HANDBOOK OF NANOTECHNOLOGY

Bharat Bhushan (ed.)

Springer-Verlag Berlin Heidelberg 2004.

TABLE OF CONTENTS

1
• Foreword by Neal Lane 6
• Foreword by James R. Heath 8
• Preface 10
• Editors Vita 12
• List of Authors 14
• Contents 22
• List of Tables 30
• List of Abbreviations 34
• 1 Introduction to Nanotechnology 1
2
• 1.1 Background and Definition of Nanotechnology 1
• 1.2 Why Nano? 2
• 1.3 Lessons from Nature 2
• 1.4 Applications in Different Fields 3
• 1.5 Reliability Issues of MEMS/NEMS 4
• 1.6 Organization of the Handbook 5
• References 5
1
• Part A Nanostructures, Micro/Nanofabrication, and Micro/Nanodevices
2
• 2 Nanomaterials Synthesis and Applications: Molecule-Based Devices 9
3
• 2.1 Chemical Approaches to Nanostructured Materials 10
4
• 2.1.1 From Molecular Building Blocks to Nanostructures 10
• 2.1.2 Nanoscaled Biomolecules: Nucleic Acids and Proteins 10
• 2.1.3 Chemical Synthesis of Artificial Nanostructures 12
• 2.1.4 From Structural Control to Designed Properties and Functions 12
3
• 2.2 Molecular Switches and Logic Gates 14
4
• 2.2.1 From Macroscopic to Molecular Switches 15
• 2.2.2 Digital Processing and Molecular Logic Gates 15
• 2.2.3 Molecular AND, NOT, and OR Gates 16
• 2.2.4 Combinational Logic at the Molecular Level 17
• 2.2.5 Intermolecular Communication 18
3
• 2.3 Solid State Devices 22
4
• 2.3.1 From Functional Solutions to Electroactive and Photoactive Solids 22
• 2.3.2 Langmuir–Blodgett Films 23
• 2.3.3 Self-Assembled Monolayers 27
• 2.3.4 Nanogaps and Nanowires 31
3
• 2.4 Conclusions and Outlook 35
• References 36
2
• 3 Introduction to Carbon Nanotubes 39
3
• 3.1 Structure of Carbon Nanotubes 40
4
• 3.1.1 Single-Wall Nanotubes 40
• 3.1.2 Multiwall Nanotubes 43
3
• 3.2 Synthesis of Carbon Nanotubes 45
4
• 3.2.1 Solid Carbon Source-Based Production Techniques for Carbon Nanotubes 45
• 3.2.2 Gaseous Carbon Source-Based Production Techniques for Carbon Nanotubes 52
• 3.2.3 Miscellaneous Techniques 57
• 3.2.4 Synthesis of Aligned Carbon Nanotubes 58
3
• 3.3 Growth Mechanisms of Carbon Nanotubes 59
4
• 3.3.1 Catalyst-Free Growth 59
• 3.3.2 Catalytically Activated Growth 60
3
• 3.4 Properties of Carbon Nanotubes 63
4
• 3.4.1 Variability of Carbon Nanotube Properties 63
• 3.4.2 General Properties 63
• 3.4.3 SWNT Adsorption Properties 63
• 3.4.4 Transport Properties 65
• 3.4.5 Mechanical Properties 67
• 3.4.6 Reactivity 67
3
• 3.5 Carbon Nanotube-Based Nano-Objects 68
4
• 3.5.1 Hetero-Nanotubes 68
• 3.5.2 Hybrid Carbon Nanotubes 68
• 3.5.3 Functionalized Nanotubes 71
3
• 3.6 Applications of Carbon Nanotubes 73
4
• 3.6.1 Current Applications 73
• 3.6.2 Expected Applications Related to Adsorption 76
• References 86
3
2
• 4 Nanowires 99
3
• 4.1 Synthesis 100
4
• 4.1.1 Template-Assisted Synthesis 100
• 4.1.2 VLS Method for Nanowire Synthesis 105
• 4.1.3 Other Synthesis Methods 107
• 4.1.4 Hierarchical Arrangement and Superstructures of Nanowires 108
3
• 4.2 Characterization and Physical Properties of Nanowires 110
4
• 4.2.1 Structural Characterization 110
• 4.2.2 Transport Properties 115
• 4.2.3 Optical Properties 126
3
• 4.3 Applications 131
4
• 4.3.1 Electrical Applications 131
• 4.3.2 Thermoelectric Applications 133
• 4.3.3 Optical Applications 134
• 4.3.4 Chemical and Biochemical Sensing Devices 137
• 4.3.5 Magnetic Applications 137
3
• 4.4 Concluding Remarks 138
• References 138
2
• 5 Introduction to Micro/Nanofabrication 147
3
• 5.1 Basic Microfabrication Techniques 148
4
• 5.1.1 Lithography 148
• 5.1.2 Thin Film Deposition and Doping 149
• 5.1.3 Etching and Substrate Removal 153
• 5.1.4 Substrate Bonding 157
3
• 5.2 MEMS Fabrication Techniques 159
4
• 5.2.1 Bulk Micromachining 159
• 5.2.2 Surface Micromachining 163
• 5.2.3 High-Aspect-Ratio Micromachining 166
3
• 5.3 Nanofabrication Techniques 170
4
• 5.3.1 E-Beam and Nano-Imprint Fabrication 171
• 5.3.2 Epitaxy and Strain Engineering 172
• 5.3.3 Scanned Probe Techniques 173
• 5.3.4 Self-Assembly and Template Manufacturing 176
• References 180
3
2
• 6 Stamping Techniques for Micro and Nanofabrication: Methods and Applications 185
3
• 6.1 High Resolution Stamps 186
• 6.2 Microcontact Printing 187
• 6.3 Nanotransfer Printing 190
• 6.4 Applications 193
4
• 6.4.1 Unconventional Electronic Systems 193
• 6.4.2 Lasers and Waveguide Structures 198
3
• 6.5 Conclusions 200
• References 200
2
• 7 Materials Aspects of Micro- and Nanoelectromechanical Systems 203
3
• 7.1 Silicon 203
4
• 7.1.1 Single Crystal Silicon 204
• 7.1.2 Polysilicon 205
• 7.1.3 Porous Silicon 208
• 7.1.4 Silicon Dioxide 208
• 7.1.5 Silicon Nitride 209
3
• 7.2 Germanium-Based Materials 210
4
• 7.2.1 Polycrystalline Ge 210
• 7.2.2 Polycrystalline SiGe 210
3
• 7.3 Metals 211
• 7.4 Harsh Environment Semiconductors 212
4
• 7.4.1 Silicon Carbide 212
• 7.4.2 Diamond 215
3
• 7.5 GaAs, InP, and Related III-V Materials 217
• 7.6 Ferroelectric Materials 218
• 7.7 Polymer Materials 219
4
• 7.7.1 Polyimide 219
• 7.7.2 SU-8 220
• 7.7.3 Parylene 220
3
• 7.8 Future Trends 220
• References 221
2
• 8 MEMS/NEMS Devices and Applications 225
3
• 8.1 MEMS Devices and Applications 227
4
• 8.1.1 Pressure Sensor 227
• 8.1.2 Inertial Sensor 229
• 8.1.3 Optical MEMS 233
• 8.1.4 RF MEMS 239
3
• 8.2 NEMS Devices and Applications 246
• 8.3 Current Challenges and Future Trends 249
• References 250
2
• 9 Microfluidics and Their Applications to Lab-on-a-Chip 253
3
• 9.1 Materials for Microfluidic Devices and Micro/Nano Fabrication Techniques 254
4
• 9.1.1 Silicon 254
• 9.1.2 Glass 254
• 9.1.3 Polymer 255
3
• 9.2 Active Microfluidic Devices 257
4
• 9.2.1 Microvalves 258
• 9.2.2 Micropumps 260
3
• 9.3 Smart Passive Microfluidic Devices 262
4
• 9.3.1 Passive Microvalves 262
• 9.3.2 Passive Micromixers 265
• 9.3.3 Passive Microdispensers 266
• 9.3.4 Microfluidic Multiplexer Integrated with Passive Microdispenser 267
• 9.3.5 Passive Micropumps 269
• 9.3.6 Advantages and Disadvantages
• of the Passive Microfluidic Approach 269
3
• 9.4 Lab-on-a-Chip for Biochemical Analysis 270
4
• 9.4.1 Magnetic Micro/Nano Bead-Based Biochemical Detection System 270
• 9.4.2 Disposable Smart Lab-on-a-Chip for Blood Analysis 273
• References 276
3
2
• 10 Therapeutic Nanodevices 279
3
• 10.1 Definitions and Scope of Discussion 280
4
• 10.1.1 Design Issues 281
• 10.1.2 Utility and Scope of Therapeutic Nanodevices 285
3
• 10.2 Synthetic Approaches: “top-down” versus “bottom-up” Approaches for Nanotherapeutic Device Components 285
4
• 10.2.1 Production of Nanoporous Membranes by Microfabrication Methods: A top-down Approach 285
• 10.2.2 Synthesis of Poly(amido) Amine (PAMAM) Dendrimers: A bottom-up Approach 286
• 10.2.3 The Limits of top-down and bottom-up Distinctions with Respect to Nanomaterials and Nanodevices 287
3
• 10.3 Technological and Biological Opportunities 288
4
• 10.3.1 Assembly Approaches 288
• 10.3.2 Targeting: Delimiting Nanotherapeutic Action
• in Three-Dimensional Space 296
• 10.3.3 Triggering: Delimiting Nanotherapeutic Action in Space and Time 298
• 10.3.4 Sensing Modalities 302
• 10.3.5 Imaging Using Nanotherapeutic Contrast Agents 304
3
• 10.4 Applications for Nanotherapeutic Devices 307
4
• 10.4.1 Nanotherapeutic Devices in Oncology 307
• 10.4.2 Cardiovascular Applications of Nanotherapeutics 310
• 10.4.3 Nanotherapeutics and Specific Host Immune Responses 311
3
• 10.5 Concluding Remarks: Barriers to Practice and Prospects 315
4
• 10.5.1 Complexity in Biology 315
• 10.5.2 Dissemination of Biological Information 315
• 10.5.3 Cultural Differences Between Technologists and Biologists 316
• References 317
3
2
1
• Part B Scanning Probe Microscopy
2
• 11 Scanning Probe Microscopy – Principle of Operation, Instrumentation, and Probes 325
3
• 11.1 Scanning Tunneling Microscope 327
4
• 11.1.1 Binnig et al.’s Design 327
• 11.1.2 Commercial STMs 328
• 11.1.3 STM Probe Construction 330
3
• 11.2 Atomic Force Microscope 331
4
• 11.2.1 Binnig et al.’s Design 333
• 11.2.2 Commercial AFM 333
• 11.2.3 AFM Probe Construction 338
• 11.2.4 Friction Measurement Methods 342
• 11.2.5 Normal Force and Friction Force Calibrations of Cantilever Beams 346
3
• 11.3 AFM Instrumentation and Analyses 347
4
• 11.3.1 The Mechanics of Cantilevers 347
• 11.3.2 Instrumentation and Analyses of Detection Systems for Cantilever Deflections 350
• 11.3.3 Combinations for 3-D-Force Measurements 358
• 11.3.4 Scanning and Control Systems 359
• References 364
3
2
• 12 Probes in Scanning Microscopies 371
3
• 12.1 Atomic Force Microscopy 372
4
• 12.1.1 Principles of Operation 372
• 12.1.2 Standard Probe Tips 373
• 12.1.3 Probe Tip Performance 374
• 12.1.4 Oxide-Sharpened Tips 375
• 12.1.5 FIB tips 376
• 12.1.6 EBD tips 376
• 12.1.7 Carbon Nanotube Tips 376
3
• 12.2 Scanning Tunneling Microscopy 382
4
• 12.2.1 Mechanically Cut STM Tips 382
• 12.2.2 Electrochemically Etched STM Tips 383
• References 383
3
2
• 13 Noncontact Atomic Force Microscopy and Its Related Topics 385
3
• 13.1 Principles of Noncontact Atomic Force Microscope (NC-AFM) 386
4
• 13.1.1 Imaging Signal in AFM 386
• 13.1.2 Experimental Measurement and Noise 387
• 13.1.3 Static AFM Operating Mode 387
• 13.1.4 Dynamic AFM Operating Mode 388
• 13.1.5 The Four Additional Challenges Faced by AFM 388
• 13.1.6 Frequency-Modulation AFM (FM-AFM) 389
• 13.1.7 Relation Between Frequency Shift and Forces 390
• 13.1.8 Noise in Frequency-Modulation AFM – Generic Calculation 391
• 13.1.9 Conclusion 391
3
• 13.2 Applications to Semiconductors 391
4
• 13.2.1 Si(111)7?7 Surface 392
• 13.2.2 Si(100)2?1 and Si(100)2?1:H Monohydride Surfaces 393
• 13.2.3 Metal-Deposited Si Surface 395
3
• 13.3 Applications to Insulators 397
4
• 13.3.1 Alkali Halides, Fluorides, and Metal Oxides 397
• 13.3.2 Atomically Resolved Imaging of a NiO(001) Surface 402
• 13.3.3 Atomically Resolved Imaging Using Noncoated and Fe-Coated Si Tips 402
3
• 13.4 Applications to Molecules 404
4
• 13.4.1 Why Molecules and What Molecules? 404
• 13.4.2 Mechanism of Molecular Imaging 404
• 13.4.3 Perspectives 407
• References 407
3
2
• 14 Low Temperature Scanning Probe Microscopy 413
3
• 14.1 Microscope Operation at Low Temperatures 414
4
• 14.1.1 Drift 414
• 14.1.2 Noise 415
• 14.1.3 Stability 415
• 14.1.4 Piezo Relaxation and Hysteresis 415
3
• 14.2 Instrumentation 415
4
• 14.2.1 A Simple Design for a Variable Temperature STM 416
• 14.2.2 A Low Temperature SFM Based on a Bath Cryostat 417
3
• 14.3 Scanning Tunneling Microscopy and Spectroscopy 419
4
• 14.3.1 Atomic Manipulation 419
• 14.3.2 Imaging Atomic Motion 420
• 14.3.3 Detecting Light from Single Atoms and Molecules 421
• 14.3.4 High Resolution Spectroscopy 422
• 14.3.5 Imaging Electronic Wave Functions 427
• 14.3.6 Imaging Spin Polarization: Nanomagnetism 431
3
• 14.4 Scanning Force Microscopy and Spectroscopy 433
4
• 14.4.1 Atomic-Scale Imaging 434
• 14.4.2 Force Spectroscopy 436
• 14.4.3 Electrostatic Force Microscopy 438
• 14.4.4 Magnetic Force Microscopy 439
• References 442
3
2
• 15 Dynamic Force Microscopy 449
3
• 15.1 Motivation: Measurement of a Single Atomic Bond 450
• 15.2 Harmonic Oscillator: A Model System for Dynamic AFM 454
• 15.3 Dynamic AFM Operational Modes 455
4
• 15.3.1 Amplitude-Modulation/ Tapping-Mode AFMs 456
• 15.3.2 Self-Excitation Modes 461
3
• 15.4 Q-Control 464
• 15.5 Dissipation Processes Measured with Dynamic AFM 468
• 15.6 Conclusion 471
• References 471
2
• 16 Molecular Recognition Force Microscopy 475
3
• 16.1 Ligand Tip Chemistry 476
• 16.2 Fixation of Receptors to Probe Surfaces 478
• 16.3 Single-Molecule Recognition Force Detection 479
• 16.4 Principles of Molecular Recognition Force Spectroscopy 482
• 16.5 Recognition Force Spectroscopy: From Isolated Molecules to Biological Membranes 484
4
• 16.5.1 Forces, Energies, and Kinetic Rates 484
• 16.5.2 Complex Bonds and Energy Landscapes 486
• 16.5.3 Live Cells and Membranes 489
3
• 16.6 Recognition Imaging 489
• 16.7 Concluding Remarks 491
• References 492
2
1
• Part C Nanotribology and Nanomechanics
2
• 17 Micro/Nanotribology and Materials Characterization Studies Using Scanning Probe Microscopy 497
3
• 17.1 Description of AFM/FFM and Various Measurement Techniques 499
4
• 17.1.1 Surface Roughness and Friction Force Measurements 500
• 17.1.2 Adhesion Measurements 502
• 17.1.3 Scratching, Wear and Fabrication/Machining 503
• 17.1.4 Surface Potential Measurements 503
• 17.1.5 In Situ Characterization of Local Deformation Studies 504
• 17.1.6 Nanoindentation Measurements 504
• 17.1.7 Localized Surface Elasticity and Viscoelasticity Mapping 505
• 17.1.8 Boundary Lubrication Measurements 507
3
• 17.2 Friction and Adhesion 507
4
• 17.2.1 Atomic-Scale Friction 507
• 17.2.2 Microscale Friction 507
• 17.2.3 Directionality Effect on Microfriction 511
• 17.2.4 Velocity Dependence on Microfriction 513
• 17.2.5 Effect of Tip Radii and Humidity on Adhesion and Friction 515
• 17.2.6 Scale Dependence on Friction 518
3
• 17.3 Scratching, Wear, Local Deformation, and Fabrication/Machining 518
4
• 17.3.1 Nanoscale Wear 518
• 17.3.2 Microscale Scratching 519
• 17.3.3 Microscale Wear 520
• 17.3.4 In Situ Characterization of Local Deformation 524
• 17.3.5 Nanofabrication/Nanomachining 526
3
• 17.4 Indentation 526
4
• 17.4.1 Picoindentation 526
• 17.4.2 Nanoscale Indentation 527
• 17.4.3 Localized Surface Elasticity and Viscoelasticity Mapping 528
3
• 17.5 Boundary Lubrication 530
4
• 17.5.1 Perfluoropolyether Lubricants 530
• 17.5.2 Self-Assembled Monolayers 536
• 17.5.3 Liquid Film Thickness Measurements 537
3
• 17.6 Closure 538
• References 539
2
• 18 Surface Forces and Nanorheology of Molecularly Thin Films 543
3
• 18.1 Introduction: Types of Surface Forces 544
• 18.2 Methods Used to Study Surface Forces 546
4
• 18.2.1 Force Laws 546
• 18.2.2 Adhesion Forces 547
• 18.2.3 The SFA and AFM 547
• 18.2.4 Some Other Force-Measuring Techniques 549
3
• 18.3 Normal Forces Between Dry (Unlubricated) Surfaces 550
4
• 18.3.1 Van der Waals Forces in Vacuum and Inert Vapors 550
• 18.3.2 Charge Exchange Interactions 552
• 18.3.3 Sintering and Cold Welding 553
3
• 18.4 Normal Forces Between Surfaces in Liquids 554
4
• 18.4.1 Van der Waals Forces in Liquids 554
• 18.4.2 Electrostatic and Ion Correlation Forces 554
• 18.4.3 Solvation and Structural Forces 557
• 18.4.4 Hydration and Hydrophobic Forces 559
• 18.4.5 Polymer-Mediated Forces 561
• 18.4.6 Thermal Fluctuation Forces 563
3
• 18.5 Adhesion and Capillary Forces 564
4
• 18.5.1 Capillary Forces 564
• 18.5.2 Adhesion Mechanics 566
• 18.5.3 Effects of Surface Structure, Roughness,and Lattice Mismatch 566
• 18.5.4 Nonequilibrium and Rate-Dependent Interactions:Adhesion Hysteresis 567
3
• 18.6 Introduction: Different Modes of Friction and the Limits of Continuum Models 569
• 18.7 Relationship Between Adhesion and Friction Between Dry (Unlubricated and Solid Boundary Lubricated) Surfaces 571
4
• 18.7.1 Amontons’ Law and Deviations from It Due to Adhesion:
• The Cobblestone Model 571
• 18.7.2 Adhesion Force and Load Contribution to Interfacial Friction 572
• 18.7.3 Examples of Experimentally Observed Friction of Dry Surfaces 576
• 18.7.4 Transition from Interfacial to Normal Friction with Wear 579
3
• 18.8 Liquid Lubricated Surfaces 580
4
• 18.8.1 Viscous Forces and Friction of Thick Films: Continuum Regime 580
• 18.8.2 Friction of Intermediate Thickness Films 582
• 18.8.3 Boundary Lubrication of Molecularly Thin Films: Nanorheology 584
3
• 18.9 Role of Molecular Shape and Surface Structure in Friction 591
• References 594
2
• 19 Scanning Probe Studies of Nanoscale Adhesion Between Solids in the Presence of Liquids and Monolayer Films 605
3
• 19.1 The Importance of Adhesion at the Nanoscale 605
• 19.2 Techniques for Measuring Adhesion 606
• 19.3 Calibration of Forces, Displacements, and Tips 610
4
• 19.3.1 Force Calibration 610
• 19.3.2 Probe Tip Characterization 611
• 19.3.3 Displacement Calibration 612
3
• 19.4 The Effect of Liquid Capillaries on Adhesion 612
4
• 19.4.1 Theoretical Background 612
• 19.4.2 Experimental and Theoretical Studies of Capillary Formation with Scanning Probes 614
• 19.4.3 Future Directions 618
3
• 19.5 Self-Assembled Monolayers 618
4
• 19.5.1 Adhesion at SAM Interfaces 618
• 19.5.2 Chemical Force Microscopy: General Methodology 619
• 19.5.3 Adhesion at SAM-Modified Surfaces in Liquids 620
• 19.5.4 Impact of Intra- and Inter-Chain Interactions on Adhesion 621
• 19.5.5 Adhesion at the Single-Bond Level 622
• 19.5.6 Future Directions 623
3
• 19.6 Concluding Remarks 624
• References 624
2
• 20 Friction and Wear on the Atomic Scale 631
3
• 20.1 Friction Force Microscopy in Ultra-High Vacuum 632
4
• 20.1.1 Friction Force Microscopy 632
• 20.1.2 Force Calibration 632
• 20.1.3 The Ultra-high Vacuum Environment 635
• 20.1.4 A Typical Microscope in UHV 635
3
• 20.2 The Tomlinson Model 636
4
• 20.2.1 One-dimensional Tomlinson Model 636
• 20.2.2 Two-dimensional Tomlinson Model 637
• 20.2.3 Friction Between Atomically Flat Surfaces 637
3
• 20.3 Friction Experiments on Atomic Scale 638
4
• 20.3.1 Anisotropy of Friction 642
3
• 20.4 Thermal Effects on Atomic Friction 642
4
• 20.4.1 The Tomlinson Model at Finite Temperature 642
• 20.4.2 Velocity Dependence of Friction 644
• 20.4.3 Temperature Dependence of Friction 645
3
• 20.5 Geometry Effects in Nanocontacts 646
4
• 20.5.1 Continuum Mechanics of Single Asperities 646
• 20.5.2 Load Dependence of Friction 647
• 20.5.3 Estimation of the Contact Area 647
3
• 20.6 Wear on the Atomic Scale 649
4
• 20.6.1 Abrasive Wear on the Atomic Scale 649
• 20.6.2 Wear Contribution to Friction 650
3
• 20.7 Molecular Dynamics Simulations of Atomic Friction and Wear 651
4
• 20.7.1 Molecular Dynamics Simulation of Friction Processes 651
• 20.7.2 Molecular Dynamics Simulations of Abrasive Wear 652
3
• 20.8 Energy Dissipation in Noncontact Atomic Force Microscopy 654
• 20.9 Conclusion 656
• References 657
2
• 21 Nanoscale Mechanical Properties – Measuring Techniques and Applications 661
3
• 21.1 Local Mechanical Spectroscopy by Contact AFM 662
4
• 21.1.1 The Variable-Temperature SLAM (T-SLAM) 663
• 21.1.2 Example One: Local Mechanical Spectroscopy of Polymers 664
• 21.1.3 Example Two: Local Mechanical Spectroscopy of NiTi 665
3
• 21.2 Static Methods – Mesoscopic Samples 667
4
• 21.2.1 Carbon Nanotubes – Introduction to Basic Morphologies and Production Methods 667
• 21.2.2 Measurements of the Mechanical Properties
• of Carbon Nanotubes by SPM 668
• 21.2.3 Microtubules and Their Elastic Properties 673
3
• 21.3 Scanning Nanoindentation: An Application to Bone Tissue 674
4
• 21.3.1 Scanning Nanoindentation 674
• 21.3.2 Application of Scanning Nanoindentation 674
• 21.3.3 Example: Study of Mechanical Properties of Bone Lamellae Using SN 675
• 21.3.4 Conclusion 681
3
• 21.4 Conclusions and Perspectives 682
• References 682
2
• 22 Nanomechanical Properties of Solid Surfaces and Thin Films 687
3
• 22.1 Instrumentation 688
4
• 22.1.1 AFM and Scanning Probe Microscopy 688
• 22.1.2 Nanoindentation 689
• 22.1.3 Adaptations of Nanoindentation 690
• 22.1.4 Complimentary Techniques 691
• 22.1.5 Bulge Tests 691
• 22.1.6 Acoustic Methods 692
• 22.1.7 Imaging Methods 693
3
• 22.2 Data Analysis 694
4
• 22.2.1 Elastic Contacts 694
• 22.2.2 Indentation of Ideal Plastic Materials 694
• 22.2.3 Adhesive Contacts 695
• 22.2.4 Indenter Geometry 696
• 22.2.5 Analyzing Load/Displacement Curves 696
• 22.2.6 Modifications to the Analysis 699
• 22.2.7 Alternative Methods of Analysis 700
• 22.2.8 Measuring Contact Stiffness 701
• 22.2.9 Measuring Viscoelasticity 702
3
• 22.3 Modes of Deformation 702
4
• 22.3.1 Defect Nucleation 702
• 22.3.2 Variations with Depth 704
• 22.3.3 Anisotropic Materials 704
• 22.3.4 Fracture and Delamination 704
• 22.3.5 Phase Transformations 705
3
• 22.4 Thin Films and Multilayers 707
4
• 22.4.1 Thin Films 707
• 22.4.2 Multilayers 709
3
• 22.5 Developing Areas 711
• References 712
2
• 23 Atomistic Computer Simulations of Nanotribology 717
3
• 23.1 Molecular Dynamics 718
4
• 23.1.1 Model Potentials 719
• 23.1.2 Maintaining Constant Temperature 720
• 23.1.3 Imposing Load and Shear 721
• 23.1.4 The Time-Scale and Length-Scale Gaps 721
• 23.1.5 A Summary of Possible Traps 722
3
• 23.2 Friction Mechanisms at the Atomic Scale 723
4
• 23.2.1 Geometric Interlocking 723
• 23.2.2 Elastic Instabilities 724
• 23.2.3 Role of Dimensionality and Disorder 727
• 23.2.4 Elastic Instabilities vs. Wear in Atomistic Models 727
• 23.2.5 Hydrodynamic Lubrication and Its Confinement-Induced Breakdown 729
• 23.2.6 Submonolayer Films 731
3
• 23.3 Stick-Slip Dynamics 732
• 23.4 Conclusions 734
• References 735
2
• 24 Mechanics of Biological Nanotechnology 739
3
• 24.1 Science at the Biology–Nanotechnology Interface 740
4
• 24.1.1 Biological Nanotechnology 740
• 24.1.2 Self-Assembly as Biological Nanotechnology 740
• 24.1.3 Molecular Motors as Biological Nanotechnology 740
• 24.1.4 Molecular Channels and Pumps as Biological Nanotechnology 741
• 24.1.5 Biologically Inspired Nanotechnology 742
• 24.1.6 Nanotechnology and Single Molecule Assays in Biology 743
• 24.1.7 The Challenge of Modeling the Bio-Nano Interface 744
3
• 24.2 Scales at the Bio-Nano Interface 746
4
• 24.2.1 Spatial Scales and Structures 747
• 24.2.2 Temporal Scales and Processes 749
• 24.2.3 Force and Energy Scales: The Interplay of Deterministic and Thermal Forces 750
3
• 24.3 Modeling at the Nano-Bio Interface 752
4
• 24.3.1 Tension Between Universality and Specificity 752
• 24.3.2 Atomic-Level Analysis of Biological Systems 753
• 24.3.3 Continuum Analysis of Biological Systems 753
3
• 24.4 Nature’s Nanotechnology Revealed: Viruses as a Case Study 755
• 24.5 Concluding Remarks 760
• References 761
2
• 25 Mechanical Properties of Nanostructures 763
3
• 25.1 Experimental Techniques for Measurement of Mechanical Properties of Nanostructures 765
4
• 25.1.1 Indentation and Scratch Tests Using Micro/Nanoindenters 765
• 25.1.2 Bending Tests of Nanostructures Using an AFM 765
• 25.1.3 Bending Tests Using a Nanoindenter 769
3
• 25.2 Experimental Results and Discussion 770
4
• 25.2.1 Indentation and Scratch Tests of Various Materials Using Micro/Nanoindenters 770
• 25.2.2 Bending Tests of Nanobeams Using an AFM 773
• 25.2.3 Bending Tests of Microbeams Using a Nanoindenter 777
3
• 25.3 Finite Element Analysis of Nanostructures with Roughness and Scratches 778
4
• 25.3.1 Stress Distribution in a Smooth Nanobeam 779
• 25.3.2 Effect of Roughness in the Longitudinal Direction 781
• 25.3.3 Effect of Roughness in the Transverse Direction and Scratches 781
• 25.3.4 Effect on Stresses and Displacements for Materials That Are Elastic, Elastic-Plastic, or Elastic-Perfectly Plastic 784
3
• 25.4 Closure 785
• References 786
2
1
• Part D Molecularly Thick Films for Lubrication
2
• 26 Nanotribology of Ultrathin and Hard Amorphous Carbon Films 791
3
• 26.1 Description of Commonly Used Deposition Techniques 795
4
• 26.1.1 Filtered Cathodic Arc Deposition Technique 798
• 26.1.2 Ion Beam Deposition Technique 798
• 26.1.3 Electron Cyclotron Resonance Chemical Vapor Deposition Technique 799
• 26.1.4 Sputtering Deposition Technique 799
• 26.1.5 Plasma-Enhanced Chemical Vapor Deposition Technique 799
3
• 26.2 Chemical Characterization and Effect of Deposition Conditions on Chemical Characteristics and Physical Properties 800
4
• 26.2.1 EELS and Raman Spectroscopy 800
• 26.2.2 Hydrogen Concentrations 804
• 26.2.3 Physical Properties 804
• 26.2.4 Summary 805
3
• 26.3 Micromechanical and Tribological Characterizations of Coatings Deposited by Various Techniques 805
4
• 26.3.1 Micromechanical Characterization 805
• 26.3.2 Microscratch and Microwear Studies 813
• 26.3.3 Macroscale Tribological Characterization 822
• 26.3.4 Coating Continuity Analysis 826
• References 827
3
2
• 27 Self-Assembled Monolayers for Controlling Adhesion, Friction and Wear 831
3
• 27.1 A Primer to Organic Chemistry 834
4
• 27.1.1 Electronegativity/Polarity 834
• 27.1.2 Classification and Structure of Organic Compounds 835
• 27.1.3 Polar and Nonpolar Groups 838
3
• 27.2 Self-Assembled Monolayers: Substrates, Head Groups, Spacer Chains, and End Groups 839
• 27.3 Tribological Properties of SAMs 841
4
• 27.3.1 Surface Roughness and Friction Images of SAMs Films 844
• 27.3.2 Adhesion, Friction, and Work of Adhesion 844
• 27.3.3 Stiffness, Molecular Spring Model, and Micropatterned SAMs 848
• 27.3.4 Influence of Humidity, Temperature, and Velocity on Adhesion and Friction 850
• 27.3.5 Wear and Scratch Resistance of SAMs 853
3
• 27.4 Closure 856
• References 857
2
• 28 Nanoscale Boundary Lubrication Studies 861
3
• 28.1 Lubricants Details 862
• 28.2 Nanodeformation, Molecular Conformation, and Lubricant Spreading 864
• 28.3 Boundary Lubrication Studies 866
4
• 28.3.1 Friction and Adhesion 866
• 28.3.2 Rest Time Effect 869
• 28.3.3 Velocity Effect 871
• 28.3.4 Relative Humidity and Temperature Effect 873
• 28.3.5 Tip Radius Effect 876
• 28.3.6 Wear Study 879
3
• 28.4 Closure 880
• References 881
2
• 29 Kinetics and Energetics in Nanolubrication 883
3
• 29.1 Background: From Bulk to Molecular Lubrication 885
4
• 29.1.1 Hydrodynamic Lubrication and Relaxation 885
• 29.1.2 Boundary Lubrication 885
• 29.1.3 Stick Slip and Collective Phenomena 885
3
• 29.2 Thermal Activation Model of Lubricated Friction 887
• 29.3 Functional Behavior of Lubricated Friction 888
• 29.4 Thermodynamical Models Based on Small and Nonconforming Contacts 890
• 29.5 Limitation of the Gaussian Statistics – The Fractal Space 891
• 29.6 Fractal Mobility in Reactive Lubrication 892
• 29.7 Metastable Lubricant Systems in Large Conforming Contacts 894
• 29.8 Conclusion 895
• References 895
2
1
• Part E Industrial Applications and Microdevice Reliability
2
• 30 Nanotechnology for Data Storage Applications 899
3
• 30.1 Current Status of Commercial Data Storage Devices 901
4
• 30.1.1 Non-Volatile Random Access Memory 904
3
• 30.2 Opportunities Offered by Nanotechnology for Data Storage 907
4
• 30.2.1 Motors 907
• 30.2.2 Sensors 909
• 30.2.3 Media and Experimental Results 913
3
• 30.3 Conclusion 918
• References 919
2
• 31 The “Millipede” – A Nanotechnology-Based AFM Data-Storage System 921
3
• 31.1 The Millipede Concept 923
• 31.2 Thermomechanical AFM Data Storage 924
• 31.3 Array Design, Technology, and Fabrication 926
• 31.4 Array Characterization 927
• 31.5 x/y/z Medium Microscanner 929
• 31.6 First Write/Read Results with the 32?32 Array Chip 931
• 31.7 Polymer Medium 932
4
• 31.7.1 Writing Mechanism 932
• 31.7.2 Erasing Mechanism 935
• 31.7.3 Overwriting Mechanism 937
3
• 31.8 Read Channel Model 939
• 31.9 System Aspects 943
4
• 31.9.1 [peserror]PES Generation for the Servo Loop 943
• 31.9.2 Timing Recovery 945
• 31.9.3 Considerations on Capacity and Data Rate 946
3
• 31.10 Conclusions 948
• References 948
2
• 32 Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files 951
3
• 32.1 Design of the Electrostatic Microactuator 952
4
• 32.1.1 Disk Drive Structural Requirements 952
• 32.1.2 Dual-Stage Servo Configurations 953
• 32.1.3 Electrostatic Microactuators: Comb-Drives vs. Parallel-Plates 954
• 32.1.4 Position Sensing 956
• 32.1.5 Electrostatic Microactuator Designs for Disk Drives 958
3
• 32.2 Fabrication 962
4
• 32.2.1 Basic Requirements 962
• 32.2.2 Electrostatic Microactuator Fabrication Example 962
• 32.2.3 Electrostatic Microactuator Example Two 963
• 32.2.4 Other Fabrication Processes 966
• 32.2.5 Suspension-Level Fabrication Processes 967
• 32.2.6 Actuated Head Fabrication 968
3
• 32.3 Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems 968
4
• 32.3.1 Introduction to Disk Drive Servo Control 969
• 32.3.2 Overview of Dual-Stage Servo Control Design Methodologies 969
• 32.3.3 Track-Following Controller Design for a MEMS Microactuator Dual-Stage Servo System 971
• 32.3.4 Dual-Stage Seek Control Design 976
3
• 32.4 Conclusions and Outlook 978
• References 979
2
• 33 Micro/Nanotribology of MEMS/NEMS Materials and Devices 983
3
• 33.1 Introduction to MEMS 985
• 33.2 Introduction to NEMS 988
• 33.3 Tribological Issues in MEMS/NEMS 989
4
• 33.3.1 MEMS 989
• 33.3.2 NEMS 994
• 33.3.3 Tribological Needs 995
3
• 33.4 Tribological Studies of Silicon and Related Materials 995
4
• 33.4.1 Tribological Properties of Silicon and the Effect of Ion Implantation 996
• 33.4.2 Effect of Oxide Films on Tribological Properties of Silicon 998
• 33.4.3 Tribological Properties of Polysilicon Films and SiC Film 1000
3
• 33.5 Lubrication Studies for MEMS/NEMS 1003
4
• 33.5.1 Perfluoropolyether Lubricants 1003
• 33.5.2 Self-Assembled Monolayers (SAMs) 1004
• 33.5.3 Hard Diamond-like Carbon (DLC) Coatings 1008
3
• 33.6 Component-Level Studies 1009
4
• 33.6.1 Surface Roughness Studies of Micromotor Components 1009
• 33.6.2 Adhesion Measurements 1011
• 33.6.3 Static Friction Force (Stiction) Measurements in MEMS 1014
• 33.6.4 Mechanisms Associated with Observed Stiction Phenomena
• in Micromotors 1016
• References 1017
3
2
• 34 Mechanical Properties of Micromachined Structures 1023
3
• 34.1 Measuring Mechanical Properties of Films on Substrates 1023
4
• 34.1.1 Residual Stress Measurements 1023
• 34.1.2 Mechanical Measurements Using Nanoindentation 1024
3
• 34.2 Micromachined Structures for Measuring Mechanical Properties 1024
4
• 34.2.1 Passive Structures 1025
• 34.2.2 Active Structures 1028
3
• 34.3 Measurements of Mechanical Properties 1034
4
• 34.3.1 Mechanical Properties of Polysilicon 1034
• 34.3.2 Mechanical Properties of Other Materials 1036
• References 1037
3
2
• 35 Thermo- and Electromechanics of Thin-Film Microstructures 1039
3
• 35.1 Thermomechanics of Multilayer Thin-Film Microstructures 1041
4
• 35.1.1 Basic Phenomena 1041
• 35.1.2 A General Framework for the Thermomechanics of Multilayer Films 1046
• 35.1.3 Nonlinear Geometry 1054
• 35.1.4 Nonlinear Material Behavior 1058
• 35.1.5 Other Issues 1061
3
• 35.2 Electromechanics of Thin-Film Microstructures 1061
4
• 35.2.1 Applications of Electromechanics 1061
• 35.2.2 Electromechanics Analysis 1063
• 35.2.3 Electromechanics – Parallel-Plate Capacitor 1064
• 35.2.4 Electromechanics of Beams and Plates 1066
• 35.2.5 Electromechanics of Torsional Plates 1068
• 35.2.6 Leveraged Bending 1069
• 35.2.7 Electromechanics of Zipper Actuators 1070
• 35.2.8 Electromechanics for Test Structures 1072
• 35.2.9 Electromechanical Dynamics: Switching Time 1073
• 35.2.10 Electromechanics Issues: Dielectric Charging 1074
• 35.2.11 Electromechanics Issues: Gas Discharge 1075
3
• 35.3 Summary and Mention of Topics not Covered 1078
• References 1078
2
• 36 High Volume Manufacturing and Field Stability
3
• 36.1 Manufacturing Strategy 1086
4
• 36.1.1 Volume 1086
• 36.1.2 Standardization 1086
• 36.1.3 Production Facilities 1086
• 36.1.4 Quality 1087
• 36.1.5 Environmental Shield 1087
3
• 36.2 Robust Manufacturing 1087
4
• 36.2.1 Design for Manufacturability 1087
• 36.2.2 Process Flow and Its Interaction with Product Architecture 1088
• 36.2.3 Microstructure Release 1095
• 36.2.4 Wafer Bonding 1095
• 36.2.5 Wafer Singulation 1097
• 36.2.6 Particles 1098
• 36.2.7 Electrostatic Discharge and Static Charges 1098
• 36.2.8 Package and Test 1099
• 36.2.9 Quality Systems 1101
3
• 36.3 Stable Field Performance 1102
4
• 36.3.1 Surface Passivation 1102
• 36.3.2 System Interface 1105
• References 1106
3
2
• 37 MEMS Packaging and Thermal Issues in Reliability 1111
3
• 37.1 MEMS Packaging 1111
4
• 37.1.1 MEMS Packaging Fundamentals 1112
• 37.1.2 Contemporary MEMS Packaging Approaches 1113
3
• 37.2 Hermetic and Vacuum Packaging and Applications 1116
4
• 37.2.1 Integrated Micromachining Processes 1117
• 37.2.2 Post-Packaging Processes 1118
• 37.2.3 Localized Heating and Bonding 1119
3
• 37.3 Thermal Issues and Packaging Reliability 1122
4
• 37.3.1 Thermal Issues in Packaging 1122
• 37.3.2 Packaging Reliability 1124
• 37.3.3 Long-Term and Accelerated MEMS Packaging Tests 1125
3
• 37.4 Future Trends and Summary 1128
• References 1129
2
1
• Part F Social and Ethical Implication
2
• 38 Social and Ethical Implications of Nanotechnology 1135
3
• 38.1 Applications and Societal Impacts 1136
• 38.2 Technological Convergence 1139
• 38.3 Major Socio-technical Trends 1141
• 38.4 Sources of Ethical Behavior 1143
• 38.5 Public Opinion 1145
• 38.6 A Research Agenda 1148
2
1
• References 1149
• Acknowledgements 1153
• About the Authors 1155
• Detailed Contents 1171
• Subject Index 1189

0

ÏÐÅÄÌÅÒÍÛÉ ÓÊÀÇÀÒÅËÜ(eng)

1
• A
2
• A
• Continue term --- angle of helicity
3
• --- 1
4
• 1
• 843
3
• --- 4
4
• 4
3
• --- 843
• --- ?CP (microcontact printing) 187,
• --- 197
4
• 834
3
• --- ?TAS (micro-total analysis systems)
• --- 257
• --- ? -modified geometry 700
• --- 1
4
• 4-
• 916
3
• --- 1/f noise 387
4
• 957
3
• --- 16-mercaptohexadecanoic acid thiol
• --- (MHA) 843
• --- 1-D localization
• --- – effects 120
• --- – theory 120
• --- 1
4
• 3
3
• --- field 122
• --- 1-ethyl-3-(3-diamethylaminopropyl)
• --- carbodiimide (EDC) 80
4
• 296
3
• --- 2
4
• 638
3
• --- 2-DEG
• --- – two-dimensional electron gas 438
• --- 2
4
• 647
3
• --- 2
4
• 5-
3
• --- (AIDCN) 918
• --- 2
4
• 478
3
• --- 2
4
• 478
3
• --- 3
4
• 3
• 14
3
• --- 3
4
• 428
3
• --- 3
4
• 242
3
• --- 3
4
• 238
3
• --- 3
4
• 358
3
• --- 3-nitrobenzal malonitrile (NBMN)
• --- 916
• A
• abrasive wear 649
4
• 652
3
• Abrikosov lattice 440
• ABS (air-bearing surface) 968
• ac electrochemical deposition 104
• ac electrodeposition 103
• accelerated friction 822
• acceleration energy 798
• accelerometer 230
• --- – lateral 231
• --- – packaging 1100
• --- – test 1101
• --- – three-axis 233
• --- – vertical 232
• --- – wafer fabrication 1091
• acetonitrile 14
4
• 19
3
• acetylene (C2H2) 799
• acid-treated SWNT 64
• acoustic emission 690
• actin-myosin motor 751
• activation energy barrier 482
• active linearization 361
• active matrix electronic paper 195
• active microfluidic devices 257
• active microvalves 258
• active structures 1028
• actuated head 954
• --- – fabrication 968
• actuated slider 954
4
• 968
3
• --- – configuration 954
• actuated suspension 953
• actuation
• --- – pneumatic 258
• actuator
• --- – miniaturized 986
• actuator failure modes 1074
• adatoms 392
• addressing nanoscale bits of data
• --- 901
• adenine 10
• adenosine triphosphate (ATP) 741
• adhesion 325
4
• 498
• 507
• 515
• 605
3
• --- 799
4
• 844
• 930
• 983
3
• --- – at SAM interfaces 618
• --- – control 832
• --- – energy 619
• --- – force 452
4
• 546
• 547
• 552
• 564
3
• --- 566
4
• 567
• 619
• 621
3
• --- – force, quantized 558
4
• 584
3
• --- – hysteresis 567
4
• 568
• 573
3
• --- – hysteresis, relation to friction
• --- 573
4
• 576
• 585
3
• --- – influence of humidity on 850
• --- – measurement 1011
• --- – measurement techniques 606
• --- – mechanics 564–566
• --- – performance 866
• --- – primary minimum 544
4
• 555
• 559
3
• --- – promoter 188
• --- – quantization 623
• --- – rate-dependent 567
4
• 568
3
• adhesion force
• --- – total 616
• adhesion-controlled friction 571,
• --- 572
4
• 574
3
• adhesive
• --- – coating 479
• --- – interaction 732
• --- – material 610
• --- – surfaces 731
• --- – wear 728
• adhesive force 335
4
• 646
• 662
• 867
3
• --- 1004
• --- – increase 876
• --- – intrinsic 832
• --- – mapping 537
4
• 869
3
• --- – measurement 503
• adhesive tape film 907
• adiabatic limit 482
• adsorbate 404
4
• 695
3
• adsorbed
• --- – insulator substrate 400
• --- – water 875
• --- – water film 878
• adsorption 64
4
• 79
• 476
3
• --- – capacity 80
• --- – sites in MWNT 65
• AES (Auger electron spectroscopy)
• --- measurement 826
• AFAM (atomic force acoustic
• --- microscopy) 326
• affinity maturation 316
• affinity selection 297
• affinity-based targeting 301
• AFM (atomic force microscope)
• --- 173
4
• 743
• 765
3
• --- – adhesion measurement 620
• --- – Binnig design 333
• --- – calculated sensitivity 355
• --- – cantilever 332
4
• 350
• 610
3
• --- – cantilever array 923
• --- – commercial 333
• --- – construction 288
• --- – contact mode 331
• --- – control electronics 362
• --- – design optimization 348
• --- – designs 376
• --- – feedback loop 362
• --- – for UHV application 635
• --- – image 392
• --- – imaging signal 386
• --- – instrumentation 347
• --- – manufacturers 333
• --- – microscratch technique 853
• --- – probe construction 338
• --- – probes 378
• --- – pull-off force 619
• --- – resolution 375
• --- – set-up 450
4
• 453
3
• --- – spectroscopy 458
• --- – surface height map 817
• --- – test 818
• --- – thermomechanical recording 924
• --- – tip 288
4
• 379
• 386
• 450
• 452
• 477
3
• --- 480
4
• 1013
3
• --- – tip containing antibodies 489
• --- – tip radius 518
• --- – tip sensor design 476
• --- – tip size 622
• AFM image
• --- – tapping mode 914
• Ag 395
4
• 397
3
• --- – on Nb(110) 429
• --- – trimer 395
• air bag sensor 1084
4
• 1091
3
• air damping 470
• air gap capacitance 1075
• air induced oscillations 348
• air/water interface 479
• air-bearing surface (ABS) 968
• Al2O3-TiC head 825
• Al2O3 54
4
• 462
• 633
3
• --- – grains 508
• --- – ultrafiltration membrane 669
• Al2O3-TiC composite 508
• Al2O3-TiC slider 998
• AlxGa1?xAs 248
• AlAs 248
• alcohol 837
• aldehydes 837
• aligned carbon nanotubes 58
• alignment accuracy 195
• alignment of nanowires 109
• alkali halides 397
• alkaline phosphatase (AP) 271
• alkane 835
4
• 888
• 889
3
• alkanethiolate 187
• --- – film 841
• --- – on gold 187
• --- – on palladium 187
• --- – on silver 187
• alkanethiols 404
• alkylsilane film 619
• all-fiber interferometer 418
• all-MEMS configuration 907
• all-metal cantilever 912
• all-optical logic gates 21
• all-optical switching network 237
• alloy 662
• all-silicon cantilever 926
• alumina template 127
• aluminum
• --- – gates 34
• --- – mirror array 1088
• aluminum oxide 54
4
• 462
• 633
3
• aluminum-based surface
• --- micromachining 241
• AM (amplitude modulation)
• --- – AFM 388
• --- – mode 455
• amide 838
• amine 838
• Amontons law 454
4
• 517
• 571
• 574
3
• --- 577
4
• 580
• 646
• 718
3
• amorphous
• --- – oxide layer 106
• --- – surfaces 544
• amorphous carbon 49
4
• 793
3
• --- – chemical structure 800
• --- – coatings 800
4
• 806
3
• --- – phase 48
• amperometric time-based detection
• --- method 272
• amphiphilic molecular building
• --- blocks 23
• amplitude feedback 465
• amplitude modulation (AM) 388,
• --- 456
• --- – mode 331
• --- – SFM (scanning force microscope)
• --- 433
• amplitude of vibration 911
• anchor group 840
• AND operator 15
• angle of helicity 41
2
• angle of twist formula --- azopyridine
3
• angle of twist formula 3
• anion-terminated tip 399
• anisotropy 704
• --- – of friction 642
• annealing effect 1036
• anodic alumina (Al2O3) 100
• --- – oxide films 102
• --- – templates 103
• anodic bonding 1096
4
• 1115
3
• anodization 100
• ANSYS
• --- – analysis 1123
• --- – stress prediction 1124
• anthracene 20
• --- – channel 21
• antibiotic-resistant pathogens 293
• antibody 296
• --- – directed enzyme-prodrug therapy
• --- (ADEPTS) 301
• --- – production 312
• antibody–antigen 475
• --- – binding 283
• --- – complex 484
• --- – recognition 491
• antibody-coated beads 271
• antiferromagnetic spin ordering 403
• antigen presenting cell (APC) 312
• antigen recognition 282
• antimicrobial chemotherapy 293
• anti-stiction
• --- – agent (ASA) 1104
• --- – material 1104
• AP (alkaline phosphatase) 271
• APC (antigen presenting cell) 312
• APCVD (atmospheric pressure
• --- chemical vapor deposition) 770
• apparent viscosity 888
• applications
• --- – electrical 131
• arc discharge 798
• areal density 900
4
• 901
• 907
• 925
3
• --- 932
4
• 947
• 952
3
• Arg-Gly-Asp (RGD) 489
• armchair-type SWNT 42
• array
• --- – cantilever 927
• --- – characterization 927
• --- – chip 923
• --- – of aligned nanowires 115
• --- – of nanotubes 53
• Arrhenius equation 1127
• artifacts 415
• artificial double helix 12
• as-deposited film 1035
• aspect ratio 127
• asperity-asperity interaction 618
• as-released curvature 1059
• assembled nanotube probes 378
• assembly approaches 288
• assembly of nanostructures 294
• association process 476
• atmospheric pressure chemical vapor
• --- deposition (APCVD) 770
• atomic
• --- – interaction force 452
• --- – manipulation 419
• --- – motion imaging 420
• atomic force acoustic microscopy
• --- (AFAM) 326
• atomic force microscope (AFM)
• --- 114
4
• 288
• 289
• 303
• 325
• 331
• 371
3
• --- 385
4
• 404
• 476
• 498
• 546
• 547
• 549
3
• --- 585
4
• 588
• 688
• 717
• 743
• 841
• 861
3
• --- 862
4
• 899
• 922
3
• atomic resolution 330
4
• 382
• 388
3
• --- 389
4
• 427
• 476
• 480
3
• --- – imaging 391
4
• 394
• 462
3
• atomic-scale
• --- – dissipation 655
• --- – force measurement 347
• --- – friction 507
• --- – hysteresis 468
• --- – image 327
4
• 342
• 434
3
• --- – roughness 721
• atomistic computer simulation 398,
• --- 724
• ATP hydrolysis 742
• ATP(adenosintriphosphate) synthase
• --- 741
• attraction
• --- – long-range 550
4
• 562
3
• attractive force–distance profile
• --- 480
• attractive interaction 864
• Au film 771
• Au microbeam 777
4
• 778
• 785
3
• Au tip 619
• Au(111) 423
4
• 848
• 850
3
• --- – surface 619
• Aubry transition 728
• Au-coated AFM tip 619
• austenite 665
• average
• --- – distance 749
• --- – lifetime 482
• --- – stress 1049
• axial strength 672
• azopyridine 19
2
1
• B
2
• B
• backbone chain 839
• backflow 261
• bacmid 283
• bacteriophage 744
3
• 755
2
• bacteriorhodopsin 742
• BaF2 398
• ball and spring model 724
• ball grid arrays (BGA) 1113
• ballistic phonon transport 126
• ballistic transport 115
3
• 121
2
• balloon angioplasty 189
• bamboo texture 52
3
• 61
2
• band gap tunability 128
• band structure
• --- – electronic 128
• barcode reading 233
• barcode tags 136
• barrier-hopping 887
• --- – fluctuations 890
• basic switching operations 15
• batch fabrication 249
• --- – techniques 373
• batch nanotube tip fabrication 380
• B-cell epitopes 311
• bc-MWNT (bamboo-concentric) 44
• BDCS (biphenyldimethylchlorosilane)
• --- 849
• beam
• --- – two-layer 1045
• beam bending energy 745
• beam deflection 455
• beam failure 775
• beam-deflection FFM 633
• beam-steering mirror 239
• behavior
• --- – unethical 1143
• Bell’s formula 483
• bending
• --- – moment 767
3
• 783
2
• --- – stiffness 349
• --- – strength 767
3
• 774
• 775
• 785
2
• --- – stress 767
3
• 781
2
• --- – test 765
3
• 766
• 769
2
• Berkovich
• --- – indenter 765
• --- – indenter tip 677
• --- – pyramid 696
• --- – tip 815
• BGA (ball grid arrays) 1113
• bh-MWNT (bamboo-herringbone)
• --- 44
• Bi2Sr2CaCu2O8+? (BSCCO) 431
• Bi1?xSbx nanowires 123
• bias voltage 328
• biaxial strain 1042
• biaxial stress 1053
• BiCMOS 229
• bidirectional micropump 261
• bifurcation 1056
• bilayer
• --- – beam 1054
• --- – cantilever 1046
• --- – film 1059
• --- – model-lipid-lubricant 889
• --- – plate 1050
• --- – system 1042
• bimetallic catalyst 51
3
• 62
2
• binary compound 397
• bio force probe (BFP) 480
• biochemical fluids 254
• biochemical reaction 262
3
• 270
2
• biocompatibility 263
3
• 311
2
• bioconjugate chemistry 295
3
• 296
2
• bioconjugation method 288
• biofilter 271
• --- – surface-mounted 272
• biofluidic chip 273
3
• 987
2
• biofunctionalized cantilever 742,
• --- 743
3
• 745
2
• biogenic amorphous silicon shells
• --- 314
• biological
• --- – activity 316
• --- – affinity 297
• --- – affinity reagents 303
• --- – device 742
• --- – device components 304
• --- – evolution 751
• --- – macromolecules 299
• --- – nanotechnology 739
3
• 760
2
• --- – self-assembly 293
• biomaterials 711
• biomechanics 675
• biomedical device 189
• BioMEMS (Biological or Biomedical
• --- Microelectromechanical Systems)
• --- 253
3
• 262
• 764
• 987
2
• --- – actuation 269
• biomimetic valves 262
• biomolecules bound to carbon
• --- nanotubes 303
• biomolecules in therapeutic
• --- nanodevices 293
• bio–nano interface 744
• BioNEMS (Biological or Biomedical
• --- Nanoelectromechanical Systems)
• --- 764
3
• 989
2
• bio-sampling
• --- – magnetic bead-based 271
• biosensors 80
3
• 302
2
• bio-surfaces 489
• biotechnology 1139
• --- – limits of 281
• biotin 80
3
• 476
2
• biotin-avidin 622
• --- – spectrum 487
• biotin-directed IgG 476
• biotinylated AFM tip 489
• biphenyl 419
• bipyridine
• --- – building block 12
3
• 31
2
• --- – centered LUMOs 26
• birefringent crystal 352
• bismuth nanowire 118
3
• 134
2
• bistability 459
3
• 916
2
• bit pitch (BP) 943
• bit strings 938
• bits per inch (BPI) 952
• blister test 691
• Bloch states 428
• Bloch wave 427
• block co-polymer 291
• block-like debris 823
• blood cell analysis 310
• blood flow measurement 304
• blood-pool agents 306
• BN nanotubes 68
• Bode plot 976
• Bohr radius of excitons 135
• Boltzmann ansatz 482
• Boltzmann distribution 887
• bond
• --- – angle 67
• --- – breakage 483
• --- – lifetime 482
• --- – rupture 487
• --- – scission 623
• --- – strength 550
• bonded lubricant film 864
• bonded PFPE 1012
• bonding
• --- – energy 386
• --- – kinetics 893
• --- – techniques 1114
• bone
• --- – lamellae 675
• --- – lamellation 679
• --- – tissue 675
• boron
• --- – diffusion 227
• --- – doped Si 205
• --- – ion implantation 330
• bottom-up
• --- – approach 99
3
• 107
• 285
2
• --- – chemical strategies 10
• --- – materials 281
• --- – scheme 133
• boundary
• --- – element (BE) 1063
• --- – film formation 861
• --- – lubricant 729
3
• 861
2
• --- – lubricant film 832
• --- – lubrication 530
3
• 569
• 580
2
• --- 583
3
• 585
• 852
• 866
• 885
2
• --- – lubrication measurement 507
• --- – lubrication regime 884
• --- – scattering effects 125
• bovine serum albumin (BSA) 476
• bpsi (bits per square inch) 901
• BPT (1, 1
3
• 854
2
• --- 1007
• BPTC (cross-linked BPT) 1007
• branched hydrocarbon lubricants
• --- 889
• breakdown
• --- – electrical 1076
• bridging of polymer chains 562,
• --- 563
• broken beams 777
• broken coating chip 817
• brush see polymer brush
• brush-like structures 109
• buckling 808
3
• 812
• 1026
2
• --- – force 377
• --- – stress 813
• bulge test 691
• bulk
• --- – addressing 22
• --- – atoms 387
• --- – conduction band 424
• --- – diamond 793
3
• 801
• 803
2
• --- – etched silicon wafer 263
• --- – fluid transport 261
• --- – graphitic carbon 824
• --- – micromachining 229
• --- – Si wafers 205
• --- – state 428
• --- – viscosity 731
• --- – xenon 436
1
• C
2
• C
• Continue term --- failure 8
3
• C70 792
• C2 moieties 51
• C60 32
4
• 41
• 49
• 404
• 647
• 792
3
• --- – film 330
• --- – fullerenes 289
• --- – island 641
4
• 642
3
• --- – multilayered film 404
• --- – SWNT (single wall nanotube) 70
• C60-terminated film 843
• Ca ion 399
• cadherin-mediated adhesion 488
• CaF2 398
• CaF2 tip 652
• CaF2(111) 399
• CaF2(111) surface 399
4
• 652
3
• calculated tapping behavior 911
• calculus of variations 745
• calibration 610
4
• 698
• 699
3
• calorimetric experiments 482
• cantilever 387
4
• 390
• 457
• 481
3
• --- – all-metal 912
• --- – all-silicon 926
• --- – array 926
4
• 927
3
• --- – axis 418
• --- – base 469
• --- – beam 1015
4
• 1061
3
• --- – beam array (CBA) 1011
• --- – beam model 1067
• --- – biofunctionalized 742
4
• 743
• 745
3
• --- – biosensors 303
• --- – cell 926
• --- – deflection 332
4
• 372
• 387
• 389
3
• --- 418
4
• 465
• 480
• 632
• 745
• 848
3
• --- – deflection calculation 344
• --- – diode array 928
• --- – driven 455
• --- – effective mass 633
• --- – eigenfrequency 415
• --- – elasticity 636
• --- – fabrication 909
• --- – flexible 332
• --- – foil 373
• --- – heater 925
• --- – material 339
4
• 387
3
• --- – motion 331
4
• 913
3
• --- – mount 336
• --- – oscillation 457
4
• 469
3
• --- – Q-factor 433
• --- – resonance 451
• --- – resonance behavior 350
• --- – resonance frequency 481
4
• 611
3
• --- 890
4
• 1029
3
• --- – sensor 925
• --- – spring 454
• --- – spring constant 485
• --- – stainless steel 813
• --- – stiffness 338
4
• 505
• 610
• 926
3
• --- – temperature 940
• --- – thickness 632
4
• 633
3
• --- – tip 303
4
• 454
3
• --- – triangular 339
4
• 349
• 354
3
• --- – untwisted 335
• cantilever-based probes 433
• capacitance detection 356
• capacitive
• --- – accelerometers 230
• --- – detection 361
• --- – detector 331
• --- – displacement sensor 1033
• --- – forces 465
• --- – position sensing 956
• --- – sensor 227
4
• 230
3
• --- – transducer 245
• capacitor-like device 913
• capacity growth 903
• capillarity-driven stop valve 265
• capillary
• --- – effect on adhesion 607
• --- – electrophoresis (CE) 255
• --- – force 544
4
• 559
• 564
• 619
• 662
3
• --- – force curve 617
• --- – formation 614
• --- – pressure 265
• --- – stiffness 614
• capsid wall 760
• carbon 792
• --- – crystalline 792
• --- – film 865
• --- – magnetron sputtered 799
• --- – shells 52
• --- – source 57
• --- – spacer chain 853
• --- – superactivated 77
• carbon coating
• --- – unhydrogenated 804
• carbon nanofiber
• --- – vapor grown 56
• carbon nanotube (CNT) 55
4
• 105
3
• --- 287
4
• 425
• 667
3
• --- – adsorption properties 76
• --- – application 73
• --- – catalyst-free growth 59
• --- – catalyst-supporting materials 75
• --- – chemical reactivity 67
• --- – diameters 63
• --- – FETS 303
• --- – field emission 74
• --- – formation 46
• --- – growth mechanisms 59
• --- – heterogeneity 63
• --- – in situ filling 69
• --- – maximum current density 74
• --- – mechanical properties 376
• --- – molten state filling 69
• --- – oxidation 72
• --- – production 46
• --- – properties 63
• --- – quantum wires 66
• --- – sublimation filling 70
• --- – synthesis conditions 61
• --- – tip 342
4
• 375
• 376
• 501
3
• --- – wet chemistry filling 69
• carbon–carbon distance 436
• carboxyl acid 837
• carboxylates (RCOO?) 404
• cardiovascular
• --- – sensors 310
• --- – system 310
• --- – tissue engineering 310
• carrier
• --- – density 118
4
• 122
3
• --- – gas 804
• --- – mean free path 116
4
• 118
• 121
3
• --- – mobility 118
• Casimir force 545
• casting 186
• catalysis 397
• catalysis-enhanced
• --- disproportionation 54
• catalysis-enhanced thermal cracking
• --- 54
• catalyst 49
4
• 106
• 668
3
• --- – nanoparticles 58
• --- – preparation 54
• catalyst-based SWNT 61
• catalyst-free 57
• catalytic chemical vapor deposition
• --- (CCVD) 52
4
• 55
• 58
• 60
• 61
3
• catalytic decomposition 54
• catalytically grown MWNT 673
• cathode deposit 49
4
• 51
3
• cathodic arc carbon 806
• CCVD see catalytic chemical vapor
• --- deposition
• CCVD method 61
• CDS (correlated double sampling)
• --- technique 961
• CdSe nanorods 136
• cell adhesion 489
• cellular immune responses 311
• cellular phone 904
• CeO2(111) 400
• ceramic
• --- – matrix composites 81
• --- – slider 824
• --- – tip 74
• cerpacs 1101
• CFM (chemical force microscopy)
• --- 73
4
• 489
• 619
3
• chain adsorption 894
• chalcogenide 906
4
• 910
• 915
3
• change of meniscus 1005
• changing of surface conditions 117
• channel etching process 255
• channel-liquid pair 261
• chaotic mixer 266
• characteristic distance 588
• characteristic slip time 894
• characteristic velocity 889
• charge density wave (CDW) 428
• charge exchange interactions 545,
• --- 552
4
• 553
3
• charge fluctuation forces see ion
• correlation forces
• charge separation 1116
• charge transfer interactions see
• charge exchange interactions
• charge trapping 913
• charge-controlled pull-in equation
• --- 1064
• check valve design 260
• chelate metal cations 12
• chemical
• --- – bond 386
• --- – bonding 388
4
• 863
3
• --- – bonding force 331
• --- – characterization 800
• --- – composition 115
• --- – detection devices 137
• --- – force 386
• --- – force microscopy (CFM) 73
4
• 489
3
• --- 619
• --- – heterogeneity 568
• --- – input 16
• --- – interaction force 452
• --- – sensors 74
• --- – signal 19
4
• 20
3
• --- – synthesis 12
• --- – vapor deposition (CVD) 104
4
• 793
3
• --- – vapor infiltration 57
• chemisorption 861
• chemistry route 57
• chemoselective conjugation 295,
• --- 296
• chemotherapy 307
• chip level integration 1093
• chip-on-flex (COF) 1113
• clamped-clamped mechanical beams
• --- 247
• classical finite size 116
• classical size effect 120
• clock field 946
• clogging 56
• closed loop sensitivity 973
• clustered acetate 406
• CMOS electronics 230
• CMOS static random access memory
• --- (SRAM) 235
• CMOS sustaining electronics 245
• c-MWNT (concentric multiwall
• --- nanotube) 43
4
• 48
• 60
• 67
3
• Co clusters 425
• CO disproportionation 54
• CO on Cu(110) 419
• coated particles 306
• coating
• --- – continuity 826
• --- – damage 823
• --- – failure 820
2
• hardness 8
3
• 3
2
3
• --- – hardness 818
• --- – hydrophobic 1014
• --- – mass density 801
• --- – microstructure 800
• --- – thickness 810
4
• 812
3
• coating–substrate interface 819
• coefficient
• --- – effective 647
• coefficient of friction 501
4
• 510
• 516
3
• --- 535
4
• 579
• 634
• 771
• 773
• 809
• 813
3
• --- 823
4
• 824
• 844
• 868
• 872
• 996
• 1005
3
• --- – Si(100) 531
• --- – Z-15 531
• --- – Z-DOL (BW) 531
• coefficient of friction see friction
• coefficient
• coefficient of friction relationship
• --- 343
• coefficient of thermal expansion
• --- (CTE) 1124
• co-energy 1064
• coercivity 137
• COF (chip-on-flex) 1113
• cognate receptors 298
• cognitive ligands 476
• cognitive science 1139
• coherence length 423
• cohesive
• --- – potential 759
• --- – surface model 759
• coil inductor 242
• cold welding 553
4
• 579
3
• collagen fibers 679
• collective phenomenon 885
4
• 888
3
• colloidal
• --- – forces 545
• --- – probe 548
• colossal magneto resistive effect
• --- 439
• comb storage device 907
• comb-drive 955
4
• 1030
3
• --- – actuator 955
• --- – resonator 245
• combined AFM nanoindenter device
• --- 676
• commensurate Cu(111) 728
• commensurate system 723
• commercial data-storage device
• --- 907
• commercial MEMS devices 991
• communicating
• --- – between compatible molecular
• components 19
• --- – force 748
• --- – molecular switches 19
• compact bone
• --- – lamellae 678
• --- – mean hardness 680
• complex
• --- – bonds 486
• --- – dielectric function 127
• --- – fluidic systems 886
• --- – logic functions with molecular
• --- switches 19
• component
• --- – failure 764
• --- – supplier 902
• --- – surface 1009
• composite 662
• composite material 81
• compositionally modulated
• --- nanowires 106
• compression energy 887
• compressive stress 805
4
• 812
• 1035
3
• --- 1044
• computer simulation 718
• --- – forces 553
4
• 557
• 561
• 564
• 565
3
• --- 585
• --- – friction 553
4
• 573
• 574
• 579
• 580
3
• --- 583
4
• 585
• 586
• 590
• 591
• 594
3
• concentration
• --- – critical 650
• concentric
• --- – graphenes 43
• --- – texture 61
• --- – type (c-MWNT) 43
• conditional release of therapeutics
• --- 288
• conductance 117
• conductance quantization in metallic
• --- nanowires 115
• conducting polymers 103
4
• 304
3
• conductive polymeric materials 304
• conductivity 136
• --- – electrical 133
• confined
• --- – complex liquids 891
• --- – nanostructure 68
• --- – simple liquids 888
• confinement 544
4
• 545
• 570
• 584
3
• --- 593
• conformation 864
• conformational defect 849
• conforming contacts 894
• connector
• --- – miniaturized 986
• constant
• --- – amplitude (CA) 464
• --- – amplitude FM mode 468
• --- – current mode 328
• --- – excitation mode (CE) 464
• --- – force mode 362
• --- – height mode 328
4
• 399
3
• constrained elastic media 1061
• consumer electronics 904
• consumer nanotherapeutic device
• --- 288
• contact
• --- – AFM (atomic force microscope)
• --- 455
• --- – AFM dynamic method 662
• --- – angle 616
4
• 833
3
• --- – angle goniometer 847
• --- – angle of SAM 846
• --- – conductance 649
4
• 913
3
• --- – elastic 703
• --- – mechanics see adhesion
• --- mechanics
• --- – meniscus 619
• --- – mode 373
4
• 909
3
• --- – mode photolithography 195
• --- – printing 186
4
• 200
• 833
3
• --- – radius 678
• --- – resistance 690
• --- – stiffness 677
4
• 689
• 698
• 701
• 810
3
• --- 894
• --- – stress 872
• --- – value theorem 575
• contact area 548
4
• 650
• 651
• 677
3
• --- 699
4
• 709
3
• --- – apparent macroscopic 571
4
• 576
3
• --- 580
• --- – true molecular 547
4
• 549
• 566
3
• --- 571
4
• 574
• 594
3
• contamination 332
• continuous micropump 269
• continuous stiffness measurement
• --- (CSM) 810
• continuum
• --- – analysis 753
• --- – model 638
• --- – theory 554
4
• 556
• 558
• 559
• 569
3
• --- 580
• contour plot 1057
• contour-mode disk resonator 246
• contraction 1044
• contrast 435
• --- – agent design 306
• --- – agents 304
• --- – enhancing agents for medical
• --- imaging 304
• --- – enhancing nanoparticle 306
• --- – formation 397
• control
• --- – of nanotherapeutic action 302
• --- – of position 109
• --- – over nanowire diameter distribution
• --- 106
• --- – system 359
4
• 362
3
• --- – theory 1144
• controlled desorption 419
• controlled evaporation 269
• controlled geometry (CG) 330
• controlled nanoscale architecture
• --- 294
• controlled substances 1140
• controlled triggering of therapeutic
• --- action 298
• controller design 969
• CoO 402
• Co-O film on PET 524
• Cooper pairs 429
• coordinated molecular process 886
• copper adhesion 963
• copper hexadecafluorophthalocyanine
• --- 196
• copper tip 652
4
• 727
3
• corannulene 61
• cores of carbon nanotubes 105
• core-sheath nanowire 114
• core-shell structure 132
• Coriolis acceleration 232
4
• 1095
3
• correlated-double-sampling (CDS)
• --- 960
• corrosion 1116
4
• 1125
3
• cost of goods (COGs) 285
4
• 307
3
• co-transporter 489
• Couette flow 569
4
• 593
• 885
3
• Coulomb
• --- – force 396
• --- – interaction 66
• --- – law of friction 644
• coupled electromechanics 1063
• covalent
• --- – bonds 10
• --- – scaffolds 12
• Cr binding layer 619
• Cr coating 432
• Cr(001) 427
• crack spacing 524
• cracks 807
• creativity at the nanoscale 1135
• creep 415
4
• 691
• 1125
3
• --- – effect 528
• --- – relaxation 1060
• creep model
• --- – linear 890
• critical
• --- – concentration 650
• --- – curvature 1056
• --- – degree of bending 1031
• --- – load 809
• --- – magnetic field strength 122
• --- – normal load 853
• --- – position 636
• --- – shear stress 570
4
• 577
• 585
3
• --- 586
• --- – temperature 423
4
• 434
• 1059
3
• --- – time 894
• --- – velocity 585
4
• 587
• 590
• 591
3
• crosshair alignment 195
• crosslinked BPT (BPTC) 843
• crosstalk 363
4
• 927
• 1066
3
• cross-track distance 945
• cryostat 415
• crystal
• --- – growth direction 103
• --- – orientation 206
• --- – structure 333
• --- – surfaces 375
2
• crystal growth orientation, preferred --- cytotoxin deposition
3
• cry
• --- 104
• crystalline
• --- – carbon 792
• --- – silicon 254
• --- – surfaces 544
• CSM (continuous stiffness
• --- measurement) 810
• CTE (coefficient of thermal
• --- expansion) 1124
• CTL (cytotoxic T-cell) responses
• --- 311
• Cu(001) 397
• Cu(100) 640
• Cu(100) substrate 728
• Cu(100) tip 728
• Cu(111) 423
4
• 639
• 640
• 655
3
• Cu(111) surface states 427
• Cu(111) tip 653
• cube corner 696
4
• 704
3
• culture of engineering 315
• cuprates 431
• current density effect 1036
• current rectification 116
• current-voltage characteristics 116,
• --- 916
• curvature 1044
• --- – critical 1056
• --- – effects 723
• --- – measured 1053
• --- – variation 1046
• curved electrode
• --- – actuator 1070
• --- – shape 1071
• custom-designed MEMS product
• --- 1112
• cut-off distance 552
4
• 573
3
• CVD (chemical vapor deposition)
• --- 104
4
• 793
3
• cyclic
• --- – fatigue 810
4
• 1036
3
• --- – olefin copolymers (COC) 257
• --- – thermomechanical load 1061
• --- – voltammograms 29
• cytoplasmic surface 478
• cytosine 10
• cytoskeletal filament 747
• cytotoxic therapeutics 307
• cytotoxic T-lymphocytes (CTLs)
• --- 311
• cytotoxin deposition 309
2
1
• D
2
• D
• (d, k) codes --- double barrier resonant tunneling
3
• --- (d, k) codes 947
• D2O 425
• damage 553
4
• 569
3
• damage mechanism 818
• damped harmonic oscillator 454
• damping 664
• --- – effective 470
• --- – effects 451
• --- – pneumatic 418
• data
• --- – lifetime 905
• --- – rate limitation 922
• --- – rates 948
• --- – storage 900
• --- – storage application 912
• --- – storage device 922
• --- – storage system 994
• dc electrochemical deposition 103,
• --- 104
• de Broglie wavelength 116
• Deborah number 583
• debris 823
• Debye exponential relaxation 885,
• --- 892
• Debye length 555
4
• 557
3
• decoupled design 970
• decoupled track-following control
• --- 972
• deep reactive ion etching (DRIE)
• --- 156
4
• 162
• 254
• 963
3
• defect motion 415
• defect nucleation 702
• defect production 651
• defects in channel 255
• deflection 457
4
• 1054
3
• --- – curve 1071
• --- – maximum 1071
• --- – measurement 387
• --- – noise 433
• deformation 547
4
• 549
• 1041
• 1047
3
• --- – behavior 1058
• --- – elastic 450
4
• 566
• 581
• 647
3
• --- – of microtubule 674
• --- – plastic 553
4
• 580
3
• --- – regime 1046
• deformed beam 778
• degradability 311
• degrees of freedom 753
• delamination 704
4
• 804
• 808
• 812
3
• --- 1125
• delivery of therapeutics 296
• Demnum-type PFPE 537
• --- – lubricant film 869
• dendrimer-based therapeutic 284
• dendritic
• --- – cells (DCs) 312
• --- – polymers 310
• density
• --- – functional theory (DFT) 78
• --- – modulation 730
• --- – of defects 193
4
• 195
3
• density of states (DOS) 66
• --- – electronic 133
• dental enamel 711
• depletion
• --- – attraction 545
4
• 562
3
• --- – interaction 562
• --- – stabilization 545
4
• 562
3
• deployment of functional
• --- biomolecules 288
• deposition
• --- – conditions 206
• --- – rate 798
• --- – techniques 795
4
• 796
3
• Derjaguin approximation 546
4
• 557
3
• --- 559
• Derjaguin–Landau–Verwey–
• --- Overbeek (DLVO) theory 555
• Derjaguin–Muller–Toporov (DMT)
• --- – model 647
• --- – theory 566
• design rule 348
• designed molecules 12
• design-for-manufacturability 1086
• design-for-volume 1086
• detection 939
• --- – circuit 939
• --- – systems 332
4
• 350
3
• device
• --- – architectures 288
• --- – components communication 304
• --- – design 280
• --- – electronic 133
• --- – fluidic 253
• --- – molecule-based 24
4
• 28
3
• --- – scaling 989
• dewetting 868
4
• 1003
• 1013
3
• DFM (dynamic force microscopy)
• --- 433
4
• 471
• 490
• 501
3
• DFS (dynamic force spectroscopy)
• --- 484
• DHBp (4, 4 -dihydroxybiphenyl)
• --- 843
4
• 854
• 1007
3
• diameter-dependent 116
• diamond 67
4
• 373
• 379
• 673
• 698
3
• --- 792
• --- – coated cantilever 914
• --- – coating 804
4
• 833
3
• --- – film 793
• --- – like amorphous carbon coating
• --- 800
• --- – like carbon (DLC) 524
4
• 1003
3
• --- – powder 51
• --- – tip 504
4
• 651
• 662
• 676
• 814
• 819
3
• --- 841
4
• 866
• 999
3
• diatoms 314
• diblock copolymers 102
4
• 103
• 138
3
• dicationic BIPY 17
• dielectric
• --- – breakdown 691
• --- – capacitance 1075
• --- – charging 1074
• --- – function 127
4
• 129
3
• differential scanning calorimetry
• --- (DSC) 664
• differential-drive configuration 955
• diffuser micropumps 261
• diffusion 1061
• --- – based extractor 266
• --- – coefficient 265
4
• 865
3
• --- – flame synthesis 58
• --- – limited reaction 893
• --- – parameters 420
• --- – thermally activated 415
• diffusive
• --- – communication 750
• --- – relaxation 482
• --- – transport 115
4
• 116
3
• digital
• --- – feedback 362
• --- – light processing (DLP) 987
• --- – micromirror device (DMD) 235,
• --- 987
4
• 992
3
• --- – signal processor (DSP) 328
• --- – transmission between molecules
• --- 20
• dilation 573
4
• 584
• 586
• 593
3
• dimension 387
• dimensions of spatial structures 747
• dimer structure 394
• dimer-adatom-stacking (DAS) 392
• Diophantine equation 973
• DIP (dual in-line packaging) 1118
• dip coating technique 863
• diphtheria toxin (DT) 300
• dipole molecule 834
• dip-pen nanolithography (DPN)
• --- 175
4
• 288
3
• diprotic acid
• --- (11-thioundecyl-1-phosphonic
• --- acid) 621
• direct overwriting 938
• direct parallel design 970
• direct write electron beam/focused
• --- ion beam lithography 186
• directly growing nanotubes 379
• discontinuous sliding motion 887
• disjoining pressure 871
• disk drive
• --- – manufacturer 902
• --- – servo control 968
• dislocation
• --- – line tension 704
• --- – motion 570
• --- – nucleation 696
• dispersion
• --- – force 406
• --- – mixing 266
• displacement 1047
4
• 1057
3
• --- – amplitude 930
• --- – calibration 612
• --- – controlled scanning probe 610
• --- – field 1055
• --- – maximum 1070
• --- – resolution 681
• --- – vertical 779
• display
• --- – paper-like 193
• disposable biosensors 274
• disposable plastic lab-on-a-chip
• --- 993
• dissemination of biological
• --- information 315
• dissipated power 939
• dissipation 468
• --- – force 461
• --- – measurement 631
• dissipative tip-sample interaction
• --- 468
• dissociation 476
• distortion 360
• distributed
• --- – Bragg reflector (DBR) 199
• --- – feedback (DFB) 199
• --- – laser resonators 199
• dithio-bis(succinimidylundecanoate)
• --- 476
• dithio-phospholipids 479
• D-L amino acids (aas) 291
• DLC 1012
• --- – coating 524
4
• 794
• 796
• 809
• 819
3
• --- 826
4
• 1008
3
• --- – coating microstructure 812
• DLP technology 1088
• DLVO interactions 549
4
• 555
3
• DMD (digital mirror device)
• --- – fabrication 1088
• --- – manufacturing 1095
• --- – packaging 1100
• DMT (Derjaguin–Muller–Toporov)
• --- – model 695
• --- – theory 724
• DNA 404
4
• 464
• 467
• 476
• 747
3
• --- – analysis 272
• --- – analysis system 265
• --- – nanostructure 294
• --- – nanowire 33
• --- – packing 756
• domain
• --- – pattern 439
• --- – re-orientation 913
• donor impurity concentration 127
• doped
• --- – anode 49
• --- – polysilicon film 1001
• --- – silicon 996
• --- – silicon wafer 31
• DOS structure 423
• double barrier resonant tunneling
2
• Continue term ---
3
• --- 124
• double-layer
• --- – force 621
• --- – interaction 545
4
• 555
3
• double-wall nanotubes (DWNTs)
• --- 51
• doubly clamped beam 1028
• doxorubicin 308
• DRAM 923
• Drexler 1146
• DRIE (deep reactive ion etching)
• --- 156
4
• 162
• 166
• 168
• 254
• 954
3
• --- 963
• dried tissue properties 676
• drive amplitude 470
• drive current
• --- – maximum 976
• driven cantilever 455
• driving frequency 351
• driving/sensing circuit integration
• --- 960
• drug
• --- – delivery 285
• --- – resistant organism 293
• --- – targeting 297
• dry
• --- – etching 205
• --- – nitrogen environment 999
• --- – (plasma) etching 254
• --- – thermal oxidation 286
• dry surfaces 571
4
• 587
3
• --- – forces 550
4
• 552
3
• --- – friction 571
4
• 576
• 588
• 589
3
• dual-axis gyroscope 233
• dual-in-line packaging (DIP) 1118
• dual-stage
• --- – configuration 952
• --- – sensitivity 973
• --- – servo system 953
• --- – short span seek 977
• Dupre equation 569
• DWNT (double-wall nanotubes) 51
• dynamic
• --- – interactions 544
4
• 570
• 581
3
• --- 584
• --- – mode 331
• --- – operation mode 388
• --- – oscillation force 456
• --- – spectral analysis 891
• --- – states of friction 894
• --- – viscosity 264
• dynamic AFM 387
4
• 453
• 461
3
• --- 468
4
• 469
3
• dynamic force microscopy (DFM)
• --- 457
4
• 471
• 490
• 501
3
• dynamic force spectroscopy (DFS)
• --- 484
• dynamic friction see kinetic friction
2
1
• E
2
• E
• E. coli --- evolution of curvature
3
• E. coli
• --- – bacterium 748
• --- – cells 756
• early failure 1126
• early tumor detection 310
• EBD (electron beam deposited) tips
• --- 376
• ECR (electron cyclotron resonance)
• --- CVD 795
4
• 815
• 1009
3
• --- – coating 822
• EDP (ethylene diamine pyrocatechol)
• --- 254
• EELS (electron resonance loss
• --- spectroscopy) 800
• EFC (electrostatic force constant)
• --- 678
• effect of surface roughness 779
4
• 781
3
• effective
• --- – coefficient of friction 647
• --- – damping constant 470
• --- – force gradient 463
• --- – ligand concentration 485
• --- – mass 433
• --- – medium 127
• --- – medium theory 127
• --- – shear stress 648
• --- – spring constant 637
4
• 645
• 721
3
• --- – structural stiffness 1053
• --- – tether length 485
• --- – viscosity 583
4
• 593
• 885
3
• effects of doping and annealing
• --- 120
• EHD
• --- – induction type 262
• --- – injection type 262
• eigenstrain 1041
• elastic
• --- – contact 703
• --- – energy 732
• --- – force 727
4
• 757
3
• --- – Frenkel–Kontorova chain 727
• --- – Hamiltonian 755
• --- – instabilities 727
• --- – mismatch 1051
4
• 1056
3
• --- – modulus 664
4
• 698
• 767
• 770
• 774
3
• --- 805
4
• 806
• 809
3
• --- – properties 673
• --- – properties of ssDNA 746
• --- – stiffness coefficient 1048
• elastic deformation 450
4
• 647
3
• --- – long-range 722
• elasticity 433
4
• 663
3
• --- – ofDNA 757
• --- – two-dimensional 754
• elastic-plastic deformation 785
• elastohydrodynamic lubrication
• --- 569
4
• 570
• 581
• 583
3
• elastomer precursor 256
• elastomeric stamp 190
• electric charging 913
• electric field gradient microscopy
• --- (EFM) 114
• electric force gradient 338
• electrical
• --- – applications 131
• --- – breakdown 1076
• --- – conductivity 133
• --- – isolation 956
• --- – surface passivation 1103
• electric-arc
• --- – method 61
• --- – reactor 48
• electroactive
• --- – fragments 14
• --- – layer 24
• --- – solids 22
• electrochemical
• --- – AFM 338
• --- – cell 24
• --- – degradation 304
• --- – deposition 103
4
• 675
3
• --- – detection 270
• --- – etch 383
• --- – etching 373
• --- – immunosensor 272
• --- – STM 330
• electrochemically etched tips 383
• electrode
• --- – arrays 26
• --- – geometry 1076
• --- – pair 1077
• electrodeposition 103
4
• 153
• 180
3
• electrodes with molecular layers
• --- 27
• electrohydrodynamic (EHD)
• --- pumping 261
• electroless deposition 188
• electro-luminescence (EL) 132
4
• 135
3
• electrolytic
• --- – conduction 1116
• --- – method 57
• electromagnetic
• --- – actuators 259
• --- – forces 550
• --- – microvalves 259
• electromechanical
• --- – coupling 245
• --- – load 1040
• --- – mirror 1069
• electromechanics
• --- – analysis 1063
• --- – application 1061
• --- – test structure 1072
• electromigration 419
• electron
• --- – beam deposition (EBD) 376
• --- – cyclotron resonance chemical vapor
• --- deposition (ECR-CVD) 795
4
• 799
3
• --- – energy loss spectrometer (EELS)
• --- 113
• --- – energy loss spectroscopy (EELS)
• --- 798
• --- – Fermi wavelength 116
• --- – field emission 133
• --- – interactions 428
• --- – mean free path 115
• --- – scattering 120
• --- – tunneling 327
• electron-beam lithography 674
• electronegativity 834
• electron-electron interaction 423
• electronic
• --- – band structure 128
• --- – density of states 133
• --- – device 133
• --- – ink 195
• --- – newspaper 196
• --- – noise 333
• electron-phonon interaction 428
• electro-optical modulation 136
• electro-osmosis (EO) 261
• electro-osmotic
• --- – flow(EOF) 255
• --- – pumping 260
• electroplated microactuator 966
• electroplating 153
4
• 1113
3
• electro-rheological fluid 260
• electrostatic
• --- – actuation 236
4
• 244
• 248
3
• --- – binding 478
• --- – coupling 1063
• --- – discharge (ESD) 1098
• --- – interaction 393
4
• 402
• 464
3
• --- – microactuator 952
• --- – micromotor 1061
• --- – potential 398
4
• 438
3
• --- – short-range interaction 398
• --- – spring constant 956
• electrostatic force 386
4
• 437
3
• --- 544
4
• 1062
• 1103
3
• --- – constant (EFC) 677
• --- – interaction 393
• --- – microscopy 438
• electrostatically actuated devices
• --- 258
• electrostatic-induced errors 1098
• embedded atom method (EAM)
• --- 720
• embedded system 721
• embossing 833
• --- – technique 191
• end caps 47
• end deflection 1026
• end group 864
• endofullerene 71
• endothelial cell surfaces 488
• energy
• --- – barrier 482
• --- – conservation 469
• --- – dissipation 468
4
• 567
3
• --- 572
4
• 578
• 587
• 654
• 849
3
• --- – elastic 732
• --- – electrical 1063
• --- – mechanical 1063
• --- – resolution 422
• --- – scales 750
• --- – separation between subband 115
• --- – total 1063
• energy dispersive X-ray spectrometer
• --- (EDS) 113
• engineered nanostructures 13
• engineering materials 758
• enhanced permeability and retention
• effect (EPR) 307
• entangled states 570
• entanglement 622
4
• 886
3
• --- – strength 886
• entropic force 564
• entropically
• --- – confined systems 891
• --- – cooled layer 888
• entropy
• --- – structural 886
4
• 887
3
• environmental shield 1087
• enzymatic cleavage 287
• enzymatic prodrug activator 301
• enzymes 482
• epitaxial silicon seal 1114
• epitaxy 152
4
• 170
• 172
3
• epitope mapping 491
• epoxy bonding 1115
• EPR tumor targeting 310
• equibiaxial
• --- – deformation state 1050
• --- – stress distribution 1051
• equilibrium
• --- – equipartition 720
• --- – interactions see static interactions
• --- – true (full) or restricted 562
• equivalent mechanical circuit
• --- 1073
• erasing mechanism 936
• ESD protective circuitry 1098
• ester 837
• etching 186
4
• 1041
3
• ethanolamine 477
• ether 837
• ethical rule violation 1143
• ethics of nanotechnology 1138
• ethylene diamine 287
• ethylene diamine pyrocatechol (EDP)
• --- 254
• Euler
• --- – buckling criterion 1026
• --- – equation 349
• Euler–Bernoulli beam equation
• --- 1063
• eutectic bonding 1115
• evolution of curvature 1059
2
• examples of NEMS --- theory 88
3
• examples
• exchange
• --- – force 402
• --- – force interaction 402
• --- – interaction energy 402
• exchangeable carrier plate 636
• excitation
• --- – external 456
• excitation amplitude 461
• exciton 127
4
• 136
3
• --- – binding energy 135
• --- – confinement 135
• --- – laser action 135
• extended exponential Kohlrausch
• --- relaxation function 892
• external
• --- – excitation 456
• --- – excitation frequency 466
• --- – noise 415
• --- – normal load 867
• --- – triggering 284
• --- – vibrations 329
• extraction of mechanical properties
• --- 1073
• extravasation 297
4
• 307
3
• extrinsic stress 1041
• Eyring
• --- – model 644
4
• 887
• 890
3
• --- – theory 887
2
1
• F
2
• F
• Fab molecule --- friction
3
• Fab molecul
• fabrication
• --- – of membrane 314
• --- – of microfluidic systems 254
• --- – ofmoldmasters 255
• --- – techniques 254
• --- – technology 225
• face-centered cubic (fcc) 792
• faceted 109
4
• 111
• 135
3
• failure
• --- – density function 1125
• --- – mechanism 825
4
• 1125
3
• --- – mode 1101
• --- – mode effect analysis (FMEA)
• --- 1101
• --- – of MEMS/NEMS device 1012
• --- – rate 1126
• Fano resonance 425
• fatigue 810
• --- – behavior 769
• --- – crack 776
4
• 823
• 1125
3
• --- – damage 810
• --- – failure 1036
• --- – life 809
• --- – measurement 1032
• --- – properties 768
4
• 776
3
• --- – resistance 1028
• --- – strength 776
• --- – test 776
4
• 813
3
• fatty acid monolayer 841
• FC (flip chip) technique 1113
• FCA (filtered cathodic arc) 815
• --- – coating 806
4
• 811
3
• Fe(NO3)3 381
• feasible simulation
• --- – maximum 719
• Fe-coated tip 403
• feedback
• --- – architecture 228
• --- – circuit 333
4
• 464
• 465
3
• --- – loop 363
4
• 373
• 450
• 456
• 461
3
• --- 465
4
• 485
• 634
• 957
3
• --- – network 327
• --- – signal 388
• Fe-N/Ti-N multilayer 675
• FeO 402
• Feridex 306
• Fermi
• --- – energy 122
• --- – level 33
4
• 422
3
• --- – points 428
• ferrocene 59
• --- – hydrophobic 24
• ferroelectric film 913
• ferromagnetic
• --- – particles 305
• --- – probe 439
• --- – tip 441
• FE-SEM image 136
• FFM (friction force microscopy)
• --- 632
• --- – dynamic mode 652
• --- – on atomic scale 644
• --- – tip 507
4
• 636
• 639
3
• FIB (focused ion beam) tips 376
• fiber
• --- – optic telecommunication 233
• --- – optical interferometer 352
• --- – optics 299
• FIB-milled probe 342
• FID
• --- – free induction decay 305
• field
• --- – emission 910
• --- – emission tip 378
4
• 910
3
• --- – emission-based display 58
• --- – emission-based screen 74
• --- – ion microscope (FIM) 452
• field-effect transistor (FET) 85,
• --- 116
4
• 132
• 137
• 289
• 290
• 302
3
• figure of merit 133
• filled nanotube 69
• filling efficiency 71
• film/substrate system 1045
• films on substrate 1023
• film–substrate interface 1035
• film–substrate system 1060
• filtered cathodic arc (FCA) deposition
• --- 796–811
• filtering 246
• FIM (field ion microscope) 452
• --- – technique 464
• finite
• --- – difference (FD) 1063
• --- – element (FE) 1063
• --- – element analysis 778
• --- – element method (FEM) 764
4
• 1049
3
• --- – element modeling (FEM) 699
• --- – size effect 131
• first generation NEMS devices
• --- 247
• first principle calculation 396
• first principle simulation 434
• FKT
• --- (Frenkel–Kontorova–Tomlinson)
• --- – model 637
• flagellar motor rotation rate 750
• flap type valves 261
• flash memory 899
4
• 904
3
• flat punch 697
• flavin adenine dinucleotide (FAD)
• --- 303
• flavoenyzme glucose oxidase (Gox)
• --- 303
• flexible cantilever 332
• flexible electronic devices 193
• flip chip technique (FC) 1113
• floating catalyst method 55
• flocculation 555
• Flory temperature 561
• flow
• --- – activation energy 865
• --- – laminar 264
• --- – rate 269
• --- – resistance 266
• fluid mosaic membranes 293
• fluidic
• --- – devices 253
• --- – motion 270
• --- – sampling 253
• fluorescence
• --- – quantum yield 17
• --- – spectroscopy 127
• fluoride 397
4
• 398
3
• fluoride (111) surface 400
• fluorinated DLC 833
• fluorinated silane monolayer 190
• FM (frequency modulation)
• --- – AFM 464
• --- – AFM images 435
• --- – mode 461
• FMEA (failure mode effect analysis)
• --- 1101
• focused ion beam (FIB) 330
4
• 342
3
• --- 376
4
• 693
• 709
3
• foil cantilever 373
• Fokker–Planck 891
• folded protein structures 293
• force
• --- – advection 266
• --- – and displacement calibration 618
• --- – between macroscopic bodies 551,
• --- 556
• --- – between surfaces in liquids 554
• --- – calibration 610
4
• 632
3
• --- – calibration mode 526
• --- – calibration plot (FCP) 867
4
• 1003
3
• --- – cantilever-based 433
• --- – constant 618
• --- – curve 382
• --- – detection 348
• --- – distribution 1043
• --- – effective gradient 463
• --- – elastic 727
4
• 757
3
• --- – extension curve 744
• --- – induced unbinding 487
• --- – long-range 389
4
• 398
• 437
3
• --- – mapping 490
• --- – measurement 387
• --- – measuring techniques 546
4
• 547
3
• --- 549
• --- – modulation mode (FMM) 663
• --- – modulation technique 505
• --- – packing curves 758
• --- – repulsive 480
• --- – resolution 433
4
• 481
3
• --- – scales 750
• --- – sensing tip 358
• --- – sensitivity 481
• --- – sensor 332
4
• 389
• 635
3
• --- – spectroscopy (FS) 362
4
• 434
• 436
3
• --- 476
• --- – titration 621
• --- – undulation 545
4
• 564
3
• --- – velocity curve 752
• force field spectroscopy
• --- – three-dimensional 437
• force-displacement
• --- – curve 608
4
• 677
• 681
3
• --- – plot 607
• force-distance
• --- – calibration 848
• --- – curve 338
4
• 451
• 456
• 621
• 662
3
• --- 668
• --- – cycle 480
• --- – diagram 469
• form factor 900
4
• 907
3
• formate
• --- – covered surface 405
• --- – (HCOO?) 404
• formation of SAM 840
• four helical bundle proteins 316
• four-quadrants photodetectors 632
• Fowler–Nordheim
• --- – equation 1076
• --- – plot 1077
• --- – tunneling 905
• fractal
• --- – mobility 892
• --- – space 891
• --- – time 892
• --- – time dependence 893
• fracture 704
4
• 1124
• 1125
3
• --- – strength 1036
• --- – stress 767
• --- – surfaces 777
• --- – toughness 765
4
• 767
• 771
• 775
3
• --- 806
4
• 807
• 809
• 810
• 818
3
• --- – toughness measurement 1027,
• --- 1030
• Frank-Read source 703
• free carrier density 127
• free induction decay (FID) 305
• free surface energy 874
• freezing-melting transitions 588,
• --- 590
4
• 886
3
• Frenkel–Kontorova–Tomlinson
• --- (FKT) 637
• --- – elastic chain 727
• --- – model 725
• frequency
• --- – measurement precision 358
• --- – modulation (FM) 388
• --- – modulation (FM) mode 331
• --- – modulation AFM (FM-AFM) 389
• --- – modulation SFM (FM-SFM) 415
• --- – shift calculation 390
• --- – shift curve 463
4
• 464
3
• friction 325
4
• 498
• 507
• 515
• 606
3
2
• friction --- fusion bonding
3
• --- 618
4
• 631
• 717
• 793
• 844
• 983
3
• --- – anisotropy 642
• --- – characteristics 1009
• --- – coefficient 569
4
• 576
• 577
3
• --- 579
4
• 580
• 583
• 590
• 592
• 593
• 886
3
• --- load dependence 518
• --- – control 832
• --- – directionality effect 512
• --- – effect of humidity on 515
• --- – effect of tip on 515
• --- – experiments on atomic scale 638
• --- – global internal 667
• --- – image 640
• --- – kinetic 571
4
• 583
• 585
3
• --- 589
4
• 590
• 593
• 718
• 728
• 729
• 884
3
• --- 885
• --- – lateral 453
• --- – loop 637
4
• 638
• 649
3
• --- – macroscale 842
4
• 998
3
• --- – macroscopic 732
• --- – map 583
4
• 640
3
• --- – measurement 1033
• --- – measurement methods 342
• --- – measuring techniques 547
4
• 548
3
• --- 576
4
• 583
• 585
3
• --- – mechanism 510
4
• 723
• 843
• 848
3
• --- 871
4
• 1013
3
• --- – molecular dynamics simulation
• --- 651
• --- – performance 866
• --- – rate experiments 888
• --- – scale dependent 518
• --- – torque 1015
• --- – torque model 1014
• --- – total 726
• friction force 331
4
• 335
• 501
• 516
3
• --- 642
4
• 813
• 843
• 850
• 866
• 1004
3
• --- 1005
• --- – calibration 335
4
• 346
3
• --- – curve 363
• --- – decrease of 875
• --- – image 845
• --- – kinetic 722
• --- – magnitude 345
• --- – map 511
4
• 648
3
• --- – mapping 869
• --- – microscope (FFM) 325
4
• 498
• 499
3
• --- 841
• --- – microscopy (FFM) 537
4
• 631
• 632
3
• --- – Z-15 531
• --- – Z-DOL (BW) 531
• friction models
• --- – cobblestone model 572
4
• 574
3
• --- – Coulomb model 572
• --- – creep model 589
• --- – distance-dependent model 589
• --- – interlocking asperity model 572
• --- – phase transitions model 587
4
• 589
3
• --- 590
• --- – rate-and-state dependent 590
• --- – rough surfaces model 588
• --- – surface topology model 588
• --- – velocity-dependent model 587,
• --- 589
• fringe detector 1028
• fringing field 1068
• frustules 314
• fullerene 41
4
• 792
3
• fullerene-like structure 49
• fullerite 42
• functionalized nanotube 71
4
• 72
3
• fundamental resonant frequency
• --- 350
• fused silica 699
4
• 700
• 704
3
• --- – hardness 678
• fusion bonding 1114
2
1
• G
2
• G
• GaAs 248
• --- – stamp 191
• --- – wafers 192
• GaAs/AlGaAs
• --- – heterostructures 438
• --- – quantum well heterostructures
• --- 248
• gage marker 1028
• gain 465
• gain control circuit 389
• GaN nanowires 135
• gap stability 327
• GaP(110) 435
• gas separation 79
• gate potential
• --- – floating 905
• gauche defect 622
• Gaussian
• --- – fluctuation–dissipation relation
• --- 889
3
• 891
2
• --- – statistics 884
3
• 891
• 892
2
• Gd on Nb(110) 429
• Ge membranes 210
• gear
• --- – miniaturized 986
• generalized actuator 1064
• genetic engineering 1142
• genomic libraries 756
• genuine graphite 40
• geometric
• --- – interlocking 724
• --- – nonlinearity 1054
• --- – parameters 228
• --- – restrictions 249
• geometry effects in nanocontacts
• --- 646
• germanium 705
• g-factor 424
• giant magnetoresistance (GMR)
• --- 900
• gimballed microactuator design
• --- 959
• gimbal-mounted mirror 1097
• GIO (grazing impact oscillator) 911
• glass 619
• --- – bulk etching 255
• --- – frit bonding 1096
• --- – frit sealing 1093
• --- – transition 894
• --- – transition temperature 256
3
• 570
2
• --- 579
3
• 665
2
• glassiness 593
• glass-like behavior 891
• glass-to-glass direct bonding 271
• glass-to-silicon package 1127
• global internal friction 667
• glucose oxidase (GOD) 274
• GMR
• --- – giant magnetoresistance 900
• gold 330
• --- – coated tip 476
• --- – electrodes 27
• --- – film on polysilicon substrate 1051
• --- – nanowires 136
• --- – to-silicon eutectic bonding 1120
• Grahame equation 555
• grain
• --- – boundary 553
3
• 1035
2
• --- – boundary scattering 120
3
• 121
2
• --- – size 189
3
• 793
2
• graphene 40
3
• 63
• 667
2
• --- – defect 70
• graphite 415
3
• 417
• 507
• 638
• 651
2
• --- 792
• --- – cathode 798
• --- – pellet 47
• --- – surface 463
• graphite(0001) 427
• gratings 200
• grazing impact oscillator (GIO)
• --- 911
• Griffith fracture theory 778
• grinding 382
• growth
• --- – by pressure injection 102
• --- – of nanotubes 668
• guanine 10
• gyro
• --- – packaging 1100
• --- – test 1101
• gyroscope 230
3
• 232
• 1094
2
1
• H
2
• H
• H2O 425
• Hagen–Poiseuille equation 264
• half-generation precursor 287
• Hall resistance 438
• Hall–Petch behavior 710
• Hamaker constant 386
3
• 464
2
• --- 551
3
• 621
• 871
2
• Hamilton–Jacobi method 390
• hand-held biochip analyzer 274
• handling damage 1105
• haptenization 313
• haptenized nanostructure 313
• hard amorphous carbon coatings
• --- 795
• hard disk drive (HDD) 899–907,
• --- 952
• --- – head 901
• --- – performance 903
• hard disk drive technology
• --- – limits for 904
• hard-core or steric repulsion 545
• hardness 504
3
• 770
• 800
• 802
• 805
2
• --- 809
3
• 1024
2
• harmonic oscillator 454
• harpooning interaction 545
3
• 553
2
• HARPSS 166
3
• 169
• 170
2
• HDT (hexadecanethiol) 188
3
• 843
2
• --- 854
3
• 1006
• 1012
2
• head
• --- – displacement 953
• --- – gimbal assembly (HGA) 971
• --- – group 839
• --- – position 969
• health care 1141
• heat
• --- – curable prepolymer 186
• --- – dissipation 1122
• --- – pipe cooling 1123
• --- – transfer model 1119
• heater
• --- – cantilever 925
• --- – temperature 934
• heavy ion bombardment 441
• heavy metal toxicity 306
• helicity 41
• helper T-cell epitopes 311
• hermetic
• --- – packaging 1116
• --- – seal 1112
• herringbone
• --- – MWNT 44
3
• 60
• 76
2
• --- – texture 61
• Hershey–Chase experiment 755
• Hertz model 694
• Hertzian contact model 695
• Hertz-plus-offset relation 647
• heterodyne interferometer 351
• heterogeneous CCVD 53
• hetero-nanotube 68
• hexadecanethiol (HDT) 188
3
• 843
2
• --- 854
3
• 1006
• 1012
2
• HexSil 166
3
• 168
• 169
• 954
2
• --- – micro-molding process 962
• hierarchical arrangement 108
• hierarchy
• --- – of structures 747
• --- – of temporal processes 749
• high modulus elastomer 188
• high quality manufacturing 1087
• high reflectivity 136
• high speed scanning 467
• high temperature conditions 61
• high temperature superconductivity
• --- (HTCS) 419
3
• 431
• 440
2
• high volume production 1093
• high-aspect-ratio
• --- – MEMS (HARMEMS) 986
• --- – tips 376
3
• 377
2
• high-definition television 235
• higher orbital tip states 422
• highest resolution images 382
• highly ordered monolayers 187
• highly oriented pyrolytic graphite
• --- (HOPG) 337
3
• 507
2
• high-performance material 1141
• high-resolution
• --- – electrodes 196
• --- – FM-AFM 436
• --- – image 305
• --- – imaging 407
• --- – MR images 305
• --- – patterning 193
• --- – printing 186
• --- – spectroscopy 422
• --- – stamps 186
• --- – tips 379
• high-temperature operation STM
• --- 417
• Hill coefficient 488
• hinged cantilever 1034
• HiPCo process 56
• HiPCo technique 48
• h-MWNT (herringbone) 44
3
• 60
• 76
2
• homodyne interferometer 351
• honeycomb
• --- – chained trimer (HCT) 395
• --- – lattice 68
• --- – pattern 399
• Hooke’s law 433
3
• 450
• 454
• 469
2
• --- 480
• horizontal coupling 329
• host immune responses 311
• hot embossing 257
• HtBDC (hexa-tert-butyl-decacyclene)
• --- on Cu(110) 420
• HTCS (high temperature
• --- superconductivity) 419
3
• 431
• 440
2
• Huber-Mises 695
• human bone tissue 675
• humanity 1136
• humidity 645
• --- – effect 1105
• hybrid
• --- – carbon nanotube 68
• --- – manufacturing 1093
• --- – nanotube tip fabrication 380
• hybridization 41
3
• 397
2
• hydration forces 545–575
• hydration regulation 560
• hydrocarbon 53
3
• 57
• 835
2
• --- – chains 731
• --- – precusors 799
• --- – unsaturated 836
• hydrodynamic
• --- – forces 545
3
• 549
2
• --- – lubrication 729
3
• 884
2
• --- – radius 561
• hydrofluoric (HF) 832
• hydrogen 394
• --- – bonding 10
3
• 561
2
• --- – bonding force 622
• --- – concentrations 804
• --- – content 804
• --- – end group 841
• --- – flowrate 805
• --- – in carbon nanotube 77
• --- – sensor 137
• --- – storage 77
• --- – storage capacity 78
• --- – termination 394
• hydrogenated carbon 800
• hydrogenated coating 800
• hydrophilic
• --- – control 262
• --- – surfaces 544
3
• 560
2
• --- – tip 616
• hydrophobic
• --- – coating 1014
• --- – control 262
• --- – ferrocene 24
• --- – force 559
3
• 560
2
• --- – surfaces 544
3
• 560
2
• --- – tip 616
• hydroxyl polymethacrylamide
• --- (HPMA) 308
• hydroxylated surfaces 29
• hydroxylation 840
• hydroxyl-terminated
• --- perfluoropolyether 892
• Hysitron 676
• hysteresis 360
3
• 382
• 388
• 415
• 439
2
• --- 459
3
• 469
• 681
2
• --- – loop 333
3
• 363
2
1
• I
2
• I
• IB (ion beam)
• --- – coating 822
• IBD (ion beam deposition) 796,
• --- 798
3
• 815
2
• IC (integrated circuit) 226
3
• 988
2
• --- – industry 1112
• --- – package technology 1101
• --- – packaging 1112
• ideal nanobiological devices 282
• IFM (interfacial force microscope)
• --- 610
• IgG
• --- – repetitive 484
• image
• --- – effects 710
• --- – processing software 364
• --- – topography 331
3
• 406
2
• image projection 1100
• --- – system 1084
• imaging
• --- – bandwidth 339
• --- – electronic wave functions 427
• --- – signal noise 389
3
• 391
2
• --- – tools 111
• immunoassay
• --- – magnetic bead-based 271
• immunogenic synthetic
• --- nanomaterials 313
• immunoisolation 286
3
• 313
2
• immunosensor 271
• immunosuppression 313
• immunosurveillance 313
• impregnation method 54
• imprinted polymers 200
• in situ
• --- – environmental TEM chamber 112
• --- – screening 137
• --- – sharpening of the tips 328
• in vivo properties 676
• InAs 417
• InAs(110) 423
3
• 435
2
• incipient wetness impregnation 76
• incommensurate surface 725
3
• 731
2
• indentation 498
3
• 526
• 923
• 932
2
• --- 935
3
• 936
2
• --- – creep process 528
• --- – depth 527
3
• 678
• 806
• 809
• 998
2
• --- – fatigue damage 812
• --- – hardness 325
3
• 527
2
• --- – induced compression 812
• --- – modulus 679
• --- – size 527
3
• 924
2
• --- – size effect (ISE) 704
• --- – technique 765
• independent molecular operators
• --- 19
• indirect sensor-device coupling
• --- 304
• indirect transition in bismuth 129
• indium tin oxide (ITO) 193
• induction type EHD 262
• inductive heating 1119
• inelastic tunneling 419
• inertial sensor 229
• infected cell 756
• influence of humidity
• --- – on adhesion 850
• information technology 1139
3
• 1142
2
• initial contact 703
• injection type EHD 262
• ink
• --- – electronic 195
• ink jet printing 193
• inorganic-organic solar cells 136
• InP(110) 392
• in-phase signal 944
• in-plane
• --- – actuation 929
• --- – mechanical strain 188
• instability position 461
• instability, jump-to-position 388,
• --- 610
• instrumented suspension 967
• insulator 397
• insuline pump 269
• integrated
• --- – circuit (IC) 226
3
• 988
2
• --- – MEMS 259
3
• 1084
• 1092
2
• --- – MEMS accelerometer 1091
• --- – micromachining process 1117
• --- – silicon suspension 967
• --- – suspension 967
• --- – tip 341
3
• 373
2
• --- – vacuum sealing 1117
• Intel 915
• intellectual property protection
• --- 1137
• interaction
• --- – energy 757
• --- – force 434
3
• 757
2
• --- – potential 718
• interatomic
• --- – attractive force 344
• --- – bonding 393
• --- – force 332
• --- – force constants 387
• --- – interaction 1035
• --- – spring constant 332
• interbulk interactions 728
• intercalated MoS2 833
• intercellular adhesion molecule-1
• --- (ICAM-1) 489
• intercellular concentration 748
• intercept length 855
• interchain hydrogen bonding 621
• interchain interactions 484
• interconnect 900
• interconnect technology 1094
• interconnected operators 18
• interdiffusion 568
• interdigitation 568
• interface sensor components 302
• interfacial
• --- – chemistry 607
• --- – defects 813
• --- – energy (tension) see surface
• --- energy (tension)
• --- – force microscope (IFM) 610
• --- – friction see also boundary
• --- lubrication, 571
3
• 579
• 580
2
• --- 585
3
• 862
2
• --- – liquid structuring 888
• --- – potential 726
• --- – stress 819
• --- – structuring 888
• --- – wear 606
• interferometeric detection sensitivity
• --- 353
• interlocking macrocycles 26
• intermediate or mixed lubrication
• --- 569
3
• 570
• 582
• 583
2
• intermittent contact mode 373
3
• 460
2
• intermolecular communication 18
• intermolecular force 289
3
• 481
• 484
2
• --- 606
• internal friction 935
• internal stress 1025
3
• 1041
2
• intersymbol interference 947
• intertube distance 43
• intraband transitions 423
• intramolecular
• --- – forces 484
• --- – self-assembly 293
• intrinsic
• --- – adhesive force 832
• --- – damping 469
• --- – mean stress 1045
• --- – stress 804
• iodine 419
• iodobenzene 419
• ion
• --- – correlation forces 554
3
• 557
2
• --- – displacement 398
• --- – implantation 205
3
• 528
• 925
• 996
2
• --- – implanted silicon 997
• --- – plating techniques 795
• --- – source 798
• ion beam
• --- – deposition (IBD) 796
3
• 798
2
• --- – etching 248
• --- – sputtered carbon 798
• ion correlation forces 545
• ionic bond 545
• ionic strength 619
• Ising spin model 892
• isolated nanotubes 381
• isotropic etching 189
• isotropic layer 1050
• itinerant nanotube levels 425
• ITO (indium-tin-oxide) 195
• I–V characterization 116
3
• 124
2
1
• J
2
• J
• JKR (Johnson–Kendall–Roberts)
• --- – model 619
3
• 621
• 695
2
• --- – relation 646
• --- – theory 566
• Joule
• --- – dissipation 655
• --- – heating 439
• jump length distribution 889
• jump-to-contact 388
3
• 436
• 452
2
• junction area 132
3
• 135
2
1
• K
2
• K
• KBr 397
• KBr(100) 640
3
• 650
2
• KCl0.6Br0.4(001) surface 398
• Kelvin
• --- – equation 564
3
• 612
2
• --- – radius 613
3
• 614
2
• Kelvin probe force microscopy
• --- (KPFM) 407
3
• 503
2
• ketones 837
• key scale at bio-nano interface 746
• kidney exclusion limit 296
• kinesin 741
3
• 745
2
• kinetic
• --- – friction 571
3
• 583
• 585
2
• --- 589
3
• 590
• 593
• 718
• 728
• 729
• 884
2
• --- 885
• --- – friction force 722
• --- – friction ultralow 591
• --- – measurements 892
• --- – off-rate 487
3
• 488
2
• --- – processes 703
• --- – rate constant 482
3
• 486
2
• kinetics 883
• --- – of capillary formation 614
• Kirchoff hypothesis 1047
• knife-edge blocking 361
• Koanda effect 266
• KOH 330
• Kohlrausch
• --- – exponent 892
• --- – relaxation 884
• Kondo
• --- – effect 414
3
• 425
2
• --- – temperature 425
• K-shell EELS spectra 802
1
• L
2
• L
• L amino acid 291
• lab-on-a-chip 270
3
• 988
2
• --- – application 270
• --- – concept 253
• --- – disposable plastic 993
• --- – systems 265
• --- – technology 255
• lac repressor 754
• Lagrangian approach 1064
• Lamb waves 693
• laminar
• --- – flow 264
• --- – flow characteristics 266
• laminated n-channel transistor 196
• Landau
• --- – levels 122
3
• 415
• 438
2
• --- – quantization 424
• Langevin equation 891
3
• 892
2
• Langmuir–Blodgett (LB) 861
• --- – deposition 536
3
• 833
2
• --- – film
• --- (ethyl-2,3-dihydroxyoctadecanoate)
• --- 467
• --- – methodology 35
• Laplace
• --- – force 844
3
• 868
2
• --- – pressure 544
3
• 564
• 613
• 832
2
• --- – pressure force 616
• large angular deflection 1069
• large array of nanowires 109
• larger-scale systems 1136
• large-scale stick-slip motion 733
• Larmor frequency 305
• laser
• --- – ablation method 61
• --- – beam deflection method 453
• --- – deflection sensing 453
• --- – deflection technique 333
• --- – devices 46
• --- – interference lithography 186
• --- – vaporization method 61
• --- – welding 1119
• laser-to-fiber coupler 236
• lateral
• --- – accelerometer 231
• --- – contact stiffness 631
• --- – cracks 693
• --- – deflection 671
• --- – deflection signal 1016
• --- – displacement 669
• --- – force 632
3
• 643
• 669
• 718
• 1015
2
• --- – force calculation 354
• --- – force microscope (LFM) 325,
• --- 499
3
• 632
2
• --- – force microscopy (LFM) 187,
• --- 404
3
• 548
2
• --- – friction 453
• --- – resolution 328
3
• 331
• 477
• 500
2
• --- 606
3
• 663
2
• --- – resonator 1037
• --- – scanning range 929
• --- – spring constant 338
3
• 636
2
• --- – stiffness 362
3
• 376
• 649
2
• lattice
• --- – constant 725
• --- – imaging 332
• --- – vibration 726
• layer of resist 186
• layered structure 1045
• LCC (Leadless Chip Carrier) 1101
• leakage 1126
• --- – rate 263
• learning theory 1143
• length scale 722
3
• 747
2
• Lennard-Jones potential 436
3
• 457
2
• --- 719
3
• 730
2
• Lennard-Jonesium 727
• leukocyte function-associated
• --- antigen-1 (LFA-1) 489
• leveraged bending 1070
• levers 932
• lever-sample displacement 608
• levitated copper inductor 242
• Levy flight model 891
• LiF 397
• LiF(100) surface 652
• life-cycle costs 1137
• lifetime broadening 419
3
• 423
2
• lifetime-force relation 485
• Lifshitz theory 551
3
• 552
• 554
2
• lift mode 338
3
• 503
2
• LIGA 166
3
• 986
2
• --- – fabrication of MEMS 987
• --- – technique 765
• ligand concentration
• --- – effective 485
• ligand-receptor affinity 288
3
• 316
2
• ligand-receptor interaction 476
• light beam deflection galvanometer
• --- 353
• light emission 135
• light-emitting diode (LED) 132,
• --- 135
• limits for hard disk drive technology
• --- 904
• limits of biotechnology 281
• linear
• --- – creep model 890
• --- – fractional transformations (LFT)
• --- 975
• --- – friction–velocity dependence
• --- 889
• --- – quadratic Gaussian (LQG) 971
• --- – recording density 947
• --- – stress gradient 1045
• --- – variable differential transformers
• --- (LVDT) 361
• lipid 747
• lipid film 644
• liposome 742
• liquid
• --- – capillaries 612
• --- – capillary condensation 844
• --- – film meniscus 612
• --- – film thickness 537
3
• 885
2
• --- – helium 415
• --- – helium operation STM 417
• --- – lubricant 530
3
• 832
2
• --- – lubricated surfaces 572
3
• 576
• 578
2
• --- 587
• --- – mediated adhesion 832
• --- – nitrogen (LN) 416
• --- – perfluoropolyether (PFPE) 1003
• --- – solid interface 832
• --- – vapor interface 832
• load
• --- – critical 809
• load contribution to friction
• --- 572–574
• load dependence of friction 647
• load-carrying capacity 824
• load-controlled 610
• load-controlled friction 571
3
• 579
2
• load-displacement 528
• load-displacement curve 774
3
• 778
2
• --- 808
3
• 809
2
• loading curve 701
• loading rate 483
• local deformation 504
3
• 518
2
• local deformation of material 524
• local density of states (LDOS) 422
• local mechanical spectroscopy 664
• local pinning 727
• local shear stress 731
• local stiffness 362
3
• 1006
2
• localization
• --- – effect 122
3
• 134
2
• --- – theory 120
• localized heat bonding 1116–1120
• logarithmic-like friction–velocity
• --- behavior 885
• logic
• --- – devices 132
• --- – gates 14
3
• 15
• 132
2
• --- – protocols 15
• Lognormal distribution 1127
• London
• --- – dispersion interaction 545
3
• 550
2
• --- 552
• --- – penetration depth 431
3
• 440
2
• longitudinal
• --- – magnetoresistance 120
3
• 121
2
• --- – piezo-resistive effect 356
• --- – relaxation time (T1) 305
• long-range
• --- – attraction 550
3
• 562
2
• --- – elastic deformation 722
• --- – force 389
3
• 398
• 437
2
• --- – tip-molecule force 406
• long-term
• --- – measurements 414
• --- – memory 734
• --- – reliability 1126
• --- – stability 414
3
• 948
• 1102
2
• --- – test 1125
• loop-transfer recovery (LTR) 971
• loss modulus 702
• lot-to-lot variation 1072
• low cost gyroscope 1094
• low pressure chemical vapor
• --- deposition (LPCVD) 770
• low temperature
• --- – AFM/STM 332
• --- – condition 60
• --- – NC-AFM 402
• --- – SFM (LTSFM) 417
• low-cycle fatigue resistance 1032
• lower lasing threshold 135
• low-noise measurement 636
• low-temperature microscope
• --- operation 414
• low-temperature scanning tunneling
• --- spectroscopy (LTSTM) 419
• low-temperature SPM (LTSPM)
• --- 414
• LPCVD (low pressure chemical
• --- vapor deposition) 770
3
• 962
• 1034
2
• --- – nitride sealing 1117
• LTR
• --- – loop-transfer recovery 971
• LTSFM 417
• LTSTM 419
• lubricant 723
• --- – atoms 732
• --- – film 618
• --- – meniscus 864
• --- – spreading 864
• --- – thickness 885
• lubricated sliding 884
• lubrication 717
• --- – elastohydrodynamic 569
3
• 581
2
• --- 583
• --- – intermediate or mixed 569
3
• 570
2
• --- 582
3
• 583
2
• --- – method 995
• lumped
• --- – parameter 1065
• --- – parameter model 1063
3
• 1073
2
• Luttinger liquid 66
• LVDT
• --- – linear variable differential
• --- transformers 361
1
• M
2
• M
• macrocyclic polyether --- microelectronics
3
• macrocyclic po
• macromolecular
• --- – building block 747
• --- – interaction 475
• macromolecules as elastic rods 753
• macroscale friction 842
4
• 998
3
• macroscopic
• --- – building blocks 10
• --- – friction 732
• magnetic
• --- – actuators 259
• --- – applications 137
• --- – dipole interaction 403
• --- – disk 824
• --- – disk drive 794
• --- – information 138
• --- – Ni 431
• --- – ordering 129
• --- – particles
• --- self-ordered arrays 914
• --- – quantum flux 440
• --- – recording 911
4
• 922
3
• --- – storage device 795
4
• 831
3
• --- – tape 466
4
• 513
• 524
• 862
3
• --- – thin-film head 825
• --- – tip 465
• magnetic field
• --- – critical strength 122
• --- – length 122
• --- – microscopy (MFM) 114
• --- – triggering 299
• magnetic force 386
• --- – gradient 338
• --- – microscope (MFM) 338
• --- – microscopy (MFM) 326
4
• 439
3
• magnetic resonance
• --- – force microscopy (MRFM) 441
• --- – imaging (MRI) 304
• magnetically coated tip 490
• magnetohydrodynamic (MHD)
• --- pumping 261
• magnetomotive transduction 248
• magneto-optics 128
• magnetoresistance 120
• --- – longitudinal 120
4
• 121
3
• --- – transverse 121
• magnetoresistive RAM (MRAM)
• --- 899
4
• 906
3
• magnetostatic interaction 439
• magnetron sputtered carbon 799
• major histocompatibility complex
• --- (MHC) 311
• manganites 431
• manifold absolute pressure (MAP)
• --- 1091
• manipulation of individual atoms
• --- 325
• manually assembled MWNT tips
• --- 378
• manufacturability 1087
• manufacturing “risk” change 1093
• MAP sensor 1094
• marginal dimension 727
• martensite 665
• mask, high resolution stamp 186
• mass
• --- – effective 433
• mass of cantilever 331
• master–slave design 970
• material
• --- – for microfluidic devices 254
• --- – hardness 765
• --- – molecule-based 35
• --- – property variation 1072
• --- – structural 1028
• Matthiessen rule 120
• maximum likelihood estimator
• --- (MLE) 1126
• MBE (molecular beam epitaxy)
• --- 152
4
• 172
3
• MBI (multiple beam interferometry)
• --- 547
• mean time to failure (MTTF) 1127
• mean-field theory 556
• measurement of hardness 505
• mechanical
• --- – coupling 588
• --- – dissipation in nanoscopic device
• --- 631
• --- – instability 452
4
• 609
3
• --- – micropumps 260
• --- – protection 1112
• --- – relaxation 457
4
• 848
3
• --- – resonance 591
• --- – spectroscopy 664
• --- – stability 927
• --- – surface relaxations 468
• --- – wear 263
• mechanical properties 764
4
• 1023
3
• --- – characterization 1036
• --- – of bone 675
• --- – of carbon nanotubes 668
4
• 672
3
• --- – of DLC coating 813
• mechanically cut tips 382
• mechanics of cantilevers 347
• mechatronic device 952
• media flatness 910
• mediator molecules 304
• medium
• --- – effective 127
• medium theory
• --- – effective 127
• melting freezing transition 894
• melting point of SAM 853
• membrane
• --- – deflection method 1037
• --- – fabrication of 314
• --- – proteins 375
• membrane-embedded machine
• --- 741
• membranes as elastic media 754
• memory
• --- – cells and switches 116
• --- – distance 588
• --- – long-term 734
• MEMS 147
4
• 225
• 270
• 376
3
• --- 606
4
• 617
• 764
• 795
• 831
• 862
• 901
3
• --- 983
4
• 1023
• 1084
3
• --- – accelerometer manufacturing
• --- 1091
• --- – accelerometers 230
• --- – applications 985
• --- – capacitive switch 244
• --- – components 1011
• --- – device 247
4
• 987
• 990
3
• --- – device operation 994
• --- – fabrication 1111
• --- – fiber optic switching 238
• --- – industry 1093
• --- – integration 1102
• --- – manufacturing 1086
• --- – microactuator (MA) 952
4
• 971
3
• --- – mounting condition 1105
• --- – packaging 1111
4
• 1116
• 1128
3
• --- – packaging requirement 1112
• --- – passivation 1103
• --- – post-packaging 1114
4
• 1117
3
• --- – pressure sensor
• --- production 1090
• --- – production economics 1086
• --- – resonators 244
• --- – sensor 229
• --- – standardization 1086
• --- – storage device 907
• --- – structure 1112
• --- – surface 1104
• --- – switch, metal-to-metal 244
• --- – technology 233
4
• 237
• 249
• 1034
3
• --- – testing 1099
• --- – tribological problems 989
• --- – tunable capacitors 241
• --- – vacuum packaging 1117
• --- – wafer bonding 1095
• --- – wafer protection 1097
• MEMS/NEMS 530
• MEMS-based
• --- – microfluidic system 270
• --- – storage concept 904
• --- – storage device 922
• meniscus
• --- – bridge 831
4
• 876
3
• --- – force 516
4
• 871
3
• --- – of liquid 564
• mercaptopropyltrimethoxysilane
• --- (MPTMS) 191
• merocyanine 18
• mesoporous molecular sieves 102
• mesoscale osmotic actuator 269
• messenger RNA 750
• metabolic facility 282
• metal 103
• --- – catalyst 379
• --- – cavity packaging 1099
• --- – cluster agents 306
• --- – electroplating 255
• --- – evaporated (ME) tape 793
• --- – matrix composites 81
• --- – nanowires 69
• --- – oxide 397
4
• 400
3
• --- – particle catalyst 54
• --- – porphyrin (Cu-TBPP) 404
• --- – seed layer 966
• metal/insulator/metal (MIM) 197
• metal-catalyzed
• --- – chemical vapor deposition (CVD)
• --- 379
• --- – polymerization method 287
• metal-deposited Si surface 395
• metallic nanotube 34
• metallic SWNT 66
• metal-organic compound 56
• metal-particle (MP) tape 825
• metal-to-metal MEMS switch 244
• metastable lubricant systems 894
• methylene stretching mode 842
• methyl-terminated SAM 843
• Meyer’s law 708
• MFM sensitivity 338
• MgO tip 398
• MgO(001) surface 403
• Mg-terminated tip 398
• MHD (magnetohydrodynamic)
• --- pumping 261
• mica 102
4
• 337
• 615
• 619
• 640
• 888
3
• --- – films 100
• --- – muscovite 615
4
• 650
3
• --- – surface 641
• micelles 291
4
• 292
3
• micro/nanofabrication 147–150,
• --- 154
• microactuator 990
• --- – design 960
• --- – fabrication requirements 962
• --- – loop 972
• --- – shape 965
• microbially-derived antibiotics 293
• microcantilever 994
• microchannel 260
• microcomponent 989
• microcontact printing (?CP) 187,
• --- 834
• microcrystalline graphite 803
• microdevice 1026
• microdispenser 266
• microelectromechanical
• --- – motor 226
• --- – resonators 244
• --- – switch 244
• microelectronics 397
4
• 749
3
2
• micro-electro-rheological valve --- muscle contraction
3
• micro-electro-rh
• micro-engine 908
• microfabricated
• --- – cantilever 372
4
• 453
3
• --- – silicon cantilevers 387
• microfabrication 187
4
• 226
• 249
3
• --- – methods 285
• --- – techniques 285
4
• 372
3
• microfluidic 253
• --- – applications 255
• --- – channel 254
4
• 269
3
• --- – channels on silicon substrates 254
• --- – control 260
• --- – line 258
• --- – mixers 265
• --- – motherboards 270
• --- – multiplexer 268
• --- – network 268
• --- – passive 262
• --- – pumping 260
• --- – structures 256
• microfluidic device 269
• --- – disadvantages 270
• --- – materials for 254
• --- – passive 257
4
• 269
3
• microfluidic dispenser
• --- – passive 273
• microfriction 511
• micro-hinge technology 236
• microindentation 689
• micro-injection molding 273
• micromachined
• --- – high-Q resonators 245
• --- – inductors 242
• --- – notch 1032
• --- – silicon 310
• micromachining 147
4
• 150
• 151
3
• --- 154
4
• 155
• 159
• 166
• 170
3
• micromanipulator 988
• micromechanical
• --- – cantilevers 303
• --- – device 1084
• --- – structures 204
• micromirror 992
4
• 1040
3
• --- – array 237
• micromixer category 265
• micromotor 1016
• micron-sized channels 265
• micropatterned SAM 848
• micropipette aspiration 549
• micropump 260
• --- – passive 269
• micro-Raman spectroscopy 693
• microrelay 1062
• micro-resonators 244
• microscale
• --- – diffusion 265
• --- – friction 1006
4
• 1010
3
• --- – material removal 521
• --- – scratching 503
• --- – silicon gate 34
• --- – wear 503
4
• 520
3
• --- – wear test 1008
• microscanner 929
• microscope eigenfrequency 348
• microscopic friction 723
• microscopic origin of friction 889
• microscratch 813
• --- – test 675
• microscratching measurement
• --- 519
• microsensors 229
• microstrain gauge 1025
4
• 1034
3
• microstructure 1040
• microsystem 249
• micro-total analysis systems (?TAS)
• --- 257
• microtransformer 197
• microtriboapparatus 1011
• microtubule 740
• --- – bending 673
• --- – buckling 673
• microvalve 258
• --- – design 260
• microwear 813
4
• 819
3
• midplane 1046
• --- – curvature 1048
• --- – strain 1048
4
• 1049
3
• milligear system 989
• millipede 901
4
• 994
3
• --- – chip 931
• --- – system concept 921
4
• 923
• 943
3
• MIM capacitors 197
• MIMO design 971
• miniaturized
• --- – actuator 986
• --- – connector 986
• --- – gear 986
• --- – motor 986
• minimal detectable depression
• --- 374
• minimally invasive screening 285
• minimum-indentation pitch 937
• mirror/yoke assembly 1089
• misfit
• --- – angle 638
• --- – strain 1042
• mismatch
• --- – elastic 1051
4
• 1056
3
• mismatch of crystalline surfaces
• --- 566
4
• 567
• 593
3
• mitochondria 747
• mixed C-N nanotube 56
• mixed lubrication see intermediate
• --- or mixed lubrication, 884
• mixing performance 265
• MMA air bag sensor 1092
• Mn on Nb(110) 429
• Mn on W(110) 432
• m-nitrobenzylidene propanedinitrile
• --- (m-NBP) 916
• MOCVD (metallorganic chemical
• --- vapor deposition) 152
4
• 172
3
• mode coupling gratings 199
• model potentials 719
• modeling
• --- – at the nanoscale 752
• --- – mechanics of systems 752
• --- – tribological process 753
• modular multifunctionality 280
• modulation codes 946
• modulus
• --- – elastic 664
4
• 698
• 767
• 770
• 774
3
• --- 805
4
• 806
• 809
3
• modulus of elasticity 325
4
• 516
3
• molarity 749
• molding 186
• molecular
• --- – AND gate 17
• --- – assembly 26
• --- – beam epitaxy (MBE) 988
• --- – building blocks 12
4
• 35
• 747
3
• --- – chain 839
• --- – conduction band 33
• --- – conformation 864
• --- – cooperation 886
• --- – dynamics (MD) 476
4
• 718
• 749
3
• --- – dynamics (MD) calculation 639
• --- – dynamics simulation (MDS) 488,
• --- 622
4
• 631
• 651
• 753
3
• --- – engineering 281
• --- – interaction 879
• --- – interconverting state 15
• --- – logic gates 15
• --- – lubrication 885
• --- – machines 13
• --- – mobility 894
• --- – motor 13
4
• 673
• 740
3
• --- – NOT gate 16
• --- – placement by force microscopy
• --- 285
• --- – precursor 58
• --- – pump 741
4
• 748
3
• --- – recognition force microscopy
• --- (MRFM) 476
• --- – recognition force spectroscopy
• --- principles 482
• --- – resolution 421
• --- – reversible transformation 15
• --- – scale layer 833
• --- – shape 558
4
• 559
• 586
• 591
• 592
3
• --- – shuttle 14
• --- – spring 536
• --- – spring model 843
4
• 848
3
• --- – stiffness 849
• --- – switch 14
4
• 35
3
• --- – theory of lubricated friction 890
• --- – wires 289
• molecule-based
• --- – device 24
4
• 28
3
• --- – materials 35
• --- – switches 15
• moment of inertia 1030
• monodispersity 286
• monolayer 885
• --- – switches 28
• --- – thickness 855
• monolithic accelerometers 231
• monolithic high-Q MEMS 245
• Monte Carlo simulation 848
• MoO3 film 614
• Moore’s law 1142
• Morse potential 464
• MoS2 friction 640
4
• 641
• 668
3
• motion
• --- – unperturbed 390
• motor
• --- – actin-myosin 751
• --- – flagellar 750
• --- – micro 1016
• --- – microelectromechanical 226
• --- – miniaturized 986
• --- – molecular 13
4
• 752
3
• --- – myosin 741
4
• 745
3
• --- – oil 884
• --- – voice coil 952
4
• 969
3
• movement-constrained
• macromolecules 305
• moving media model 908
• moving-tips model 908
• MRAM (magnetoresistive RAM)
• --- 899–907
• --- – cell 906
• MRFM
• --- – magnetic resonance force
• microscopy 441
• MRI contrast agents 305
• MTTF (mean time to failure) 1126
• multicomponent nanodevice 288
• multi-input-multi-output (MIMO)
• --- 956
• multilayer 709
• --- – devices 197
• --- – Fe-N/Ti-N 675
• --- – structures 104
• --- – thin-film 825
• multimode AFM 338
• multiple beam interferometry (MBI)
• --- 547
• multiple cantilever 907
• multiple therapeutic nanodevice
• --- 294
• multiple-asperity contact 517
• multiplexed sensor arrays 304
• multiplication of dislocations 703
• multivalent targeting strategy 298
• multiwall carbon nanotubes
• --- (MWCNT) 43
4
• 289
• 342
• 376
3
• --- 667
4
• 727
3
• muscle contraction 740
2
• muscovite mica --- myosin motor
3
• muscovite mica
• --- ?-synthesis 974
• --- ?-synthesis controller design 975
• MWCNT
• --- – multiwall carbon nanotubes
• --- 43
4
• 289
• 342
• 376
• 667
• 727
3
• MWNT (multiwall nanotube) 64
• --- – based catalyst-support 76
• --- – bc (bamboo-concentric) 44
• --- – bh (bamboo-herringbone) 44
• --- – bunches 58
• --- – catalytically grown 673
• --- – composites
• MWNT-Al composite 81
• --- – flexural modulus 67
• --- – purified 378
• --- – surface area 64
• --- – tips
• manually assembled 378
• --- – Young’s modulus 669
• myosin motor 751
2
1
• N
2
• N
• N acceptors --- external 4
3
• N acceptors 10
• Na on Cu (111) 421
• NaCl 397
• --- – island on Cu(111) 655
• --- – islands 468
• --- – thin film on Cu(111) 398
• NaCl(001) 397
• NaCl(100) 641
4
• 648
3
• NaF 397
4
• 640
3
• NAND gate 15
• nanites 1146
• nanoasperity 515
4
• 695
3
• nanobeam 669
• --- – array 766
4
• 774
3
• nanobiological
• --- – applications 313
• --- – design 312
• --- – devices 281
• --- – vaccine design 312
• nanobiotechnological device 300
• nanobiotechnological therapeutic
• --- device 313
• nanochannel glass 100
4
• 102
3
• nanochemistry 984
• nanocluster 400
• nanocomposite
• --- – coating 833
• --- – materials 28
• nanocrystallites 800
• nanodeformation 864
4
• 880
3
• nanodevice 85
4
• 281
3
• --- – multiple therapeutic 294
• nanoelectrodes 32
• nanoelectromechanical systems
• --- (NEMS) 226
4
• 246
• 606
• 764
• 901
3
• --- 984
• nanoelectronic device 32
4
• 34
3
• nano-electronics 84
• nanofabrication 147
4
• 170
• 175
• 187
3
• --- 326
4
• 526
3
• --- – techniques 253
• nanofatigue 810
• nanofiber 44
4
• 53
3
• nanofilament 44
4
• 60
3
• nanogaps 31
• nanohardness 695
4
• 804
• 805
• 1000
3
• nanohelix 12
• nanoimprint 171
• nanoindentation 674
4
• 688
• 697
• 805
3
• --- 1024
• --- – curve 677
• --- – measurement 504
• nanoindenter 765
4
• 769
• 818
• 1028
3
• nanolubrication 883
• nanomachine 1147
• nanomachining 325
4
• 326
3
• --- – techniques 205
• nanomagnetism 431
• nanomania 1146
• nanomaterial 662
• nanomechanical Si beams 247
• nanometer resolution 186
• nanometer servo precision 979
• nano-objects 68
• nanoparticle 49
4
• 374
3
• --- – contrast agents 305
4
• 306
3
• nanoparticulate carriers 310
• nanophobia 1146
• nanoporous membranes 285
4
• 314
3
• --- – microfabrication 286
• nano-positioning 359
• nanorheology 584
• nanoscale
• --- – antimicrobials 293
• --- – architectural property 283
• --- – assemblers 1146
• --- – biomolecules 10
4
• 12
3
• --- – control of molecular events 310
• --- – data bit 909
• --- – drug delivery 291
• --- – electrodes 23
4
• 27
3
• --- – FET 117
• --- – film morphology 917
• --- – interventions 285
• --- – mechanical properties 661
4
• 662
3
• --- – molecular therapeutic device 308
• --- – molecules 35
• --- – Schottky barrier 34
• --- – supramolecular assembly 407
• --- – therapeutic device 281
4
• 315
3
• --- – therapeutic platforms 284
• --- – wear 518
• Nanoscope I 328
• nanoscratch 522
• --- – studies 765
• nanostructures 147
4
• 170
• 171
• 179
3
• --- – containing proteins 307
• --- – mechanical properties 764
4
• 1023
3
• nanoswitches 15
• nanotechnological
• --- – actions 755
• --- – therapy 307
• nanotechnology 280
4
• 918
• 1139
3
• --- – definition 1136
• --- – ethical issues 1136
• --- – in the living world 740
• --- – possible applications 1136
• --- – recommendations 1138
• --- – role of social sciences 1148
• --- – social issues 1136
• --- – unintended consequences 1143
• nanotherapeutic 280
4
• 288
• 303
3
• --- – contrast agents 304
4
• 310
3
• --- – delivery device 298
• --- – design paradigms 282
• --- – device application 307
• --- – device components 285
• --- – devices in oncology 307
• --- – drug delivery 311
• --- – triggering external stimuli 299
• --- – vaccines 312
• nanotransfer printing (nTP) 190
• nanotransistor 32
• nanotribology 717
4
• 862
3
• nanotube 12
4
• 105
• 133
3
• --- – AFM tips 379
• --- – buckling 377
• --- – chemistry 67
• --- – defects 47
• --- – functionalization of wall 72
• --- – functionalized 71
4
• 72
3
• --- – growth 45
• --- – length 382
• --- – morphology 49
• --- – nucleation 45
• --- – oxidation 72
• --- – resistance 34
• --- – strain 671
• --- – surface energy 380
• --- – tip fabrication 380
• --- – tips, surface growth 380
• --- – transistor 34
• --- – volume fraction 83
• --- – yield 49
4
• 59
3
• nanotube production 56
• --- – efficiency 49
• --- – electric-arc method 48
• --- – laser ablation 46
• --- – solar furnace 52
• --- – techniques 57
• nanotube-based
• --- – emitter 74
• --- – hybrid material 71
• --- – sensor 75
• --- – SPM tip 73
• nanotube-Co-MgO 81
• nanotube-containing
• --- – composite 82
• --- – electrical device 289
• nanotube-Fe/Co-MgAl2O4 81
• nanotube-Fe-Al2O3 81
• nanotube-polymer composite 83
• nano-tweezer 85
• nanowire 31
• --- – applications 131
4
• 138
3
• --- – metal 69
• --- – nucleation 110
• --- – photodetectors 135
• --- – semimetallic 118
• --- – stress-induced crystalline 107
• --- – superlattice 132
• --- – Zn 120
4
• 123
3
• --- – ZnO 135
• nanowire device
• --- – two-terminal 132
• naphthalene channel 21
• National Nanotechnology Initiative
• --- (NNI) 1137
• native oxide layer 868
• Nb superconductor 423
• NBIC convergence 1140
• NbSe2 431
4
• 649
3
• NC-AFM (noncontact atomic force
• --- microscopy) 397
4
• 433
3
• near-field
• --- – method 903
• --- – scanning optical microscopy
• --- (NSOM) 128
4
• 372
3
• --- – technique 434
• near-surface mechanical properties
• --- 665
• necrotic domains 307
• negative logic convention 26
• negative magnetoresistance 121
• neighbouring indents 678
• NEMS 831
4
• 983
• 988
• 1023
3
• --- – devices 246
• --- – nanoelectromechanical systems
• --- 226
4
• 246
• 606
• 764
• 901
• 984
3
• neocarzinostatin (NCS) 309
• nested-arc structure 680
• net electrostatic torque 1066
• net fluid transport 261
• newspaper
• --- – electronic 196
• Newton’s first law 454
• Newtonian flow 570
4
• 580
• 581
• 583
3
• Newton–Raphson method 753
• n-hexadecane 888
• N-hydroxysuccinimidyl (NHS) 478
• Ni(001) tip on Cu(100) 653
• Ni(111) tip on Cu(110) 653
• Ni, Co catalyst 47
• Ni/Y catalyst 49
• Ni2+-chelating 485
• nickel-iron permalloy 259
• Ni-Fe valve membrane 259
• NIH3T3 fibroblast cell 489
• NiO 402
4
• 417
3
• NiO(001) 397
4
• 400
• 402
3
• NiO(001) surface 403
• Ni-P
• --- – beam 785
• --- – cantilever 778
• --- – film 770
4
• 771
3
• --- – microbeam 777
4
• 785
3
• NiTi 665
• --- – transformation behavior 666
• nitrogenated carbon 800
• NMP (no moving part) valves 265
• noble metal surfaces 424
• n-octadecyltrichlorosilane
• --- (n-C18H37SiCl3, OTS) 616
4
• 842
3
• n-octadecyltrimethoxysilane (OTE)
• --- 615
• noise 387
4
• 391
• 453
3
• --- – 1/f 387
4
• 957
3
• --- – electronic 333
• --- – external 415
2
• performance 3 --- (n-C
3
• --- – performance 391
• --- – signal 941
• --- – source 355
• --- – vertical 391
• Nomarski-interferometer 352
• nonconducting film 798
• nonconductive
• --- – materials 404
• --- – sample 329
• --- – surface 462
• nonconforming contacts 890
• noncontact
• --- – dynamic force microscopy 654
• --- – friction 438
4
• 655
3
• --- – imaging 331
• --- – mode 373
4
• 388
• 909
3
• noncontact atomic force microscopy
• --- (NC-AFM) 374
4
• 385
• 391
• 393
3
• --- 397
4
• 404
• 654
3
• nondestructive contact-mode
• --- measurement 652
• nondimensional curvature 1051
• nonequilibrium interactions see
• --- dynamic interactions
• nonequilibrium simulations 720
• noninvasive device 283
• nonlinear
• --- – force 460
• --- – geometry effect 1058
• --- – I–V behavior 124
• --- – material behavior 1058
4
• 1059
3
• --- – optical property 129
• --- – spring 491
• --- – strain-displacement relation 1055
• nonliquidlike behavior 584
• nonmagnetic Zn 431
• non-Newtonian behavior 885
• non-Newtonian flow 570
4
• 581
• 583
3
• nonpolar group 838
• nonspherical tip 647
• nonsymmetrical passive valves 268
• nontherapeutic nanobiological device
• --- 283
• nonvolatile random access memories
• --- (NVRAM) 899–913
• nonwetting 560
• NOR gate 15
• normal friction 569
4
• 577
• 579
• 580
3
• normal load 721
4
• 866
3
• --- – external 867
• normalized frequency shift 463
• no-slip boundary condition 729
• NOT gate 15
• N-succinnimidyl-3-(Sacethylthio)
• --- propionate (SATP)
• --- 478
• NTA (nitrilotriacetate) - His6 478
• nTP (nanotransfer printing) 197
• nuclear weapon 1140
• nucleation of nanowires 110
• nucleic
• --- – acid (NA) 294
4
• 299
3
• --- – acid hybridization 294
4
• 300
3
• nucleotides 747
• n-undecyltrichlorosilane
• --- (n-C11H23SiCl3, UTS) 842
2
1
• O
2
• O
• O acceptors 10
• --- (OCN)? 398
• octamethylcyclotetrasiloxane 888
• ODD performance 903
• odd-even effect 621
• off-track error 958
• OH-terminated tip 398
• on-chip
• --- – actuator 1031
• --- – electronic detection 231
• --- – integration 210
• --- – microvalves 260
• --- – spiral inductors 242
• oncological nanotherapeutics 291
• one-dimensional quantum effect
• --- 115
• one-dimensional system 100
• open loop architecture 1093
• operation 387
• opsonized particle 296
• optical
• --- – absorption 129
• --- – applications 134
• --- – beam deflection 607
• --- – cavity 135
• --- – data switching 237
• --- – deflection systems 372
• --- – detector 331
• --- – disk drives (ODD) 899
3
• 900
2
• --- – gap behavior 127
• --- – head 336
• --- – head mount 337
• --- – integration 236
• --- – MEMS 233
• --- – output 16
• --- – property 126
3
• 127
2
• --- – reflection 127
• --- – switch 135
• --- – transmission 127
• --- – trap 480
• --- – tweezers (OT) 480
3
• 549
• 744
2
• optical lever 353
• --- – angular sensitivity 355
• --- – deflection method 362
• --- – optimal sensitivity 355
• optimal beam waist 355
• optimum sampling phase 946
• optoelectronic
• --- – components 198
• --- – module 236
• --- – switch 136
• OR
• --- – operation 23
• --- – operator 15
• order
• --- – in-plane 567
3
• 584
• 585
• 593
2
• --- – long-range 570
• --- – out-of-plane 557
3
• 567
• 570
2
• --- 584
3
• 585
• 591
2
• --- – parameter 570
3
• 586
2
• ordering nanowires 108
• organelles 281
• organic
• --- – compounds 835
• --- – device structure 917
• --- – film 916
• --- – inverter circuit 196
• --- – technology 916
• --- – transistor 193
3
• 196
2
• organics 915
• --- – data storage 916
• organized molecular arrays 23
• organometallic vapor phase epitaxy
• --- (OMVPE) 988
• Orowan strengthening 710
• orthogonal conjugation 295
3
• 296
2
• orthotropic Young’s modulus 1048
• oscillating tip 334
3
• 469
2
• oscillation
• --- – amplitude 389
3
• 453
• 454
• 457
• 461
2
• --- – loop 462
• oscillatory force 544
3
• 545
2
• --- 557
3
• 567
2
• osmosis response time 269
• osmotic
• --- – interactions 545
3
• 555
• 562
• 564
2
• --- – pressure 555
3
• 562
• 575
2
• --- – stress technique 549
• OTE (octadecyltrimethoxysilane)
• --- 615
• OTS (octadecyltrichlorsilane) 848,
• --- 1075
• OUM cell 906
• out-of-plane stiffness 959
• overall barrier height 887
• overdamped SFM system 891
• overdrive capability 1062
• overwriting mechanism 937
• Ovonyx 915
• Ovonyx Unified Memory (OUM)
• --- 906
• oxide layer 703
• --- – amorphous 106
• oxide-enhanced nanowire growth
• --- mechanism 107
• oxide-sharpened tips 375
• oxidized nanotube 72
• oxygen
• --- – content 826
• --- – sensor 274
1
• P
2
• P
• package level integration --- polydimethylsiloxane (PDMS)
3
• package level inte
• packaging 248
4
• 249
3
• --- – cap 1112
• --- – equipment 1099
• --- – induced thermal stress 1123
• --- – reliability 1125
• --- – uniform 1112
• packing density
• --- – chains 842
• palladium nanowires 137
• PAMAM (polyamido amine)
• --- dendrimer 286
4
• 287
3
• p-aminophenyl phosphate (PAPP)
• --- 271
• paper-like displays 193
• paraboloid load displacement 697
• paraffins 835
• parallel-plate
• --- – actuator 955
• --- – capacitor model 1064
• --- – sensing 957
• paramagnetic particles 305
• parasitic charging 1077
• particle
• --- – contamination 1098
• --- – control 1098
• --- – opsonized 296
• --- – track-etched mica films 103
• particle model
• --- – embedded 894
• Paschen curve 1076
• passive
• --- – check valves 262
• --- – linearization 361
• --- – microfluidic device 257
4
• 269
3
• --- – microfluidic dispenser 273
• --- – microfluidics 262
• --- – micromixers 265
• --- – micropump 269
• --- – microvalves 257
4
• 262
3
• --- – structure 1025
• --- – valve geometry 264
• patient-monitoring systems 274
• pattern of ink 186
• pattern transfer 191
• patterned
• --- – conductive substrate 110
• --- – film 1053
• --- – self-assembled monolayer (SAM)
• --- 188
• --- – silicon chip 25
• patterning 1075
• Pb on Ge(111) 428
• PbI2 filled SWNT 70
• PDP (2-pyridyldithiopropionyl) 478
• peak indentation load 810
• peapods 71
4
• 289
3
• PECVD (plasma enhanced chemical
• --- vapor deposition) 833
4
• 926
• 1009
3
• --- – carbon sample 800
• PEG (polyethylene glycol)
• --- – crosslinkers 479
• pegylated molecules 313
• Peierls instability 428
• per molecule adhesion force 620
• perfluorodecanoic acid (PFDA) 992
• perfluoropolyether (PFPE) 530
4
• 861
3
• perfluoropolyether Z-DOL 614
• performance of electromechanical
• --- actuator 1075
• performance parasitics 1098
• periodic
• --- – force 725
• --- – potential 637
4
• 891
3
• permanent dipole moment 407
• perpendicular scan 344
• persistence length 488
• perturbation approach 390
• perylene 404
• PES (photoemission spectroscopy)
• --- 956
• --- – generation 944
• --- – loop compensator 973
• PFPE (perfluoropolyether) 864,
• --- 1012
• --- – lubricant 862
4
• 868
• 1003
• 1016
3
• --- – OH 892
• pH of water environment 619
4
• 621
3
• pH sensor 137
• phage display 297
4
• 298
3
• pharmacoeconomics 285
• phase
• --- – angle image 530
• --- – breaking length 120
• --- – curve 458
• --- – images 470
• --- – lag spectrum 666
• --- – measurement 471
• --- – signal change 458
• --- – transformation 690
4
• 705
3
• phase change
• --- – material 915
• --- – medium 922
• --- – RAM (PC-RAM) 899
4
• 906
3
• phenol 837
• phenoxy-centered HOMOs 26
• phonon
• --- – confinement effects 125
4
• 127
• 131
3
• --- – excitation 468
• --- – scattering 120
• phosphorus-doped polysilicon
• --- 206
• photoacid 19
• photoactive
• --- – fragments 14
• --- – solids 22
• --- – stopper 14
• photo-conductance 128
• photo-crosslinker 478
• photodetector sensitivity 766
• photoemission spectroscopy (PES)
• --- 423
• photogenerated hole 30
• photoinduced electron transfer 16,
• --- 17
• photoinduced proton transfer 19
• photolithography 285
• --- – near-field conformal 187
• --- – proximity mode 186
• photolithography patterns 186
• photo-luminescence (PL) 127
4
• 135
3
• --- – optical imaging 128
• photoresist 188
4
• 190
• 1095
• 1121
3
• photothermal effect 465
• physical properties of nanowires
• --- 110
• physical vapor deposition 104
• physisorbed protein layer 476
• physisorption 861
• pick-up
• --- – SWNT tips 382
• --- – tip method 381
• pico-slider 960
• piezo
• --- – ceramic material 360
• --- – effect 359
• --- – element 461
• --- – excitation 454
• --- – hysteresis 415
• --- – relaxation 415
• --- – stacks 361
• --- – tube 359
• piezoelectric
• --- – actuation 259
• --- – actuator 908
• --- – drive 327
• --- – leg 636
• --- – positioning elements 414
• --- – scanner 372
4
• 415
• 676
3
• piezoresistive
• --- – cantilever 355
• --- – coefficients 356
• --- – detection 355
4
• 387
3
• --- – pressure sensor 1089
• --- – sensing 958
• --- – sensor 227
• piezoscanner 363
4
• 382
3
• piezotranslator 363
• piezotube calibration 329
• pigment particles 195
• pile-up, nanoindent 693
4
• 699
• 700
3
• --- 709
4
• 711
3
• --- – characteristic 935
• piling-up behavior 674
• pilot signal 945
• pinning 441
• --- – forces 727
• pin-on-disk tribotester 841
• PL (photoluminescence) NSOM
• --- imaging 135
• plane-to-plane separation 12
• plasma
• --- – etch 286
• --- – frequency 127
• --- – resonance 127
• plasma enhanced chemical vapor
• --- deposition (PECVD) 197
4
• 339
3
• --- 770
4
• 795
• 799
3
• plasminogen activator (PA) 302
• plasmon mode 421
• plastic
• --- – asperity model 884
• --- – circuit 193
• --- – contact regime 517
• --- – deformation 522
4
• 728
• 812
• 854
3
• --- – electronics 197
• --- – fluidic chips 273
• --- – large area circuit 194
• --- – packaging 1099
• plasticity 1060
• platelet nanofiber 60
• platform 929
• --- – fabrication process 930
• platinum-iridium 330
• --- – tip 29
• PMMA (poly(methyl methacrylate))
• --- 247
4
• 257
• 671
• 924
• 933
• 936
• 994
3
• p-n
• --- – diodes 116
• --- – junction diode 132
• --- – junctions 132
4
• 135
3
• pneumatic
• --- – actuation 258
• --- – damping 418
• p-nitrophenolate 19
• point probes 688
• Poisseuille flow 885
• Poisson statistics 620
• Poisson’s ratio 698
4
• 1047
3
• polar
• --- – group 838
• --- – lubricant 832
4
• 861
3
• polarization dependence 129
• polishing 793
4
• 1000
3
• poly(amido) amine (PAMAM)
• --- dendrimer 286
• poly(ethylene glycol) (PEG) 477
• poly(ethyleneterephthalate) (PET)
• --- 192
• poly(methyl methacrylate) (PMMA)
• --- 247
4
• 257
• 671
• 924
• 933
• 936
• 994
3
• polyaromatic shells 63
• polycarbonate (PC) 257
• polycrystalline
• --- – films 210
• --- – graphite 801
• --- – Si 226
• --- – SiGe 210
• polydimethylsiloxane (PDMS) 187,
2
• polydimethylsiloxane (PDMS) --- tube scanner 32
3
• --- 834
• polyethylene (PE) 257
• polyethylene co-propylene 886
• polyethylene terephthalate (PET)
• --- 524
• poly-Ge
• --- – mechanical properties 210
• polymer 255
4
• 610
• 664
• 910
3
• --- – blend 471
4
• 662
3
• --- – brush 563
4
• 575
• 581
3
• --- – chemistry 286
4
• 291
3
• --- – conjugation (pegylation) 296
• --- – fluids 892
• --- – intermediates 287
• --- – matrix composites 82
• --- – medium 932
• --- – melt 886
• --- – membranes 103
• --- – microfabrication techniques 255
• --- – microstructures 257
• --- – mushroom 562
• --- – nanojunction 32
• --- – properties 263
• --- – therapeutics 307
• --- – transparent microcapsules 195
• polymeric
• --- – liquids (melts) 561
4
• 581
• 583
3
• --- – magnetic tape 526
• polypeptides 10
• polypropylene 404
4
• 471
3
• polysilicon 963
4
• 967
• 1010
• 1040
3
• --- – beam 1044
• --- – fatigue 1036
• --- – film 229
4
• 995
• 1027
3
• --- – fracture strength 1036
• --- – fracture toughness 1035
• --- – friction 1036
• --- – layer 263
• --- – mechanical properties 1034
• --- – MEMS 206
• --- – microstructure 1035
• --- – residual stress 1034
• --- – resonators 245
• --- – strip 245
• --- – surface micromachining 210
• --- – Young’s modulus 1035
• polystyrene (PS) 257
4
• 936
3
• polysulfone 936
• polytetrafluoroethylene (PTFE)
• --- 639
• polyurethane 471
• poor mixing 889
• pop-ins 690
• pop-outs 690
• population explosion 1141
• porous
• --- – silica or alumina 120
• --- – vycor glass 102
• position
• --- – accuracy 363
• --- – error 972
• --- – error signal (PES) 943
4
• 968
3
• --- – sensing resolution 957
• positioning 109
• positive logic convention 18
4
• 26
3
• post-packaging process 1118
• potential barrier 887
• potential energy
• --- – total 720
• power dissipation 237
4
• 470
• 654
3
• power to weight ratio 752
• PQ design method 970
• Prandtl–Tomlinson model 725–727
• pre-crack length 1027
• precursor 56
4
• 69
• 70
3
• --- – gases 210
• preferential flow direction 261
• preparation improvements 54
• pressure 871
• --- – injection 104
• pressure sensor 227
• --- – fabrication process 1090
• --- – packaging 1099
• pressure-induced phase
• --- reconstruction 888
• primary minimum adhesion 544,
• --- 555
4
• 559
3
• printed
• --- – coil 197
• --- – DFB resonator 200
• probability density functions 891
• probe
• --- – FIB-milled 342
• probe storage 901
4
• 907
• 908
3
• --- – data organization 909
• --- – operating parameters 909
• probe tip 372
• --- – characterization 611
• --- – performance 374
• probe-sample distance 457
4
• 462
3
• probe-surface distance 455
• process
• --- – control 1088
• --- – flow 1088
• --- – gas 799
• process coherence volume 887
• processing conditions 44
• prodrugs 298
• product architecture 1088
• production efficiency 47
• programmable microfluidic systems
• --- (sPROMs) 266
• programmed assembler 1146
• projection mode photolithography
• --- 186
• propagation of cracks 524
• properties of a coating 795
• protection of sliding surface 831
• protein 477
• --- – bioactivity 294
• --- – coupled to nanomaterials 294
• --- – folding 293
• --- – primary structure 293
• --- – secondary structure 293
• --- – synthetic chemistry 294
• --- – tertiary structure 293
• protofilament 673
• prototyping of biological nanodevices
• --- 282
• protrusion force 545
4
• 564
3
• P-selectin glycoprotein ligand-1
• --- (PSGL-1) 488
• PSG (phosphorus-doped glass)
• --- 1117
• Pt alloy tip 330
• PTCDA 404
• PTFE (polytetrafluoroethylene)
• --- – coated Si-tip 640
• --- – film 833
• Pt-Ir
• --- – tip 330
• --- – wire cantilever 912
• pull-hold-release cycle 485
• pull-in 1072
• --- – angle 1068
• --- – charge 1064
• --- – instability 956
• --- – voltage 1062
4
• 1064
• 1067
• 1068
3
• --- 1071
4
• 1075
3
• pull-off force see adhesion force,
• --- 608
4
• 614
• 615
• 617
• 635
• 864
3
• pulse-etching 379
• pumping chamber 261
• purified MWNT 378
• pyramidal
• --- – AFM tip 615
• --- – etch 373
• pyrazoline 16
• pyrolysis of hydrocarbons 59
• pyrolytic method 58
• PZT (led zirconate titanate)
• --- – actuated suspensions 967
• --- – scanner 500
• --- – tube scanner 328
4
• 334
3
2
1
• Q
2
• Q
• Q-Control 464
3
• 465
2
• Q-factor 388
3
• 436
• 455
• 1126
2
• quad photodetector 334
• quadrant detector 354
• quadrature signal 943–945
• quality factor Q 339
3
• 348
• 389
• 454
2
• --- 911
• quality system 1101
• quantization energy 117
• quantum
• --- – corrals 427
• --- – dot 134
3
• 172
• 173
2
• --- – effects 126
3
• 134
2
• --- – Hall regime 438
• --- – limit for the thermal conductance
• --- 125
• --- – subbands 116
• --- – well 421
• --- – wire superlattices 123
• --- – yield 16
• quantum confinement 99
3
• 126
• 127
2
• --- 129
• --- – effect 116
3
• 135
• 138
2
• quantum size
• --- – effect 118
3
• 134
2
• --- – regimes 116
• quantum-confined structures 133
• quartz-crystal microbalance (QCM)
• --- 717
• quasi-optical experiment 421
• quasi-static
• --- – bending test 775
3
• 777
2
• --- – mode 388
• --- – strain rate 677
1
• R
2
• R
• radial cracking 808
• radio-frequency (RF) MEMS 239
• radiotherapy 307
• radius of gyration 561
• Raleigh’s method 348
• Raman
• --- – spectra 131
3
• 802
2
• --- – spectroscopy 800
• ramped creep model 890
• random access memory (RAM) 28
• random access time 900
• random force 891
• randomly oriented polysilicon 1035
• rapid thermal processing (RTP)
• --- 1118
• raster scan 901
• Rayleigh wave 692
• Rayleigh–Ritz method 1071
• RbBr 397
• RC-oscillators 358
• reaction kinetics 483
• reactive
• --- – lubrication 892
• --- – sealing 1114
• --- – spreading 189
• reactive ion etching (RIE) 205
3
• 247
2
• --- 254
• read
• --- – channel 939
• --- – time 908
• readback
• --- – rates 932
• --- – signal 940
3
• 941
2
• readout
• --- – electronics 354
• --- – signal 944
• receptor binding 295
• receptor-ligand
• --- – bond 482
• --- – interaction 484
3
• 545
2
• --- – unbinding 483
• --- – unbinding force 476
• receptor-mediated uptake of synthetic
• --- nanomaterial 296
• recognition force microscopy (RFM)
• --- 476
• recognition force spectroscopy (RFS)
• --- 484
• recognition imaging 489
• recombinant protein therapeutics
• --- 285
• rectangular cantilever 339
3
• 610
• 656
2
• rectifying properties 132
• recursive least square algorithm
• --- (RLS) 974
• reduced modulus 690
• reflection interference contrast
• --- microscopy (RICM) 550
• reflectivity 129
• relative humidity (RH) 613
• --- – effects of 533
3
• 873
• 1004
2
• relative position error signal (RPES)
• --- 956
• relaxation
• --- – mechanical 457
3
• 848
2
• relaxation time 570
3
• 583
• 587
2
• --- 588
3
• 593
• 894
2
• relaxation time (T1)
• --- – longitudinal 305
• relaxation time (T2)
• --- – transverse 305
• release
• --- – long-term of drugs 994
• --- – stiction 1095
• --- – voltage 1062
• reliability 831
• --- – long-term 1126
• --- – ofMEMS 995
• --- – testing 1125
• relief on a surface 186
• remanence 137
• remote detection system 354
• removable disk 901
• repetitive IgG 484
• replica molding 833
• repulsive force 480
• residual
• --- – film stress 1023
• --- – stress 692
3
• 699
• 709
• 804
• 809
2
• --- 812
• --- – thickness 855
• resistive micro-heater 1119
• resolution 233
3
• 374
2
• --- – vertical 331
• resonance
• --- – curve detection 339
• --- – frequency 454
• --- – mechanical 591
• resonant
• --- – enhancement effects 131
• --- – frequency 373
• Resovist 306
• response time 467
• rest time 869
• retardation effect 550
3
• 552
2
• reticuloendothelial system (RES)
• --- 296
• retractive slips 885
• Reynolds hydrodynamic theory of
• --- lubrication 885
• RF magnetron sputtering 795
• rheological
• --- – characterization 865
• --- – model 469
3
• 664
2
• rhombhedral R-8 706
• rigid
• --- – biphenyl chain 853
• --- – disk drive 862
3
• 869
2
• --- – surface asperities 723
• Ritz procedure 1055
• RLL (run-length-limited) code 947
• RMS roughness 1010
• RNA polymerase 747
• robust manufacturing 1087
• rolling friction 552
3
• 568
2
• root mean square 433
• ropes (SWNT) 66
• rotary microactuator 958
3
• 993
2
• rotating cylinder 907
• rotating strain gauge 1026
• rotaxane 13
• rough macroscopic contact 885
• roughness 558
3
• 559
• 566
• 594
2
• RTP (rapid thermal processing)
• --- MEMS vacuum packaging 1119
• Ru(II)-trisbipyridine 13
• rule of mixtures 708
3
• 709
2
• run-length-limited (RLL) 947
• rupture forces 488
1
• S
2
• S
• sacrificial film layers --- cantilever 3
3
• sacrificial film
• sales volume 1093
• SAM (self-assembled monolayer)
• --- 165
4
• 176
• 178
• 622
• 1088
3
• --- – coating 1075
• --- – melting point of 853
• --- – modified surface 620
• sample holder 416
• sandwich immunoassays 270
• sandwiched molecules 26
• saturated calomel electrode 24
• saturated hydrocarbons 835
• scale-dependent surface tension 614
• scaling factor 975
• scan
• --- – area 335
• --- – direction 345
• --- – frequency 335
• --- – head 417
• --- – range 359
4
• 360
3
• --- – rate 329
• --- – size 337
• --- – speed 360
• scanner, piezo 436
• scanning
• --- – acoustic microscopy (SAM) 663,
• --- 692
• --- – capacitance microscopy (SCM)
• --- 326
• --- – chemical potential microscopy
• --- (SCPM) 326
• --- – electrochemical microscopy
• --- (SEcM) 326
• --- – electron microscope (SEM) 110,
• --- 373
4
• 521
3
• --- – electrostatic force microscopy
• --- (SEFM) 326
• --- – head 328
• --- – ion conductance microscopy
• --- (SICM) 326
• --- – Kelvin probe microscopy (SKPM)
• --- 326
• --- – lateral range 929
• --- – local-acceleration microscopy
• --- (SLAM) 663
• --- – magnetic microscopy (SMM) 326
• --- – nanoindentation (SN) 674
• --- – nanoindenter 662
• --- – near field optical microscopy
• --- (SNOM) 326
• --- – polarization force microscopy
• --- (SPFM) 615
• --- – speed 335
• --- – system 359
• --- – thermal microscopy (SThM) 114,
• --- 326
• --- – tunneling microscope (STM) 385,
• --- 396
4
• 450
• 498
• 922
3
• --- – tunneling microscopy (STM) 114,
• --- 325
4
• 371
• 382
• 397
• 899
3
• --- – tunneling probe 114
• --- – velocity 519
• scanning force
• --- – acoustic microscopy (SFAM) 326
• --- – microscopy (SFM) 326
4
• 433
• 663
3
• --- 884
• --- – spectroscopy (SFS) 433
• scanning probe
• --- – lithography 186
• --- – methods 606
• --- – microscope (SPM) 326
• --- – microscopy (SPM) 371
4
• 385
• 612
3
• --- 663
4
• 899
3
• schematic diagram of T-SLAM 663
• Schottky diode 132
• scission 622
• scope of therapeutic nanodevices
• --- 285
• scratch
• --- – critical load 824
• --- – damage mechanism 818
4
• 819
3
• --- – depth 771
4
• 773
• 1000
3
• --- – depth profile 773
• --- – drive actuator 1031
• --- – profile 519
• --- – resistance 765
4
• 771
• 853
• 1001
3
• --- – test 520
4
• 814
3
• scratch-induced damage 813
• scratching measurement 325
• SCREAM 161
• screen printing 193
• sealing 1112
• second anodization 100
• secondary signaling drug delivery
• --- 301
• Seebeck coefficient 123
4
• 133
3
• seek
• --- – control 976
• --- – time 901
• selected area electron diffraction
• --- (SAED) 111
• selective electrodeposition 108
• self-actuation voltage 1062
• self-aligning optical system 236
• self-assembled
• --- – growth 420
• --- – microscopic vesicles 834
• --- – monolayers (SAMs) 27
4
• 165
• 176
3
• --- 187
4
• 476
• 536
• 606
• 618
• 703
• 833
3
• --- 839
4
• 861
• 1003
• 1004
3
• --- – nanoparticles 312
• --- – nanotube bunches 58
• --- – structures 291
4
• 310
3
• self-assembled monolayer (SAM)
• --- – patterned 188
• self-assembly 131
4
• 147
• 170
• 173
3
• --- 176
4
• 178
• 179
• 288
3
• --- – in biological systems 740
• --- – of nanostructures 289
• --- – of organic layers 23
• self-enhancing instability 458
• self-excitation
• --- – modes 461
• --- – scheme 464
• self-lubrication 652
4
• 653
3
• self-regulation of a therapeutic device
• --- 302
• self-replicating nanobot 1146
• self-tuning control 974
4
• 976
3
• semibiological nanodevices 281
• semiconductor 103
4
• 391
3
• --- – economics 1086
• --- – quantum dots 428
• --- – surface 392
• --- – SWNT 74
4
• 85
3
• semimetallic nanowire 118
• semimetal–semiconductor transition
• --- 118
4
• 123
3
• sensing
• --- – channel 303
• --- – element 227
• --- – modalities of therapeutic
• --- nanotechnology 302
• sensing devices
• --- – biological 137
• --- – chemical 137
• sensitivity 356
4
• 357
• 390
• 467
• 479
3
• --- 633
4
• 972
3
• sensitizer 30
• sensor 233
• --- – and effector communication
• --- 283
• --- – applications 117
• --- – noise 975
• --- – systems 302
• --- – transducer interface 304
• sequential logic circuits 20
• sequential microfluidic manipulation
• --- 268
• servo
• --- – demodulation 945
• --- – field 943
• --- – loop 943
• --- – self-writing 945
• servo control design 968
• sessile-drop 832
• SFA (surface forces apparatus) 884,
• --- 894
4
• 1011
3
• --- – measurement 613
• SFM (scanning force microscope)
• --- 884
4
• 888
• 890
• 894
3
• --- – shear force experiments 893
• shallow indentation measurement
• --- 679
• shape memory alloys (SMA) 260
• sharpened metal wire tip 382
• shear
• --- – energy 887
• --- – force see kinetic friction, static
• --- friction
• --- – melting 570
4
• 586
3
• --- – modulus 633
4
• 933
3
• --- – rate 866
• --- – strength 646
• --- – stress 850
4
• 887
3
• --- – thinning 581
4
• 583
• 584
• 589
3
• shear flow
• --- – damping 1073
• --- – detachment (SFD) 479
• shear stress
• --- – critical 571
4
• 572
• 577
• 585
• 586
3
• --- – effective 648
• shearing force 848
• shearing interface 721
• shear-melting transitions 734
• SH-group 476
• short-cut carbon nanotubes 428
• short-range
• --- – chemical force 437
4
• 464
3
• --- – chemical interaction 402
• --- – contribution 386
• --- – electrostatic attraction 399
• --- – electrostatic interaction 398
• --- – energy dissipation 468
• --- – interatomic force 455
• --- – magnetic interaction 397
4
• 402
3
• --- 403
• shot noise 355
• Shubnikov–de Haas quantum
• --- oscillatory effect 122
• shuttle
• --- – displacement 957
• --- – finger 956
• Si 373
4
• 375
• 619
3
• --- – adatom 393
• --- – cantilever 373
4
• 458
• 465
3
• --- – MEMS 247
4
• 985
3
• --- – nanobeam 773
4
• 781
• 785
3
• --- – stamp 190
• --- – tip 374
4
• 392
3
• --- – trimer 395
• --- – wafer 373
4
• 459
• 619
3
• Si(001)2?1 394
• Si(001)2?1-H surface 394
• Si(100) 515
4
• 520
• 614
• 818
• 820
3
• --- 862
4
• 867
• 875
• 877
• 878
• 995
3
• --- 1012
• --- – wafer 863
• Si(100)2?1:H monohydride 393
• Si(111) 519
4
• 527
• 848
• 850
• 999
3
• Si(111) surface 404
• Si(111)v3?v3-Ag 395
4
• 396
3
• Si(111)(7?7) 434
4
• 468
• 640
3
• Si(111)(7?7) surface 389
4
• 397
3
• --- 462
4
• 639
3
• Si(OH)4 film 1013
• Si3N4 375
4
• 501
• 619
3
• --- – based tip 619
• --- – cantilever 373
2
• layer 3
3
• 3
2
3
• --- – layer 373
• --- – tip 341
4
• 374
• 531
• 841
• 848
• 866
3
• --- 871
4
• 880
3
• Si-Ag covalent bond 397
• Si-based devices 764
• SiC 995
• --- – bulk properties 995
• --- – film 770
• signal
• --- – distribution 1112
• --- – transduction 20
• silane (SiH4) 206
• silica
• --- – thermally grown 840
• silicon 332
4
• 356
• 388
• 610
• 693
3
• --- 705
4
• 1111
3
• --- – AFM tip 478
• --- – cantilever 387
4
• 633
3
• --- – chemistry 478
• --- – crystalline 254
• --- – dioxide (SiO2) 254
• --- – dioxide layer 31
4
• 33
3
• --- – FET 303
• --- – fractures 777
• --- – fusion 1118
• --- – grain 1035
• --- – membrane 263
• --- – MEMS 1095
• --- – micromachining 227
• --- – micromotor 866
• --- – oxide 106
4
• 477
3
• --- – surface 477
• --- – tip 392
4
• 434
• 463
• 635
3
• --- – wafer 25
4
• 27
• 186
• 189
• 228
• 286
3
• --- 453
4
• 614
• 930
3
• silicon nitride (Si3N4) 254
4
• 332
3
• --- 477
4
• 610
• 615
• 913
• 964
• 968
3
• --- – cantilever 372
• --- – layer 1117
• --- – tip 375
4
• 635
3
• silicon-based MEMS sensor 229
• silicon-based mold masters 255
• silicon-on-insulator (SOI) 205
4
• 241
3
• --- 964
• --- – substrates 247
• silicon-only wafer 965
• silicon-on-silicon contact 1012
• silicon-silicon bonding 1096
• silicon-terminated tip 435
• silicon-to-glass fusion bonding
• --- 1120
• siloxane 833
• simultaneous imaging 397
• --- – of a TiO2(110) surface 401
• single asperity 646
• --- – AFM tip 868
• --- – contact 517
4
• 1012
3
• --- – size of 722
• single bond 622
• single crystal
• --- – aluminum (100) 522
• --- – nanowires 104
• --- – Si(100) 770
4
• 862
3
• --- – silicon 504
4
• 964
• 995
• 1024
3
• --- – silicon cantilever 341
4
• 611
3
• --- – wafers 204
• single crystalline iron 675
• single domain magnetic 138
• single magnetic flux quantum 122
• single molecular motor 480
• single molecule
• --- – assays 743
• --- – biology 743
• --- – detection 477
• --- – experiment 760
• --- – studies 485
• single particle model 894
• single point sensor 1091
• single protein therapeutics 281
• single receptor-ligand pair 480
• single stranded DNA (ssDNA) 746
• single-input-multi-output (SIMO)
• --- 956
• single-input-single-output (SISO)
• --- 969
• single-layer
• --- – beam 1044
• --- – film 1050
• single-particle wave function 422
• single-stranded nucleic acid molecule
• --- (SSNA) 302
• single-wall carbon nanotube
• --- (SWCNT) 34
4
• 40
• 289
• 315
• 342
3
• --- 376
4
• 668
3
• single-wall nanocapsule 49
• singularity in joint density of states
• --- 134
• sink-in 693
4
• 699
• 700
• 709
• 711
3
• --- – behavior 674
• sintering 553
• SiO2 54
4
• 373
• 375
• 531
• 615
3
• --- – film 770
• --- – nanobeam 773
4
• 774
• 785
3
• --- – thin films 205
• SiOH groups 478
• Si-SiO2 stress formation 375
• SISO 973
• --- – design 969
• site-specific drug delivery 298
• Si-wafer 460
• SLAM 663
• slider 952
• sliding
• --- – contact 651
• --- – direction 585
• --- – distance 587
• --- – friction 734
• --- – of tip 632
• --- – speed 889
• --- – velocity 574
4
• 585
• 644
• 884
3
• SLIGA 168
• s-like tip states 422
• slip distance 732
4
• 889
3
• slipping and sliding regimes 586
• SMA (shape memory alloys) 260
• --- – actuation schemes 260
• --- – driven micropumps 261
• small angular deflection 1068
• small specimens handling 1025
• SMANCS
• --- (S-Methacryl-neocarzinostatin)
• --- 309
• --- – albumin complexes 309
• smart media card 905
• smart plastic biochip 273
• smooth sliding 585
• snap-in process 609
• SnO2(110) 400
• soap-like lubricants 887
• social
• --- – perception 1145
• --- – services 1142
• societal impacts 1136
• socio-technical trends 1141
• soft
• --- – cantilever 453
• --- – coatings 708
• --- – lithography 833
• --- – polymer stamps 190
• SOI wafer 1096
• solar furnace
• --- – devices 52
• --- – method 61
• solder bonding 1115
4
• 1118
3
• solid boundary lubricated surfaces
• --- 571
4
• 572
• 576
• 587
• 588
3
• solid solution catalyst 55
• solid xenon 436
• SOLID95 779
• solidification 578
4
• 582
3
• solid-like
• --- – behavior 593
• --- – Z-DOL(BW) 866
• solution-phase synthesis 107
• solvation
• --- – effect 621
4
• 623
3
• --- – forces 545
4
• 557
• 558
• 561
• 567
3
• sonolubrication 513
• soot 46
• SP 815
• spacer chain 839–841
• --- – length 844
• spark plasma sintering (SPS) 81
• spatial variation curvature 1058
• specific accumulation of
• --- nanoparticles 311
• specificity 752
• spectroscopic resolution in STS
• --- 419
• speed-energy product 1073
• spin
• --- – casting 192
• --- – coating 887
• --- – density waves 431
• --- – quantization 423
• spin-on-glass 965
• spiropyran 18
• SPM (scanning probe microscopy)
• --- 73
4
• 372
3
• --- – methods 672
• --- – tip 452
• spreading
• --- – dynamics 892
• --- – profile 892
• spring
• --- – sheet cantilever 341
• --- – system 327
4
• 929
3
• spring constant 377
4
• 387
• 390
• 393
3
• --- 433
4
• 450
• 451
• 469
• 480
• 483
• 611
3
• --- 633
4
• 671
• 911
• 956
• 1030
• 1067
3
• --- – calculation 347
• --- – changes 415
• --- – effective 637
4
• 645
• 721
3
• --- – lateral 338
4
• 636
3
• --- – measurement 346
• --- – torsional 1068
• --- – vertical 338
• sputtered coatings
• --- – physical properties 804
• sputtering
• --- – deposition 799
• --- – power 805
• sp3 bonding 806
• sp3-bonded carbon 813
• squeeze film damping 248
4
• 1073
3
• SRAM
• --- – cells 1088
• --- – CMOS static random access
• --- memory 235
• SrF2 398
4
• 399
3
• SrTiO3 402
• SrTiO3(100) 400
4
• 401
3
• stability
• --- – mechanical 927
• stabilization 1065
• stable field performance 1102
• stainless steel cantilever 813
• stamp
• --- – Au coated PDMS 192
• --- – Au/Ti coated 191
• --- – composite 188
• --- – depth 190
• --- – fabrication 186
• --- – mechanical properties 187
• --- – positioning 195
• standardization 249
• static
• --- – advancing contact angle (SACA)
• --- 847
• --- – AFM 388
4
• 469
3
2
• charge 1
3
• 8
2
3
• --- – charge 1103
• --- – deflection AFM 450
• --- – friction 571
4
• 576
• 579
• 583
3
• --- 585
4
• 589
• 590
• 593
• 718
• 731
3
• --- 1034
• --- – friction force 722
4
• 866
• 1014
3
• --- – interactions 544
4
• 584
3
• --- – mode 387
4
• 433
• 453
3
• --- – mode AFM 354
• statistical fluctuation model 889
• statistical kernels 891
• steady-state sliding see kinetic
• --- friction
• steady-state velocity 733
• step tilting 855
• stepping motor 636
• stereoelectronic properties 12
• stick slip 592
• sticking regime 586
• stick–slip 571
4
• 576
• 579
• 583
3
• --- 587
4
• 590
• 876
• 885
• 886
• 889
• 894
3
• --- – mechanism 636
• --- – motion 732
• stiction 579
4
• 832
• 885
• 991
• 1088
3
• --- 1103
• --- – phenomena in micromotors 1016
• --- – suppression 1103
• stiffness 390
4
• 663
• 819
3
• --- – torsional 349
• stiffness coefficient
• --- – elastic 1048
• stiffness measurement
• --- – continuous (CSM) 810
• STM (scanning tunneling
• --- microscope) 173
4
• 325
• 397
3
• --- – cantilever 330
• --- – cantilever material 339
• --- – principle 327
• --- – probe construction 330
• --- – tip 325
4
• 417
3
• stoichiometry of compound
• --- nanowires 115
• Stokes’s equation 933
• Stone–Wales defect 62
4
• 68
3
• Stoney equation 1024
• storage
• --- – capacity 946
• --- – drive industry 902
• --- – field 943
• --- – modulus 702
• --- – surface topography 942
• strain
• --- – energy 609
• --- – energy difference 810
• --- – engineering 147
4
• 170
3
• --- – theory 1144
• --- – thermally induced 1125
• --- – transformation 1041
• strain–displacement relation 1049
• stray capacitance 357
• strength 1023
• streptavidin 478
• --- – mutants 484
• stress 751
4
• 930
• 1023
3
• --- – activation volume 887
• --- – component 1043
• --- – distribution 779
4
• 1049
3
• --- – field 1024
• --- – gradient 1026
• --- – maximum 1027
• --- – measurement 1025
• --- – relaxation 1060
• --- – singularity 1043
• --- – tensor 759
• --- – transformation 1044
• --- – uniaxial 1042
• stresses within the capsid walls 758
• stress–strain
• --- – behavior 1028
• --- – curve 671
4
• 784
3
• --- – relation 1048
• stress–temperature response 1060
• stretch modulus 751
• Stribeck curve 569
4
• 584
• 884
3
• strip domain 439
• structural
• --- – characterization 110
• --- – entropy 886
4
• 887
3
• --- – forces 545
4
• 557
• 559
• 566
3
• --- – integrity 764
• --- – material 1028
• structurally programmable
• --- microfluidic system (sPROMs)
• --- 264
• structure factor 730
• structuring of simple liquids 886
• SU-8 resist 929
• sub-Angstrom deflections 372
• subcontractor 1087
• subculture theory 1145
• sublimation 52
• submicron
• --- – electron-beam lithography 246
• --- – ICs 247
• --- – lithographic techniques 246
• submonolayer
• --- – coverage 864
• --- – lubrication 731
• subnanometer precision 10
• sub-nanonewton precision 452
• substrate 839
4
• 840
3
• substrate curvature technique 1024
• substrate–slider interactions 727
• subsurface water irrigation 676
• super modulus 691
• supercapacitor 85
• superconducting
• --- – gap 431
• --- – magnetic levitation 327
• --- – matrix 440
• superconductivity 419
• superconductors 103
4
• 429
3
• --- – type-I 431
• --- – type-II 431
• superficial nanotechnology aspects
• --- 1140
• superlattice
• --- – nanowire 103
4
• 114
3
• --- – structure 108
• superlubricity 642
• superparamagnetic materials 305
• superparamagnetism 138
• superstructures of nanowires 108
• supramolecular
• --- – assembly 17
• --- – forces 35
• surface
• --- – adsorption 263
• --- – amorphous 544
• --- – asperity effect 513
• --- – atom layer 388
• --- – band 423
• --- – barrier potential height 890
• --- – charge 557
4
• 621
• 1074
3
• --- – charge density 555–557
• --- – chemistry 190
4
• 296
3
• --- – crystalline 544
• --- – diffusion 190
• --- – effects 129
• --- – elasticity 529
• --- – energy 619
4
• 792
• 1088
3
• --- – energy (tension) 547
4
• 552
• 566
3
• --- 567
4
• 572
• 574
• 578
3
• --- – forces 544
• --- – forces apparatus (SFA) 479
4
• 498
3
• --- 546
4
• 552
• 576
• 585
• 588
• 606
3
• --- 717
4
• 731
• 884
3
• --- – free energy 745
4
• 746
3
• --- – hydrophobic 544
4
• 560
3
• --- – micromachined accelerometers
• --- 231
• --- – micromachining 163
4
• 226
• 229
3
• --- – micromechanical properties 498
• --- – microtribological properties 498
• --- – mobility 865
• --- – nanomechanical properties 498
• --- – nanotribological properties 498
• --- – passivation 1102
• --- – potential 419
4
• 555
• 798
3
• --- – potential measurement 503
• --- – slope 844
• --- – state lifetime 423
• --- – stiffness 506
• --- – structure 111
4
• 400
• 544
• 558
• 559
3
• --- 566
4
• 567
• 570
• 586
• 591
3
• --- – tension 265
4
• 516
• 618
• 832
• 846
3
• --- 862
• --- – terminal group 839
• --- – topography 632
4
• 778
• 901
3
• --- – transfer chemistry 190
• --- – treatment 1104
• surface roughness 383
4
• 674
• 678
3
• --- 724
4
• 773
• 778
• 844
• 942
• 997
• 1009
3
• --- – map 510
• --- – measurement 500
• surface-mounted biofilter 272
• surfactant monolayers 547
4
• 564
3
• --- 568
4
• 577
• 580
• 584
• 585
• 588
3
• surfactants 103
4
• 107
3
• surgical resection 307
• suspended membrane 1028
• suspension 967
• --- – vibration 959
• suspension-level fabrication 967
• sustainable internal pressure
• --- – maximum 759
• sustained drug delivery 269
• switch
• --- – two-state 19
• switch design 1062
• switches
• --- – molecule-based 15
• --- – monolayer 28
• switching
• --- – architecture 238
• --- – devices 15
• --- – energy 135
• --- – speed 135
• --- – time 1073
• SWNT (single wall nanotube) 40,
• --- 52
• --- – adsorption properties 63
• --- – based FET 85
• --- – based materials 64
• --- – catalyst-based 61
• --- – conductance 75
• --- – electronic structure 66
• --- – epoxy composite 82
• --- – flexural modulus 67
• --- – magneto-resistance 67
• --- – matrix interaction 82
• --- – production techniques 45
• --- – rope 668
4
• 670
3
• --- – structure 41
• --- – surface area 64
• --- – tensile strength 67
• --- – thermal conductivity 66
• SWNT-PMMA composite 83
• symmetric deformation mode 1054
• sync pattern 946
• synchronization 945
• synthesis 100
• --- – reactor 47
• --- – yield 47
• synthetic
• --- – devices 281
• --- – nanoporous membrane 313
• --- – readback signal 941
• system
• --- – underdamped 894
2
1
• T
2
• T
• tailoring of SAMs --- track-etched
3
• tailoring of SAMs 841
• tapping amplitude 529
• tapping-mode 332
4
• 373
• 456
• 501
3
• --- 910
• --- – AFM 456
4
• 459
3
• --- – etched silicon probe (TESP) 341
• --- – resistance measurement 914
• --- – tip assembly 507
• targeting of nanomaterials 296
• Taylor dispersion pattern 266
• technical PVC 664
• technological convergence 1139
• Teflon layer 652
• temperature
• --- – annealing 227
• --- – critical 423
4
• 434
• 1059
3
• --- – dependence of friction 645
• --- – domain 664
• --- – effect 873
• --- – regulation 720
• --- – sensitive microcantilever 303
• temperature-dependent resistance
• --- 118
• template
• --- – manufacturing 170
4
• 176
• 179
3
• --- – synthesis 100
• template-assisted synthesis 100
• templates 103
• templating technique 57
• temporal scales 749
• tensile
• --- – load 1027
• --- – maximum stress 783
• --- – straining 1059
• --- – stress 767
4
• 1026
• 1035
• 1046
3
• --- – test 1036
• terabit 903
• terabyte 901
• test environment 824
• tethering
• --- – flexible 491
• tetraarylmethane 13
• tetracene 20
• --- – channel 21
• tetramethyl-aluminum hydroxide
• --- (TMAH) 204
4
• 254
3
• tetrapods 108
• tetrathiofulvane (TTF) 916
• T-filter 266
• therapeutic
• --- – bioactivity 312
• --- – nanodevices 280
• --- – nanomaterials 281
• --- – nanotechnology 285
• --- – photo-oxidation 299
• thermal
• --- – activation 894
• --- – activation model of friction 884
• --- – activation model of lubricated
• --- friction 887
• --- – conductivity 125
4
• 133
3
• --- – drift 414
4
• 417
3
• --- – effect 642
• --- – energy 481
• --- – expansion coefficient 388
4
• 1042
3
• --- – expansion mismatch 1056
• --- – fluctuation 633
• --- – fluctuation forces 564
• --- – fluctuations and velocity 890
• --- – force 751
• --- – frequency noise 415
• --- – management 1112
4
• 1122
3
• --- – mismatch 1125
• --- – noise 481
4
• 891
3
• --- – sensing 925
• --- – vibration amplitude 377
• thermocouples 123
• thermodynamic forces 293
• thermoelastic behavior 1040
• thermoelectric
• --- – applications 125
4
• 133
3
• --- – figure of merit 125
4
• 133
3
• --- – properties 122
4
• 123
3
• thermo-gravimetric analysis (TGA)
• --- 72
• thermomechanical
• --- – load 1040
4
• 1058
3
• --- – noise 433
• --- – write/read 924
• thermomechanics of multilayer film
• --- 1046
• thermoplastics 257
• thermopneumatic actuation 258
• theta condition 561
• thick film lubrication see
• --- elastohydrodynamic lubrication
• thickness 1047
• thickness of nanotubes 668
• thin film 701
4
• 707
3
• thin oxide film 913
• thin-film
• --- – limit 1051
• --- – lubrication 498
• --- – microstructure 1040
4
• 1041
3
• thin-plate theory 1046
4
• 1054
3
• thiol 464
4
• 837
3
• three-axis accelerometer 233
• three-digit input/output strings 20
• three-dimensional force field
• --- spectroscopy 437
• three-dimensional micromixers 265
• three-input NOR gate 22
• three-layer symmetric plate 1052
• three-state molecular switch 18
• three-terminal devices 31
• three-way microvalve system 258
• threshold potential 726
• through wafer etching 1113
• through-thickness
• --- – average 1044
• --- – cracking 807
• thymine 10
• Ti atom 405
• TiAl alloy 675
• TiC grains 508
• tight-binding approximation 402
• tilt angle of SAMs 855
• time scales 721
• timing field 943
• timing recovery 945
• TiO2 400
4
• 402
• 425
3
• --- – substrate 405
• TiO2(100) 400
• TiO2(110) 405
• TiO2-terminated layer 401
• tip
• --- – anion-terminated 399
• --- – apex 435
4
• 477
• 655
• 927
3
• --- – artifact 392
• --- – atom(s) 415
• --- – atomic structure 383
• --- – characterization 618
• --- – deflection 503
• --- – displacement 941
• --- – Fe-coated 403
• --- – ferromagnetic 441
• --- – geometry 377
• --- – hydrophilic 616
• --- – load 933
• --- – material 383
• --- – mount 329
• --- – oscillation 373
• --- – oscillation amplitude 654
• --- – performance 382
• --- – preparation in UHV 635
• --- – preparation method 330
• --- – properties 382
• --- – radius effect 339
4
• 515
• 813
• 876
3
• --- 878
• --- – shape 611
• --- – surface 477
• --- – vibration 460
• --- – vibration amplitude 664
• tip-bound
• --- – antigens 484
• --- – biomolecule 303
• tip-broadened image 374
• tip–cantilever assembly 376
• tip-induced atomic relaxation 435
• tip-induced quantum dot 424
• tip–liquid interface 531
4
• 868
3
• tip–molecule
• --- – distance 419
• --- – gap 406
• --- – long-range force 406
• tip–particle distance 29
• tip–polymer interface 935
• tip–sample 451
• --- – contact 467
• --- – dissipative interaction 468
• --- – distance 388
4
• 396
• 399
• 401
• 435
3
• --- 451
4
• 459
• 507
3
• --- – electric field 656
• --- – energy dissipation 389
• --- – force 373
4
• 388
• 433
• 436
• 450
3
• --- 453
4
• 455
• 460
• 461
3
• --- – force gradient 391
• --- – gap 910
• --- – interaction 391
4
• 433
• 441
• 455
3
• --- 456
4
• 462
• 654
3
• --- – interaction force 608
• --- – interaction potential 464
• --- – interface 372
• --- – junction 468
• --- – potential 390
• --- – separation 467
4
• 608
• 609
3
• --- – system 664
• tip–surface
• --- – distance 406
4
• 468
3
• --- – interaction 490
4
• 651
3
• --- – potential 636
• --- – separation 480
• tip-terminated atom 400
• tire pressure monitor 1094
• tissue dendritic cells (DCs) 296
• tissue engineering scaffolds 310
• titin 485
• TMR sources 969
• Tomlinson model 631
4
• 636
3
• --- – finite temperature 642
• --- – of friction 884
• --- – one-dimensional 636
• --- – two-dimensional 637
• tooth enamel 675
• top-down
• --- – approach 10
4
• 133
3
• --- – materials 281
• topographic
• --- – AFM image 611
• --- – images 331
• topographical asymmetry 403
• topography measurement 334
• torsion mirror
• --- – vertical 238
• torsional plate 1068
• torus model calculation 360
• total internal reflection microscopy
• --- (TIRM) 550
• touch mode architecture 228
• Townsend electron avalanche theory
• --- 1077
• toxicity monitoring 274
• trabecular bone 679
• track
• --- – centerline 943
4
• 945
3
• --- – following 943
• --- – mis-registration (TMR) 969
• --- – pitch (TP) 943
• track-etched
2
• polycarbonate membranes 1 --- two-terminal nanowire device
3
• --- – polycarbonate membranes 102
• --- – polymers 100
• track-following controller 971
• tracking servo loop 943
• tracks per inch (TPI) 952
• transducer component 302
• transfer time 901
• transformation
• --- – strain 1041
• --- – stress 1044
• transistors 132
• transition metal complexes 31
• transition metal oxides 402
• transitions between smooth and
• --- stick–slip sliding 585
• translational microactuator 958
• transmembrane channel 741
• transmission 129
• transmission electron microscopy
• --- (TEM) 111
4
• 374
• 521
• 693
3
• transplant rejection 311
• transport properties of nanowires
• --- 115
4
• 118
3
• transversal piezo-resistive effect
• --- 356
• transverse
• --- – magnetoresistance 121
• --- – midplane displacement 1055
• --- – relaxation time (T2) 305
• traveling direction of the sample
• --- 346
• Tresca criterion 695
• triangular cantilever 339
4
• 349
• 354
3
• triaryl 13
• tribochemical
• --- – oxidation 999
• --- – reaction 531
4
• 872
3
• tribological
• --- – characterization of coating 805
• --- – computer simulations 721
• tribological issues
• --- – inMEMS 989
• --- – inNEMS 989
• tribological performance 996
• --- – of coatings 822
• tribological properties
• --- – of SAM 841
• --- – of silicon 996
• tribometer 996
• --- (tridecafluoro-1,1,
4
• ,2
• te
3
• --- 1-yl) trichlorosilane
• --- (n-C6F13CH2CH2SiCl3, FTS)
• --- 842
• triethanolamine 14
• triethoxysilane 644
• trifluoromethyl-terminated SAM
• --- 843
• triggering 288
• --- – external 284
• --- – strategy 298
• trimer tip apex 452
• true atomic resolution 389
4
• 392
• 434
3
• true tip-sample interaction 608
• truth table 17
4
• 21
3
• T-SLAM 663
• tubulin monomer 740
• tumor
• --- – architecture 307
• --- – associated antigens (TAAs) 307
• --- – deposition 309
• --- – properties 307
• --- – targeting 307
• --- – vasculature 307
• tungsten 330
• --- – sphere 633
• --- – tip 330
4
• 468
• 614
3
• tunneling
• --- – current 327
4
• 388
• 389
• 424
3
• --- – detector 331
• --- – junctions 25
• --- – tip 431
• turn-on voltage 117
• two-body potentials 719
• two-digit input strings 20
• two-dimensional
• --- – elasticity 754
• --- – electron gas (2-DEG) 438
• --- – electron system (2-DES) 428
• two-layer beam 1045
• two-state switch 19
• two-terminal nanowire device 132
2
1
• U
2
• U
• UHV environment 638
• UHV-AVM 635
• ultrahigh vacuum (UHV) 391
3
• 418
2
• --- 461
3
• 607
• 635
2
• ultrasonic
• --- – bonding 1119
• --- – lubrication 513
• --- – transducer 663
• ultrasound triggering 299
• ultrathin DLC coatings 795
• umklapp processes 125
• unbinding
• --- – force 476
3
• 481
2
• --- – force distribution 485
• --- – pathway 488
• uncapped MEMS wafer 1097
3
• 1098
2
• uncoated monolithic cantilever 611
• uncommon failure mode 1102
• unconstrained binding 477
• unidirectional electron transfer 28
• unimolecular level 22
• universality 752
• unlubricated sample 879
• unlubricated surfaces see dry
• --- surfaces
• upward cantilever deflection 746
• UV-LIGA lithography 267
1
• V
2
• V
• vacuum encapsulation 1116
3
• 1117
2
• --- 1126
• vacuum packaged MEMS 1118
• vacuum packaging 231
3
• 1116
• 1121
2
• van der Waals 607
3
• 617
• 621
2
• --- – adhesion 616
• --- – attraction 515
• --- – contact 759
• --- – force 372
3
• 386
• 398
• 404
• 406
2
• --- 450
3
• 544
• 545
• 550
• 557
• 558
2
• --- 618
• --- – interaction 58
3
• 289
• 402
• 457
2
• --- 843
3
• 865
2
• --- – surfaces 435
• vanadium carbide 691
• vapor deposition 104
3
• 120
2
• vapor grown
• --- – carbon fiber 53
• --- – carbon nanofiber 56
• vapor-liquid-solid (VLS) mechanism
• --- 105
• varactor diodes 241
• variable capacitor 240
• variable force mode 362
• variable temperature STM
• --- – setup 416
• variable-temperature SLAM
• --- (T-SLAM) 663
• vascular
• --- – address system mapping 297
3
• 298
2
• --- – prosthesis 310
• VCM loop compensator 972
• vehicle stability 232
• velocity
• --- – critical 585
3
• 587
• 590
• 591
2
• velocity dependence of friction
• --- 644
• velocity effect 871
• Verlet algorithm 457
• vertical coupling 329
• vertical rms-noise 434
• vertically aligned MWNT 59
• Verwey transition temperature 439
• very large-scale integration (VLSI)
• --- 922
3
• 940
2
• vibration 749
• --- – external 329
• vibratory rate gyroscope 232
• vibromotor 236
• Vickers
• --- – hardness 674
3
• 678
• 695
2
• --- – indentations 771
• --- – indenter 765
• vinylidene fluoride 404
• viral life cycle 755
• virgin single-crystal silicon 996
• virtual jump distance 889
• viruses 747
• viscoelastic
• --- – effect 468
• --- – model 934
• --- – properties 681
• --- – relaxation time 731
• --- – response 731
• viscoelasticity 663
3
• 702
• 711
2
• --- – mapping 505
3
• 528
2
• viscosity 730
3
• 885
2
• viscous
• --- – damping 469
• --- – force 569
3
• 580
• 584
• 1061
2
• VLS (Vapor-Liquid-Solid) 60
• --- – growth method 116
• --- – mechanism 60
• --- – method 105
3
• 108
• 137
2
• VLSI (very large scale integration)
• --- 922
3
• 940
2
• voice coil motor (VCM) 952
• voltage bias 383
• voltage-controlled oscillator (VCO)
• --- 239
3
• 946
2
• voltage-displacement function
• --- 1068
• voltage-to-force gain 956
• von Karman plate theory 1055
• vortex in superconductor 440
• V-shaped cantilever 341
3
• 610
• 634
2
1
• W
2
• W
• W tip 330
• wafer
• --- – curvature technique 1034
• --- – fabrication 1087
• --- – saw dilemma 1097
3
• 1098
2
• wafer-level vacuum packaging 1122
• wafer-to-wafer
• --- – vacuum packaging 1114
• --- – variation 1072
• waste disposal concern 1090
• water 613
• --- – capillary force 847
• --- – meniscus 461
• water vapor 691
3
• 695
2
• --- – content 824
• Watson-Crick base pairing 484
• wear 498
3
• 618
• 793
2
• --- 809
• --- – contribution to friction 650
• --- – control 832
• --- – damage 824
• --- – damage mechanism 823
• --- – debris 521
• --- – depths 1000
• --- – measurement 325
• --- – mechanical 263
• --- – mechanism 522
• --- – of tip 728
• --- – performance 866
• --- – process 822
• --- – region 523
• --- – resistance 822
3
• 823
• 853
• 856
2
• --- 879
3
• 997
• 1008
2
• --- – study 879
• --- – test 822
• wearless
• --- – friction 884
• --- – static friction 726
• Weibull
• --- – distribution 774
• --- – distribution function 1125
• --- – statistics 1036
• weight function 390
• weighting functions for ?-synthesis
• --- 976
• well-aligned nanowires 111
• wet (chemical) etching 254
• wet etching in HF 247
• wettability 846
• wetting 569
• --- – lubricants 892
• white-noise driven system 889
• wire boundary scattering 121
• wire cantilever 339
• wireless communication 1094
• work
• --- – hardening 704
3
• 709
2
• --- – of adhesion 844
3
• 847
• 1011
2
• --- – of indentation 701
• write/read scheme 931
• writing mechanism 932
1
• X
2
• X
• xenon 417
• XNOR 17
• X-ray
• --- – analysis 115
• --- – diffraction (XRD) patterns 103
• --- – lithographic techniques 286
1
• Y
2
• Y
• yield point 570
3
• 571
• 585
2
• --- – load 703
• yield stress 703
• yielding 1055
• Young’s modulus 81
3
• 346
• 362
• 377
2
• --- 415
3
• 611
• 646
• 668
• 677
• 779
• 1023
2
• --- 1024
3
• 1044
• 1071
2
• --- – measurement 1028
• Young–Dupre equation 846
• Young–Laplace equation 612
1
• Z
2
• Z
• Z-15 530
3
• 862
• 874
• 878
• 1006
2
• --- – film 531
3
• 879
2
• --- – lubricant 1003
• --- – lubricant film 867
• --- – properties 863
• z-axis accelerometer 230
• z-axis gyroscope 233
• Z-DOL 530
3
• 614
• 862
• 869
2
• --- – partially bonded film 880
• --- – properties 863
• Z-DOL(BW) 868
3
• 874
• 877
2
• --- 1006
• --- – film 530
3
• 867
• 1003
2
• zeolites 54
• zeta potential 261
• zig-zag axis 42
• zig-zag-type SWNT 42
• zinc 704
• zipper actuator 1070
• Zn nanowire 120
3
• 123
2
• ZnO nanowire 135
1