P
package level integration 1093 packaging 248, 249 – cap 1112 – equipment 1099 – induced thermal stress 1123 – reliability 1125 – uniform 1112 packing density – chains 842 palladium nanowires 137 PAMAM (polyamido amine) dendrimer 286, 287 p-aminophenyl phosphate (PAPP) 271 paper-like displays 193 paraboloid load displacement 697 paraffins 835 parallel-plate – actuator 955 – capacitor model 1064 – sensing 957 paramagnetic particles 305 parasitic charging 1077 particle – contamination 1098 – control 1098 – opsonized 296 – track-etched mica films 103 particle model – embedded 894 Paschen curve 1076 passive – check valves 262 – linearization 361 – microfluidic device 257, 269 – microfluidic dispenser 273 – microfluidics 262 – micromixers 265 – micropump 269 – microvalves 257, 262 – structure 1025 – valve geometry 264 patient-monitoring systems 274 pattern of ink 186 pattern transfer 191 patterned – conductive substrate 110 – film 1053 – self-assembled monolayer (SAM) 188 – silicon chip 25 patterning 1075 Pb on Ge(111) 428 PbI2 filled SWNT 70 PDP (2-pyridyldithiopropionyl) 478 peak indentation load 810 peapods 71, 289 PECVD (plasma enhanced chemical vapor deposition) 833, 926, 1009 – carbon sample 800 PEG (polyethylene glycol) – crosslinkers 479 pegylated molecules 313 Peierls instability 428 per molecule adhesion force 620 perfluorodecanoic acid (PFDA) 992 perfluoropolyether (PFPE) 530, 861 perfluoropolyether Z-DOL 614 performance of electromechanical actuator 1075 performance parasitics 1098 periodic – force 725 – potential 637, 891 permanent dipole moment 407 perpendicular scan 344 persistence length 488 perturbation approach 390 perylene 404 PES (photoemission spectroscopy) 956 – generation 944 – loop compensator 973 PFPE (perfluoropolyether) 864, 1012 – lubricant 862, 868, 1003, 1016 – OH 892 pH of water environment 619, 621 pH sensor 137 phage display 297, 298 pharmacoeconomics 285 phase – angle image 530 – breaking length 120 – curve 458 – images 470 – lag spectrum 666 – measurement 471 – signal change 458 – transformation 690, 705 phase change – material 915 – medium 922 – RAM (PC-RAM) 899, 906 phenol 837 phenoxy-centered HOMOs 26 phonon – confinement effects 125, 127, 131 – excitation 468 – scattering 120 phosphorus-doped polysilicon 206 photoacid 19 photoactive – fragments 14 – solids 22 – stopper 14 photo-conductance 128 photo-crosslinker 478 photodetector sensitivity 766 photoemission spectroscopy (PES) 423 photogenerated hole 30 photoinduced electron transfer 16, 17 photoinduced proton transfer 19 photolithography 285 – near-field conformal 187 – proximity mode 186 photolithography patterns 186 photo-luminescence (PL) 127, 135 – optical imaging 128 photoresist 188, 190, 1095, 1121 photothermal effect 465 physical properties of nanowires 110 physical vapor deposition 104 physisorbed protein layer 476 physisorption 861 pick-up – SWNT tips 382 – tip method 381 pico-slider 960 piezo – ceramic material 360 – effect 359 – element 461 – excitation 454 – hysteresis 415 – relaxation 415 – stacks 361 – tube 359 piezoelectric – actuation 259 – actuator 908 – drive 327 – leg 636 – positioning elements 414 – scanner 372, 415, 676 piezoresistive – cantilever 355 – coefficients 356 – detection 355, 387 – pressure sensor 1089 – sensing 958 – sensor 227 piezoscanner 363, 382 piezotranslator 363 piezotube calibration 329 pigment particles 195 pile-up, nanoindent 693, 699, 700, 709, 711 – characteristic 935 piling-up behavior 674 pilot signal 945 pinning 441 – forces 727 pin-on-disk tribotester 841 PL (photoluminescence) NSOM imaging 135 plane-to-plane separation 12 plasma – etch 286 – frequency 127 – resonance 127 plasma enhanced chemical vapor deposition (PECVD) 197, 339, 770, 795, 799 plasminogen activator (PA) 302 plasmon mode 421 plastic – asperity model 884 – circuit 193 – contact regime 517 – deformation 522, 728, 812, 854 – electronics 197 – fluidic chips 273 – large area circuit 194 – packaging 1099 plasticity 1060 platelet nanofiber 60 platform 929 – fabrication process 930 platinum-iridium 330 – tip 29 PMMA (poly(methyl methacrylate)) 247, 257, 671, 924, 933, 936, 994 p-n – diodes 116 – junction diode 132 – junctions 132, 135 pneumatic – actuation 258 – damping 418 p-nitrophenolate 19 point probes 688 Poisseuille flow 885 Poisson statistics 620 Poisson’s ratio 698, 1047 polar – group 838 – lubricant 832, 861 polarization dependence 129 polishing 793, 1000 poly(amido) amine (PAMAM) dendrimer 286 poly(ethylene glycol) (PEG) 477 poly(ethyleneterephthalate) (PET) 192 poly(methyl methacrylate) (PMMA) 247, 257, 671, 924, 933, 936, 994 polyaromatic shells 63 polycarbonate (PC) 257 polycrystalline – films 210 – graphite 801 – Si 226 – SiGe 210 polydimethylsiloxane (PDMS) 187, 834 polyethylene (PE) 257 polyethylene co-propylene 886 polyethylene terephthalate (PET) 524 poly-Ge – mechanical properties 210 polymer 255, 610, 664, 910 – blend 471, 662 – brush 563, 575, 581 – chemistry 286, 291 – conjugation (pegylation) 296 – fluids 892 – intermediates 287 – matrix composites 82 – medium 932 – melt 886 – membranes 103 – microfabrication techniques 255 – microstructures 257 – mushroom 562 – nanojunction 32 – properties 263 – therapeutics 307 – transparent microcapsules 195 polymeric – liquids (melts) 561, 581, 583 – magnetic tape 526 polypeptides 10 polypropylene 404, 471 polysilicon 963, 967, 1010, 1040 – beam 1044 – fatigue 1036 – film 229, 995, 1027 – fracture strength 1036 – fracture toughness 1035 – friction 1036 – layer 263 – mechanical properties 1034 – MEMS 206 – microstructure 1035 – residual stress 1034 – resonators 245 – strip 245 – surface micromachining 210 – Young’s modulus 1035 polystyrene (PS) 257, 936 polysulfone 936 polytetrafluoroethylene (PTFE) 639 polyurethane 471 poor mixing 889 pop-ins 690 pop-outs 690 population explosion 1141 porous – silica or alumina 120 – vycor glass 102 position – accuracy 363 – error 972 – error signal (PES) 943, 968 – sensing resolution 957 positioning 109 positive logic convention 18, 26 post-packaging process 1118 potential barrier 887 potential energy – total 720 power dissipation 237, 470, 654 power to weight ratio 752 PQ design method 970 Prandtl–Tomlinson model 725–727 pre-crack length 1027 precursor 56, 69, 70 – gases 210 preferential flow direction 261 preparation improvements 54 pressure 871 – injection 104 pressure sensor 227 – fabrication process 1090 – packaging 1099 pressure-induced phase reconstruction 888 primary minimum adhesion 544, 555, 559 printed – coil 197 – DFB resonator 200 probability density functions 891 probe – FIB-milled 342 probe storage 901, 907, 908 – data organization 909 – operating parameters 909 probe tip 372 – characterization 611 – performance 374 probe-sample distance 457, 462 probe-surface distance 455 process – control 1088 – flow 1088 – gas 799 process coherence volume 887 processing conditions 44 prodrugs 298 product architecture 1088 production efficiency 47 programmable microfluidic systems (sPROMs) 266 programmed assembler 1146 projection mode photolithography 186 propagation of cracks 524 properties of a coating 795 protection of sliding surface 831 protein 477 – bioactivity 294 – coupled to nanomaterials 294 – folding 293 – primary structure 293 – secondary structure 293 – synthetic chemistry 294 – tertiary structure 293 protofilament 673 prototyping of biological nanodevices 282 protrusion force 545, 564 P-selectin glycoprotein ligand-1 (PSGL-1) 488 PSG (phosphorus-doped glass) 1117 Pt alloy tip 330 PTCDA 404 PTFE (polytetrafluoroethylene) – coated Si-tip 640 – film 833 Pt-Ir – tip 330 – wire cantilever 912 pull-hold-release cycle 485 pull-in 1072 – angle 1068 – charge 1064 – instability 956 – voltage 1062, 1064, 1067, 1068, 1071, 1075 pull-off force see adhesion force, 608, 614, 615, 617, 635, 864 pulse-etching 379 pumping chamber 261 purified MWNT 378 pyramidal – AFM tip 615 – etch 373 pyrazoline 16 pyrolysis of hydrocarbons 59 pyrolytic method 58 PZT (led zirconate titanate) – actuated suspensions 967 – scanner 500 – tube scanner 328, 334