M
macrocyclic polyether 13, 25 macromolecular – building block 747 – interaction 475 macromolecules as elastic rods 753 macroscale friction 842, 998 macroscopic – building blocks 10 – friction 732 magnetic – actuators 259 – applications 137 – dipole interaction 403 – disk 824 – disk drive 794 – information 138 – Ni 431 – ordering 129 – particles self-ordered arrays 914 – quantum flux 440 – recording 911, 922 – storage device 795, 831 – tape 466, 513, 524, 862 – thin-film head 825 – tip 465 magnetic field – critical strength 122 – length 122 – microscopy (MFM) 114 – triggering 299 magnetic force 386 – gradient 338 – microscope (MFM) 338 – microscopy (MFM) 326, 439 magnetic resonance – force microscopy (MRFM) 441 – imaging (MRI) 304 magnetically coated tip 490 magnetohydrodynamic (MHD) pumping 261 magnetomotive transduction 248 magneto-optics 128 magnetoresistance 120 – longitudinal 120, 121 – transverse 121 magnetoresistive RAM (MRAM) 899, 906 magnetostatic interaction 439 magnetron sputtered carbon 799 major histocompatibility complex (MHC) 311 manganites 431 manifold absolute pressure (MAP) 1091 manipulation of individual atoms 325 manually assembled MWNT tips 378 manufacturability 1087 manufacturing “risk” change 1093 MAP sensor 1094 marginal dimension 727 martensite 665 mask, high resolution stamp 186 mass – effective 433 mass of cantilever 331 master–slave design 970 material – for microfluidic devices 254 – hardness 765 – molecule-based 35 – property variation 1072 – structural 1028 Matthiessen rule 120 maximum likelihood estimator (MLE) 1126 MBE (molecular beam epitaxy) 152, 172 MBI (multiple beam interferometry) 547 mean time to failure (MTTF) 1127 mean-field theory 556 measurement of hardness 505 mechanical – coupling 588 – dissipation in nanoscopic device 631 – instability 452, 609 – micropumps 260 – protection 1112 – relaxation 457, 848 – resonance 591 – spectroscopy 664 – stability 927 – surface relaxations 468 – wear 263 mechanical properties 764, 1023 – characterization 1036 – of bone 675 – of carbon nanotubes 668, 672 – of DLC coating 813 mechanically cut tips 382 mechanics of cantilevers 347 mechatronic device 952 media flatness 910 mediator molecules 304 medium – effective 127 medium theory – effective 127 melting freezing transition 894 melting point of SAM 853 membrane – deflection method 1037 – fabrication of 314 – proteins 375 membrane-embedded machine 741 membranes as elastic media 754 memory – cells and switches 116 – distance 588 – long-term 734 MEMS 147–171, 225, 270, 376, 606, 617, 764, 795, 831, 862, 901, 983, 1023, 1084 – accelerometer manufacturing 1091 – accelerometers 230 – applications 985 – capacitive switch 244 – components 1011 – device 247, 987, 990 – device operation 994 – fabrication 1111 – fiber optic switching 238 – industry 1093 – integration 1102 – manufacturing 1086 – microactuator (MA) 952, 971 – mounting condition 1105 – packaging 1111, 1116, 1128 – packaging requirement 1112 – passivation 1103 – post-packaging 1114, 1117 – pressure sensor production 1090 – production economics 1086 – resonators 244 – sensor 229 – standardization 1086 – storage device 907 – structure 1112 – surface 1104 – switch, metal-to-metal 244 – technology 233, 237, 249, 1034 – testing 1099 – tribological problems 989 – tunable capacitors 241 – vacuum packaging 1117 – wafer bonding 1095 – wafer protection 1097 MEMS/NEMS 530 MEMS-based – microfluidic system 270 – storage concept 904 – storage device 922 meniscus – bridge 831, 876 – force 516, 871 – of liquid 564 mercaptopropyltrimethoxysilane (MPTMS) 191 merocyanine 18 mesoporous molecular sieves 102 mesoscale osmotic actuator 269 messenger RNA 750 metabolic facility 282 metal 103 – catalyst 379 – cavity packaging 1099 – cluster agents 306 – electroplating 255 – evaporated (ME) tape 793 – matrix composites 81 – nanowires 69 – oxide 397, 400 – particle catalyst 54 – porphyrin (Cu-TBPP) 404 – seed layer 966 metal/insulator/metal (MIM) 197 metal-catalyzed – chemical vapor deposition (CVD) 379 – polymerization method 287 metal-deposited Si surface 395 metallic nanotube 34 metallic SWNT 66 metal-organic compound 56 metal-particle (MP) tape 825 metal-to-metal MEMS switch 244 metastable lubricant systems 894 methylene stretching mode 842 methyl-terminated SAM 843 Meyer’s law 708 MFM sensitivity 338 MgO tip 398 MgO(001) surface 403 Mg-terminated tip 398 MHD (magnetohydrodynamic) pumping 261 mica 102, 337, 615, 619, 640, 888 – films 100 – muscovite 615, 650 – surface 641 micelles 291, 292 micro/nanofabrication 147–150, 154 microactuator 990 – design 960 – fabrication requirements 962 – loop 972 – shape 965 microbially-derived antibiotics 293 microcantilever 994 microchannel 260 microcomponent 989 microcontact printing (?CP) 187, 834 microcrystalline graphite 803 microdevice 1026 microdispenser 266 microelectromechanical – motor 226 – resonators 244 – switch 244 microelectronics 397, 749 micro-electro-rheological valve 260 micro-engine 908 microfabricated – cantilever 372, 453 – silicon cantilevers 387 microfabrication 187, 226, 249 – methods 285 – techniques 285, 372 microfluidic 253 – applications 255 – channel 254, 269 – channels on silicon substrates 254 – control 260 – line 258 – mixers 265 – motherboards 270 – multiplexer 268 – network 268 – passive 262 – pumping 260 – structures 256 microfluidic device 269 – disadvantages 270 – materials for 254 – passive 257, 269 microfluidic dispenser – passive 273 microfriction 511 micro-hinge technology 236 microindentation 689 micro-injection molding 273 micromachined – high-Q resonators 245 – inductors 242 – notch 1032 – silicon 310 micromachining 147, 150, 151, 154, 155, 159–163, 166–168, 170 micromanipulator 988 micromechanical – cantilevers 303 – device 1084 – structures 204 micromirror 992, 1040 – array 237 micromixer category 265 micromotor 1016 micron-sized channels 265 micropatterned SAM 848 micropipette aspiration 549 micropump 260 – passive 269 micro-Raman spectroscopy 693 microrelay 1062 micro-resonators 244 microscale – diffusion 265 – friction 1006, 1010 – material removal 521 – scratching 503 – silicon gate 34 – wear 503, 520 – wear test 1008 microscanner 929 microscope eigenfrequency 348 microscopic friction 723 microscopic origin of friction 889 microscratch 813 – test 675 microscratching measurement 519 microsensors 229 microstrain gauge 1025, 1034 microstructure 1040 microsystem 249 micro-total analysis systems (?TAS) 257 microtransformer 197 microtriboapparatus 1011 microtubule 740 – bending 673 – buckling 673 microvalve 258 – design 260 microwear 813, 819 midplane 1046 – curvature 1048 – strain 1048, 1049 milligear system 989 millipede 901, 994 – chip 931 – system concept 921, 923, 943 MIM capacitors 197 MIMO design 971 miniaturized – actuator 986 – connector 986 – gear 986 – motor 986 minimal detectable depression 374 minimally invasive screening 285 minimum-indentation pitch 937 mirror/yoke assembly 1089 misfit – angle 638 – strain 1042 mismatch – elastic 1051, 1056 mismatch of crystalline surfaces 566, 567, 593 mitochondria 747 mixed C-N nanotube 56 mixed lubrication see intermediate or mixed lubrication, 884 mixing performance 265 MMA air bag sensor 1092 Mn on Nb(110) 429 Mn on W(110) 432 m-nitrobenzylidene propanedinitrile (m-NBP) 916 MOCVD (metallorganic chemical vapor deposition) 152, 172 mode coupling gratings 199 model potentials 719 modeling – at the nanoscale 752 – mechanics of systems 752 – tribological process 753 modular multifunctionality 280 modulation codes 946 modulus – elastic 664, 698, 767, 770, 774, 805, 806, 809 modulus of elasticity 325, 516 molarity 749 molding 186 molecular – AND gate 17 – assembly 26 – beam epitaxy (MBE) 988 – building blocks 12, 35, 747 – chain 839 – conduction band 33 – conformation 864 – cooperation 886 – dynamics (MD) 476, 718, 749 – dynamics (MD) calculation 639 – dynamics simulation (MDS) 488, 622, 631, 651, 753 – engineering 281 – interaction 879 – interconverting state 15 – logic gates 15 – lubrication 885 – machines 13 – mobility 894 – motor 13, 673, 740 – NOT gate 16 – placement by force microscopy 285 – precursor 58 – pump 741, 748 – recognition force microscopy (MRFM) 476 – recognition force spectroscopy principles 482 – resolution 421 – reversible transformation 15 – scale layer 833 – shape 558, 559, 586, 591, 592 – shuttle 14 – spring 536 – spring model 843, 848 – stiffness 849 – switch 14, 35 – theory of lubricated friction 890 – wires 289 molecule-based – device 24, 28 – materials 35 – switches 15 moment of inertia 1030 monodispersity 286 monolayer 885 – switches 28 – thickness 855 monolithic accelerometers 231 monolithic high-Q MEMS 245 Monte Carlo simulation 848 MoO3 film 614 Moore’s law 1142 Morse potential 464 MoS2 friction 640, 641, 668 motion – unperturbed 390 motor – actin-myosin 751 – flagellar 750 – micro 1016 – microelectromechanical 226 – miniaturized 986 – molecular 13, 752 – myosin 741, 745 – oil 884 – voice coil 952, 969 movement-constrained macromolecules 305 moving media model 908 moving-tips model 908 MRAM (magnetoresistive RAM) 899–907 – cell 906 MRFM – magnetic resonance force microscopy 441 MRI contrast agents 305 MTTF (mean time to failure) 1126 multicomponent nanodevice 288 multi-input-multi-output (MIMO) 956 multilayer 709 – devices 197 – Fe-N/Ti-N 675 – structures 104 – thin-film 825 multimode AFM 338 multiple beam interferometry (MBI) 547 multiple cantilever 907 multiple therapeutic nanodevice 294 multiple-asperity contact 517 multiplexed sensor arrays 304 multiplication of dislocations 703 multivalent targeting strategy 298 multiwall carbon nanotubes (MWCNT) 43–49, 289, 342, 376, 667, 727 muscle contraction 740 muscovite mica 615, 650 ?-synthesis 974 ?-synthesis controller design 975 MWCNT – multiwall carbon nanotubes 43–49, 289, 342, 376, 667, 727 MWNT (multiwall nanotube) 64 – based catalyst-support 76 – bc (bamboo-concentric) 44 – bh (bamboo-herringbone) 44 – bunches 58 – catalytically grown 673 – composites MWNT-Al composite 81 – flexural modulus 67 – purified 378 – surface area 64 – tips manually assembled 378 – Young’s modulus 669 myosin motor 751