 122 single molecular motor 480 single molecule – assays 743 – biology 743 – detection 477 – experiment 760 – studies 485 single particle model 894 single point sensor 1091 single protein therapeutics 281 single receptor-ligand pair 480 single stranded DNA (ssDNA) 746 single-input-multi-output (SIMO) 956 single-input-single-output (SISO) 969 single-layer – beam 1044 – film 1050 single-particle wave function 422 single-stranded nucleic acid molecule (SSNA) 302 single-wall carbon nanotube (SWCNT) 34, 40, 289, 315, 342, 376, 668 single-wall nanocapsule 49 singularity in joint density of states 134 sink-in 693, 699, 700, 709, 711 – behavior 674 sintering 553 SiO2 54, 373, 375, 531, 615 – film 770 – nanobeam 773, 774, 785 – thin films 205 SiOH groups 478 Si-SiO2 stress formation 375 SISO 973 – design 969 site-specific drug delivery 298 Si-wafer 460 SLAM 663 slider 952 sliding – contact 651 – direction 585 – distance 587 – friction 734 – of tip 632 – speed 889 – velocity 574, 585, 644, 884 SLIGA 168 s-like tip states 422 slip distance 732, 889 slipping and sliding regimes 586 SMA (shape memory alloys) 260 – actuation schemes 260 – driven micropumps 261 small angular deflection 1068 small specimens handling 1025 SMANCS (S-Methacryl-neocarzinostatin) 309 – albumin complexes 309 smart media card 905 smart plastic biochip 273 smooth sliding 585 snap-in process 609 SnO2(110) 400 soap-like lubricants 887 social – perception 1145 – services 1142 societal impacts 1136 socio-technical trends 1141 soft – cantilever 453 – coatings 708 – lithography 833 – polymer stamps 190 SOI wafer 1096 solar furnace – devices 52 – method 61 solder bonding 1115, 1118 solid boundary lubricated surfaces 571, 572, 576–578, 587, 588 solid solution catalyst 55 solid xenon 436 SOLID95 779 solidification 578, 582 solid-like – behavior 593 – Z-DOL(BW) 866 solution-phase synthesis 107 solvation – effect 621, 623 – forces 545, 557, 558, 561, 567 sonolubrication 513 soot 46 SP 815 spacer chain 839–841 – length 844 spark plasma sintering (SPS) 81 spatial variation curvature 1058 specific accumulation of nanoparticles 311 specificity 752 spectroscopic resolution in STS 419 speed-energy product 1073 spin – casting 192 – coating 887 – density waves 431 – quantization 423 spin-on-glass 965 spiropyran 18 SPM (scanning probe microscopy) 73, 372 – methods 672 – tip 452 spreading – dynamics 892 – profile 892 spring – sheet cantilever 341 – system 327, 929 spring constant 377, 387, 390, 393, 433, 450, 451, 469, 480, 483, 611, 633, 671, 911, 956, 1030, 1067 – calculation 347 – changes 415 – effective 637, 645, 721 – lateral 338, 636 – measurement 346 – torsional 1068 – vertical 338 sputtered coatings – physical properties 804 sputtering – deposition 799 – power 805 sp3 bonding 806 sp3-bonded carbon 813 squeeze film damping 248, 1073 SRAM – cells 1088 – CMOS static random access memory 235 SrF2 398, 399 SrTiO3 402 SrTiO3(100) 400, 401 stability – mechanical 927 stabilization 1065 stable field performance 1102 stainless steel cantilever 813 stamp – Au coated PDMS 192 – Au/Ti coated 191 – composite 188 – depth 190 – fabrication 186 – mechanical properties 187 – positioning 195 standardization 249 static – advancing contact angle (SACA) 847 – AFM 388, 469 – charge 1103 – deflection AFM 450 – friction 571, 576, 579, 583, 585–587, 589, 590, 593, 718, 731, 1034 – friction force 722, 866, 1014 – interactions 544, 584 – mode 387, 433, 453 – mode AFM 354 statistical fluctuation model 889 statistical kernels 891 steady-state sliding see kinetic friction steady-state velocity 733 step tilting 855 stepping motor 636 stereoelectronic properties 12 stick slip 592 sticking regime 586 stick–slip 571, 576, 579, 583–585, 587, 590, 876, 885, 886, 889, 894 – mechanism 636 – motion 732 stiction 579, 832, 885, 991, 1088, 1103 – phenomena in micromotors 1016 – suppression 1103 stiffness 390, 663, 819 – torsional 349 stiffness coefficient – elastic 1048 stiffness measurement – continuous (CSM) 810 STM (scanning tunneling microscope) 173–176, 325, 397 – cantilever 330 – cantilever material 339 – principle 327 – probe construction 330 – tip 325, 417 stoichiometry of compound nanowires 115 Stokes’s equation 933 Stone–Wales defect 62, 68 Stoney equation 1024 storage – capacity 946 – drive industry 902 – field 943 – modulus 702 – surface topography 942 strain – energy 609 – energy difference 810 – engineering 147, 170 – theory 1144 – thermally induced 1125 – transformation 1041 strain–displacement relation 1049 stray capacitance 357 strength 1023 streptavidin 478 – mutants 484 stress 751, 930, 1023 – activation volume 887 – component 1043 – distribution 779, 1049 – field 1024 – gradient 1026 – maximum 1027 – measurement 1025 – relaxation 1060 – singularity 1043 – tensor 759 – transformation 1044 – uniaxial 1042 stresses within the capsid walls 758 stress–strain – behavior 1028 – curve 671, 784 – relation 1048 stress–temperature response 1060 stretch modulus 751 Stribeck curve 569, 584, 884 strip domain 439 structural – characterization 110 – entropy 886, 887 – forces 545, 557, 559, 566 – integrity 764 – material 1028 structurally programmable microfluidic system (sPROMs) 264 structure factor 730 structuring of simple liquids 886 SU-8 resist 929 sub-Angstrom deflections 372 subcontractor 1087 subculture theory 1145 sublimation 52 submicron – electron-beam lithography 246 – ICs 247 – lithographic techniques 246 submonolayer – coverage 864 – lubrication 731 subnanometer precision 10 sub-nanonewton precision 452 substrate 839, 840 substrate curvature technique 1024 substrate–slider interactions 727 subsurface water irrigation 676 super modulus 691 supercapacitor 85 superconducting – gap 431 – magnetic levitation 327 – matrix 440 superconductivity 419 superconductors 103, 429 – type-I 431 – type-II 431 superficial nanotechnology aspects 1140 superlattice – nanowire 103, 114 – structure 108 superlubricity 642 superparamagnetic materials 305 superparamagnetism 138 superstructures of nanowires 108 supramolecular – assembly 17 – forces 35 surface – adsorption 263 – amorphous 544 – asperity effect 513 – atom layer 388 – band 423 – barrier potential height 890 – charge 557, 621, 1074 – charge density 555–557 – chemistry 190, 296 – crystalline 544 – diffusion 190 – effects 129 – elasticity 529 – energy 619, 792, 1088 – energy (tension) 547, 552, 566, 567, 572, 574, 578 – forces 544 – forces apparatus (SFA) 479, 498, 546–548, 552, 576, 585, 588, 606, 717, 731, 884 – free energy 745, 746 – hydrophobic 544, 560 – micromachined accelerometers 231 – micromachining 163, 226, 229 – micromechanical properties 498 – microtribological properties 498 – mobility 865 – nanomechanical properties 498 – nanotribological properties 498 – passivation 1102 – potential 419, 555–557, 798 – potential measurement 503 – slope 844 – state lifetime 423 – stiffness 506 – structure 111, 400, 544, 558, 559, 566, 567, 570, 586, 591 – tension 265, 516, 618, 832, 846, 862 – terminal group 839 – topography 632, 778, 901 – transfer chemistry 190 – treatment 1104 surface roughness 383, 674, 678, 724, 773, 778, 844, 942, 997, 1009 – map 510 – measurement 500 surface-mounted biofilter 272 surfactant monolayers 547, 564, 568–570, 577, 580, 584, 585, 588 surfactants 103, 107 surgical resection 307 suspended membrane 1028 suspension 967 – vibration 959 suspension-level fabrication 967 sustainable internal pressure – maximum 759 sustained drug delivery 269 switch – two-state 19 switch design 1062 switches – molecule-based 15 – monolayer 28 switching – architecture 238 – devices 15 – energy 135 – speed 135 – time 1073 SWNT (single wall nanotube) 40, 52 – adsorption properties 63 – based FET 85 – based materials 64 – catalyst-based 61 – conductance 75 – electronic structure 66 – epoxy composite 82 – flexural modulus 67 – magneto-resistance 67 – matrix interaction 82 – production techniques 45 – rope 668, 670 – structure 41 – surface area 64 – tensile strength 67 – thermal conductivity 66 SWNT-PMMA composite 83 symmetric deformation mode 1054 sync pattern 946 synchronization 945 synthesis 100 – reactor 47 – yield 47 synthetic – devices 281 – nanoporous membrane 313 – readback signal 941 system – underdamped 894